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Micromachines
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NANO KOREA 2022
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NANO KOREA 2022

A special issue of Micromachines (ISSN 2072-666X).

Deadline for manuscript submissions: closed (2 September 2022) | Viewed by 8743

Special Issue Editors

Prof. Dr. Moongyu Jang
*
E-Mail Website
Guest Editor
Department of Materials Engineering & Engineering, Hallym University, Chuncheon 24252, Korea
Interests: semiconductor logic device; memory device; display device; optoelectronic device; energy conversion; 1D nanomaterials; 2D nanomaterials; semiconductors; graphene; thermoelectrics; energy harvesting; nanolithography; photolithography; nanowire FET; electrical/electrochemical nanobiosensors
* Publication Chair
Special Issues, Collections and Topics in MDPI journals
Prof. Dr. Won Seok Chang

E-Mail Website
Guest Editor
1. Department of Nano Manufacturing Technology, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, Republic of Korea
2. Department of Nano-Mechatronics, Korea University of Science and Technology (UST), Daejeon 34113, Republic of Korea
Interests: quantum dots; semiconductors; metals; nanolithography; photolithography; nanoimprint; scanning probe lithography; 3D printing; atomic force microscopy; carbon nanotube; flexible device; stretchable device; nanometrology; ultrafast laser processing; laser scanning microscopy; nanomaterial-based flexible device; maskless digital lithography
Special Issues, Collections and Topics in MDPI journals
Prof. Dr. Changhwan Choi

E-Mail Website
Guest Editor
Division of Materials Science and Engineering, Hanyang University, Seoul 04763, Republic of Korea
Interests: semiconductor logic device; memory device; power device; display device; optoelectronic device; electronic nanomaterials; semiconductors; 2D nanodevice; nanowire FET; neuromorphic computing memristive device; resistive-switching device; ferroelectric FET; flexible device; advanced semiconductor and display devices; materials; process technology
Special Issues, Collections and Topics in MDPI journals
Prof. Dr. Junhong Min

E-Mail Website
Guest Editor
School of Integrative Engineering, Chung-Ang University, Seoul 06974, Republic of Korea
Interests: atomic force microscopy; electrical/electrochemical nanobiosensors; optical nanobiosensors; biochips; BioMEMS and BioNEMS; nanobiomaterials for environments; nanotechnology for bio-robotics; nanotechnology for tissue engineering and regenerative medicine; nanomaterials and nanotechnology in drug and gene delivery; nano-toxicology; sample preparation; molecular diagnostic system; bioanalytical engineering
Special Issues, Collections and Topics in MDPI journals
Dr. Dukhyun Choi

E-Mail Website
Guest Editor
School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea
Interests: nano sensors; nanoenergy; electronic skin with physical sensor; plasmonics; nanostructures; nanocomposites; piezoelectronics; energy harvesting; triboelectric; atomic force microscopy; tip-enhanced Raman spectroscopy; physical sensor; flexible device; stretchable device; nanomechanics; meta-materials
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

The NANO KOREA Symposium, Korea’s largest symposium on nanoscale science and technology, is a meaningful occasion to confirm major research results and up-to-date research trends in Korea and overseas. The NANO KOREA 2022 Symposium, which will be held from 6 to 8 July 2022 in KINTEX, Korea, consists of advanced programs along with the main theme of ‘Nanofabrication: Connecting Science and Technology For Better Life’. The NANO KOREA Symposium 2022 Special Issue will contain research results and reviews about the most important and latest developments and future trends or visions for the convergence of various technologies from the nano- to the microscopic scale. The symposium programs will cover the following main topics:

  • Nanoenergy harvesting;
  • Nanotechnology for solar and hydrogen energy;
  • Nanotechnology for next-generation energy storage;
  • Nanobiotechnology;
  • Nanomedicine;
  • Nanoelectronic devices;
  • Nanophotonics;
  • Hybrid nanomaterials for next-generation convergence science and technology;
  • Nanofabrication platform;
  • Nano metrology and characterization;
  • Nano-EHS and standardization of nanotechnology;
  • AI and computational science for nanotechnology. 

