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Sensors 2009, 9(3), 2162-2175; doi:10.3390/s90302162

Article

Electromechanical Characteristic Analysis of Passive Matrix Addressing for Grating Light Modulator

Zhu Jin ^{1, 2,}* , Zhiyu Wen ^{1, 2} , Zhihai Zhang ^{1, 2}  and Shanglian Huang ^{1, 2}

¹ The Key Laboratory of Fundamental Science of Micro/Nano Device & System Technology, Chongqing university, Chongqing, 400044, P.R. China ² Optoelectronic Engineering Department, Chongqing University, Chongqing, 400044, P.R. China

* Author to whom correspondence should be addressed.

Received: 23 January 2009; in revised form: 5 March 2009 / Accepted: 19 March 2009 / Published: 24 March 2009

(This article belongs to the Special Issue Selected Papers from the 1st International Conference of the Chinese Society of Micro/Nano Technology)

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Abstract: AGrating Light Modulator (GLM) based on Micro-Electro-Mechanical Systems (MEMS) is applied in projection display. The operating principle of the GLM is introduced in this paper. The electromechanical characteristic of the passive matrix addressing GLM is studied. It was found that if the spring constant is larger, both the response frequency and the driving voltage are larger. Theoretical analysis shows that the operating voltage and the pull-in voltage of the GLM are 8.16 and 8.74 V, respectively. When an all-selected pixel in a m×n array is actuated by a voltage V₀, the voltages of the half-selected pixel in row and column are V₀(m-1)/(m+n-1) and V₀(n-1)/(m+n-1), respectively, and the voltage of the non-selected pixel is V₀/(m+n-1). Finally, the experimental results indicate that the operating voltage and the pull-in voltage are 7.8 and 8.5V respectively, and the response frequency of the GLM is about 7 kHz. The crosstalk in a 16×16 GLM array is validated by the experiment. These studies provide a theoretical basis for improving the GLM driver.

Keywords: MEMS; GLM; response frequency; driving voltage; crosstalk

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