Sensors 2013, 13(9), 12564-12580; doi:10.3390/s130912564
Article

Analysis and Design of a 3rd Order Velocity-Controlled Closed-Loop for MEMS Vibratory Gyroscopes

Received: 11 June 2013; in revised form: 30 July 2013 / Accepted: 27 August 2013 / Published: 18 September 2013
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering 2011)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: The time-average method currently available is limited to analyzing the specific performance of the automatic gain control-proportional and integral (AGC-PI) based velocity-controlled closed-loop in a micro-electro-mechanical systems (MEMS) vibratory gyroscope, since it is hard to solve nonlinear functions in the time domain when the control loop reaches to 3rd order. In this paper, we propose a linearization design approach to overcome this limitation by establishing a 3rd order linear model of the control loop and transferring the analysis to the frequency domain. Order reduction is applied on the built linear model’s transfer function by constructing a zero-pole doublet, and therefore mathematical expression of each control loop’s performance specification is obtained. Then an optimization methodology is summarized, which reveals that a robust, stable and swift control loop can be achieved by carefully selecting the system parameters following a priority order. Closed-loop drive circuits are designed and implemented using 0.35 μm complementary metal oxide semiconductor (CMOS) process, and experiments carried out on a gyroscope prototype verify the optimization methodology that an optimized stability of the control loop can be achieved by constructing the zero-pole doublet, and disturbance rejection capability (D.R.C) of the control loop can be improved by increasing the integral term.
Keywords: MEMS vibratory gyroscopes; velocity-controlled closed-loop; 3rd order; linear model; optimization methodology
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MDPI and ACS Style

Wu, H.-M.; Yang, H.-G.; Yin, T.; Jiao, J.-W. Analysis and Design of a 3rd Order Velocity-Controlled Closed-Loop for MEMS Vibratory Gyroscopes. Sensors 2013, 13, 12564-12580.

AMA Style

Wu H-M, Yang H-G, Yin T, Jiao J-W. Analysis and Design of a 3rd Order Velocity-Controlled Closed-Loop for MEMS Vibratory Gyroscopes. Sensors. 2013; 13(9):12564-12580.

Chicago/Turabian Style

Wu, Huan-ming; Yang, Hai-gang; Yin, Tao; Jiao, Ji-wei. 2013. "Analysis and Design of a 3rd Order Velocity-Controlled Closed-Loop for MEMS Vibratory Gyroscopes." Sensors 13, no. 9: 12564-12580.

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