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Sensors 2009, 9(3), 1382-1393; doi:10.3390/s90301382
Review

Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS)

* , , , , ,  and
State Key Laboratory for Mechanical Manufacturing System, Institute of Precision Engineering, Xi'an Jiaotong University, Xi'an 710049, P.R. China
* Author to whom correspondence should be addressed.
Received: 21 January 2009 / Revised: 17 February 2009 / Accepted: 22 February 2009 / Published: 27 February 2009
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Abstract

In this paper we describe the design and testing of a micro piezoresistive pressure sensor for a Tire Pressure Measurement System (TPMS) which has the advantages of a minimized structure, high sensitivity, linearity and accuracy. Through analysis of the stress distribution of the diaphragm using the ANSYS software, a model of the structure was established. The fabrication on a single silicon substrate utilizes the technologies of anisotropic chemical etching and packaging through glass anodic bonding. The performance of this type of piezoresistive sensor, including size, sensitivity, and long-term stability, were investigated. The results indicate that the accuracy is 0.5% FS, therefore this design meets the requirements for a TPMS, and not only has a smaller size and simplicity of preparation, but also has high sensitivity and accuracy.
Keywords: Piezoresistive; TPMS; Pressure sensor; FEM Piezoresistive; TPMS; Pressure sensor; FEM
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
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Tian, B.; Zhao, Y.; Jiang, Z.; Zhang, L.; Liao, N.; Liu, Y.; Meng, C. Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS). Sensors 2009, 9, 1382-1393.

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