Next Article in Journal
Robust Design of SAW Gas Sensors by Taguchi Dynamic Method
Next Article in Special Issue
Humidity Sensitivity of Multi-Walled Carbon Nanotube Networks Deposited by Dielectrophoresis
Previous Article in Journal
Scaling-up Transformation of Multisensor Images with Multiple Resolutions
Previous Article in Special Issue
An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer
Sensors 2009, 9(3), 1382-1393; doi:10.3390/s90301382

Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS)

* , , , , ,  and
State Key Laboratory for Mechanical Manufacturing System, Institute of Precision Engineering, Xi'an Jiaotong University, Xi'an 710049, P.R. China
* Author to whom correspondence should be addressed.
Received: 21 January 2009 / Revised: 17 February 2009 / Accepted: 22 February 2009 / Published: 27 February 2009
View Full-Text   |   Download PDF [392 KB, uploaded 21 June 2014]   |  


In this paper we describe the design and testing of a micro piezoresistive pressure sensor for a Tire Pressure Measurement System (TPMS) which has the advantages of a minimized structure, high sensitivity, linearity and accuracy. Through analysis of the stress distribution of the diaphragm using the ANSYS software, a model of the structure was established. The fabrication on a single silicon substrate utilizes the technologies of anisotropic chemical etching and packaging through glass anodic bonding. The performance of this type of piezoresistive sensor, including size, sensitivity, and long-term stability, were investigated. The results indicate that the accuracy is 0.5% FS, therefore this design meets the requirements for a TPMS, and not only has a smaller size and simplicity of preparation, but also has high sensitivity and accuracy.
Keywords: Piezoresistive; TPMS; Pressure sensor; FEM Piezoresistive; TPMS; Pressure sensor; FEM
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Share & Cite This Article

Further Mendeley | CiteULike
Export to BibTeX |
EndNote |
MDPI and ACS Style

Tian, B.; Zhao, Y.; Jiang, Z.; Zhang, L.; Liao, N.; Liu, Y.; Meng, C. Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS). Sensors 2009, 9, 1382-1393.

View more citation formats

Related Articles

Article Metrics

For more information on the journal, click here


[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert