Abstract: In this paper we describe the design and testing of a micro piezoresistive pressure sensor for a Tire Pressure Measurement System (TPMS) which has the advantages of a minimized structure, high sensitivity, linearity and accuracy. Through analysis of the stress distribution of the diaphragm using the ANSYS software, a model of the structure was established. The fabrication on a single silicon substrate utilizes the technologies of anisotropic chemical etching and packaging through glass anodic bonding. The performance of this type of piezoresistive sensor, including size, sensitivity, and long-term stability, were investigated. The results indicate that the accuracy is 0.5% FS, therefore this design meets the requirements for a TPMS, and not only has a smaller size and simplicity of preparation, but also has high sensitivity and accuracy.
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Tian, B.; Zhao, Y.; Jiang, Z.; Zhang, L.; Liao, N.; Liu, Y.; Meng, C. Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS). Sensors 2009, 9, 1382-1393.
Tian B, Zhao Y, Jiang Z, Zhang L, Liao N, Liu Y, Meng C. Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS). Sensors. 2009; 9(3):1382-1393.
Tian, Bian; Zhao, Yulong; Jiang, Zhuangde; Zhang, Ling; Liao, Nansheng; Liu, Yuanhao; Meng, Chao. 2009. "Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS)." Sensors 9, no. 3: 1382-1393.