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Sensors 2011, 11(10), 9217-9232; doi:10.3390/s111009217

Genetic Algorithm for the Design of Electro-Mechanical Sigma Delta Modulator MEMS Sensors

School of Electronics and Computer Science, University of Southampton, Highfield, Southampton SO17 1BJ, UK
Author to whom correspondence should be addressed.
Received: 4 July 2011 / Revised: 19 August 2011 / Accepted: 22 September 2011 / Published: 27 September 2011
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering 2011)
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This paper describes a novel design methodology using non-linear models for complex closed loop electro-mechanical sigma-delta modulators (EMΣΔM) that is based on genetic algorithms and statistical variation analysis. The proposed methodology is capable of quickly and efficiently designing high performance, high order, closed loop, near-optimal systems that are robust to sensor fabrication tolerances and electronic component variation. The use of full non-linear system models allows significant higher order non-ideal effects to be taken into account, improving accuracy and confidence in the results. To demonstrate the effectiveness of the approach, two design examples are presented including a 5th order low-pass EMΣΔM for a MEMS accelerometer, and a 6th order band-pass EMΣΔM for the sense mode of a MEMS gyroscope. Each example was designed using the system in less than one day, with very little manual intervention. The strength of the approach is verified by SNR performances of 109.2 dB and 92.4 dB for the low-pass and band-pass system respectively, coupled with excellent immunities to fabrication tolerances and parameter mismatch. View Full-Text
Keywords: genetic algorithm (GA); sigma delta modulator (ΣΔM); micro-electro-mechanical systems (MEMS); gyroscope; accelerometer genetic algorithm (GA); sigma delta modulator (ΣΔM); micro-electro-mechanical systems (MEMS); gyroscope; accelerometer

This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Wilcock, R.; Kraft, M. Genetic Algorithm for the Design of Electro-Mechanical Sigma Delta Modulator MEMS Sensors. Sensors 2011, 11, 9217-9232.

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