Sensors 2013, 13(9), 12564-12580; doi:10.3390/s130912564
Article

Analysis and Design of a 3rd Order Velocity-Controlled Closed-Loop for MEMS Vibratory Gyroscopes

1 Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China 2 Ningbo High-tech Institute, Ningbo University, Ningbo 315211, China 3 Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
* Author to whom correspondence should be addressed.
Received: 11 June 2013; in revised form: 30 July 2013 / Accepted: 27 August 2013 / Published: 18 September 2013
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering 2011)
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Abstract: The time-average method currently available is limited to analyzing the specific performance of the automatic gain control-proportional and integral (AGC-PI) based velocity-controlled closed-loop in a micro-electro-mechanical systems (MEMS) vibratory gyroscope, since it is hard to solve nonlinear functions in the time domain when the control loop reaches to 3rd order. In this paper, we propose a linearization design approach to overcome this limitation by establishing a 3rd order linear model of the control loop and transferring the analysis to the frequency domain. Order reduction is applied on the built linear model’s transfer function by constructing a zero-pole doublet, and therefore mathematical expression of each control loop’s performance specification is obtained. Then an optimization methodology is summarized, which reveals that a robust, stable and swift control loop can be achieved by carefully selecting the system parameters following a priority order. Closed-loop drive circuits are designed and implemented using 0.35 μm complementary metal oxide semiconductor (CMOS) process, and experiments carried out on a gyroscope prototype verify the optimization methodology that an optimized stability of the control loop can be achieved by constructing the zero-pole doublet, and disturbance rejection capability (D.R.C) of the control loop can be improved by increasing the integral term.
Keywords: MEMS vibratory gyroscopes; velocity-controlled closed-loop; 3rd order; linear model; optimization methodology

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MDPI and ACS Style

Wu, H.-M.; Yang, H.-G.; Yin, T.; Jiao, J.-W. Analysis and Design of a 3rd Order Velocity-Controlled Closed-Loop for MEMS Vibratory Gyroscopes. Sensors 2013, 13, 12564-12580.

AMA Style

Wu H-M, Yang H-G, Yin T, Jiao J-W. Analysis and Design of a 3rd Order Velocity-Controlled Closed-Loop for MEMS Vibratory Gyroscopes. Sensors. 2013; 13(9):12564-12580.

Chicago/Turabian Style

Wu, Huan-ming; Yang, Hai-gang; Yin, Tao; Jiao, Ji-wei. 2013. "Analysis and Design of a 3rd Order Velocity-Controlled Closed-Loop for MEMS Vibratory Gyroscopes." Sensors 13, no. 9: 12564-12580.

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