Next Article in Journal
Sequential Atmospheric Pressure Plasma-Assisted Laser Ablation of Photovoltaic Cover Glass for Improved Contour Accuracy
Next Article in Special Issue
Fabrication and Testing of an Osmotic Pressure Sensor for Glucose Sensing Application
Previous Article in Journal / Special Issue
An Experimental Investigation of Micro Pulsating Heat Pipes
Article Menu

Export Article

Open AccessArticle
Micromachines 2014, 5(2), 396-407; doi:10.3390/mi5020396

Microfabrication of a Novel Ceramic Pressure Sensor with High Sensitivity Based on Low-Temperature Co-Fired Ceramic (LTCC) Technology

1
Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China
2
Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China
*
Authors to whom correspondence should be addressed.
Received: 5 April 2014 / Revised: 12 June 2014 / Accepted: 13 June 2014 / Published: 24 June 2014
(This article belongs to the Special Issue Micro/Nano Fabrication)
View Full-Text   |   Download PDF [2751 KB, uploaded 24 June 2014]   |  

Abstract

In this paper, a novel capacitance pressure sensor based on Low-Temperature Co-Fired Ceramic (LTCC) technology is proposed for pressure measurement. This approach differs from the traditional fabrication process for a LTCC pressure sensor because a 4J33 iron-nickel-cobalt alloy is applied to avoid the collapse of the cavity and to improve the performance of the sensor. Unlike the traditional LTCC sensor, the sensitive membrane of the proposed sensor is very flat, and the deformation of the sensitivity membrane is smaller. The proposed sensor also demonstrates a greater responsivity, which reaches as high as 13 kHz/kPa in range of 0–100 kPa. During experiments, the newly fabricated sensor, which is only about 6.5 cm2, demonstrated very good performance: the repeatability error, hysteresis error, and nonlinearity of the sensor are about 4.25%, 2.13%, and 1.77%, respectively. View Full-Text
Keywords: 4J33 iron-nickel-cobalt alloy; LTCC; pressure sensor; MEMS device; sensitivity 4J33 iron-nickel-cobalt alloy; LTCC; pressure sensor; MEMS device; sensitivity
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Li, C.; Tan, Q.; Zhang, W.; Xue, C.; Li, Y.; Xiong, J. Microfabrication of a Novel Ceramic Pressure Sensor with High Sensitivity Based on Low-Temperature Co-Fired Ceramic (LTCC) Technology. Micromachines 2014, 5, 396-407.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top