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Sensors 2009, 9(3), 1382-1393; doi:10.3390/s90301382

Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS)

* , , , , ,  and
State Key Laboratory for Mechanical Manufacturing System, Institute of Precision Engineering, Xi'an Jiaotong University, Xi'an 710049, P.R. China
* Author to whom correspondence should be addressed.
Received: 21 January 2009 / Revised: 17 February 2009 / Accepted: 22 February 2009 / Published: 27 February 2009
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In this paper we describe the design and testing of a micro piezoresistive pressure sensor for a Tire Pressure Measurement System (TPMS) which has the advantages of a minimized structure, high sensitivity, linearity and accuracy. Through analysis of the stress distribution of the diaphragm using the ANSYS software, a model of the structure was established. The fabrication on a single silicon substrate utilizes the technologies of anisotropic chemical etching and packaging through glass anodic bonding. The performance of this type of piezoresistive sensor, including size, sensitivity, and long-term stability, were investigated. The results indicate that the accuracy is 0.5% FS, therefore this design meets the requirements for a TPMS, and not only has a smaller size and simplicity of preparation, but also has high sensitivity and accuracy.
Keywords: Piezoresistive; TPMS; Pressure sensor; FEM Piezoresistive; TPMS; Pressure sensor; FEM
This is an open access article distributed under the Creative Commons Attribution License (CC BY) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Tian, B.; Zhao, Y.; Jiang, Z.; Zhang, L.; Liao, N.; Liu, Y.; Meng, C. Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS). Sensors 2009, 9, 1382-1393.

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