Prof. Dr. Moongyu Jang
Prof. Dr. Won Seok Chang
Prof. Dr. Changhwan Choi
Prof. Dr. Junhong Min
Dr. Dukhyun Choi
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Published Papers (6 papers)

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Research

12 pages, 3648 KiB  
Article
Ophthalmic Hydrogel Contact Lens Material Containing Magnesium Oxide Nanoparticles and 3-(Trifluoromethyl)styrene for Biomedical Application
by Min-Jae Lee, Seon-Young Park and A-Young Sung
Micromachines 2022, 13(11), 1897; https://doi.org/10.3390/mi13111897 - 02 Nov 2022
Cited by 3 | Viewed by 1333
Abstract
This research was conducted for the synthesis and application of ophthalmic lens materials with improved oxygen permeability and durability. Polyvinylpyrrolidone (PVP), N-vinyl-2-pyrrolidone (NVP), 3-(trifluoromethyl)styrene (3-TFMSt), and magnesium oxide nanoparticles were used as additives for the basic combination of 2-hydroxyethyl methacrylate (HEMA). Additionally, the [...] Read more.
This research was conducted for the synthesis and application of ophthalmic lens materials with improved oxygen permeability and durability. Polyvinylpyrrolidone (PVP), N-vinyl-2-pyrrolidone (NVP), 3-(trifluoromethyl)styrene (3-TFMSt), and magnesium oxide nanoparticles were used as additives for the basic combination of 2-hydroxyethyl methacrylate (HEMA). Additionally, the materials were copolymerized with ethylene glycol dimethacrylate (EGDMA) as the cross-linking agent and azobisisobutyronitrile (AIBN) as the initiator. The addition of magnesium oxide nanoparticles was found to increase the tensile strength from 0.0631 to 0.0842 kgf/mm2. Copolymerization with a small amount of 3-TFMSt of about 1% increased the tensile strength to 0.1506 kgf/mm2 and the oxygen permeability from 6.00 to 9.64 (cm2/s)∙(mLO2/mL·mmHg)∙10−11. The contact lens material produced using N-vinyl-2-pyrrolidone and magnesium oxide nanoparticles as additives satisfied the basic physical properties required for hydrogel contact lenses and is expected to be used usefully as a material for fabricating high-performance hydrogel lenses. Full article
(This article belongs to the Special Issue NANO KOREA 2022)
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13 pages, 4176 KiB  
Article
Three Methods for Application of Data from a Volumetric Method to the Kissinger Equation to Obtain Activation Energy
by Myoung Youp Song and Young Jun Kwak
Micromachines 2022, 13(11), 1809; https://doi.org/10.3390/mi13111809 - 23 Oct 2022
Cited by 4 | Viewed by 1205
Abstract
Thermal analysis methods have been used in many reports to determine the activation energy for hydride decomposition (dehydrogenation). In our preceding work, we showed that the dehydrogenation rate of Mg-5Ni samples obeyed the first-order law, and the Kissinger equation could thus be used [...] Read more.
Thermal analysis methods have been used in many reports to determine the activation energy for hydride decomposition (dehydrogenation). In our preceding work, we showed that the dehydrogenation rate of Mg-5Ni samples obeyed the first-order law, and the Kissinger equation could thus be used to determine the activation energy. In the present work, we obtained the activation energy for dehydrogenation by applying data from a volumetric method to the Kissinger equation. The quantity of hydrogen released from hydrogenated Mg-5Ni samples and the temperature of the reactor were measured as a function of time at different heating rates (Φ) in a Sieverts-type volumetric apparatus. The values of dHd/dt, the dehydrogenation rate, were calculated as time elapsed and the temperature (Tm) with the highest dHd/dt was obtained. The values of dHd/dT, the rate of increase in released hydrogen quantity (Hd) to temperature (T) increase, were calculated according to time, and the temperature (Tm) with the highest dHd/dT was also obtained. In addition, the values of dT/dt, the rate of increase in temperature to time (t) increase, were calculated according to time, and the temperature (Tm) with the highest dHd/dt was obtained. Φ and Tm were then applied to the Kissinger equation to determine the activation energy for dehydrogenation of Mg-5Ni samples. Full article
(This article belongs to the Special Issue NANO KOREA 2022)
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10 pages, 2096 KiB  
Article
A Monolithic 3-Dimensional Static Random Access Memory Containing a Feedback Field Effect Transistor
by Jong Hyeok Oh and Yun Seop Yu
Micromachines 2022, 13(10), 1625; https://doi.org/10.3390/mi13101625 - 28 Sep 2022
Cited by 2 | Viewed by 1399
Abstract
A monolithic three-dimensional integrated static random access memory containing a feedback field effect transistor (M3D-FBFET-SRAM) was proposed. The M3D-FBFET-SRAM cell consists of one metal oxide semiconductor field effect transistor (MOSFET) and one FBFET, and each transistor is located on the top tier and [...] Read more.
A monolithic three-dimensional integrated static random access memory containing a feedback field effect transistor (M3D-FBFET-SRAM) was proposed. The M3D-FBFET-SRAM cell consists of one metal oxide semiconductor field effect transistor (MOSFET) and one FBFET, and each transistor is located on the top tier and one on the bottom tier in a monolithic 3D integration, respectively. The electrical characteristics and operation of the NFBFET in the M3D-FBFET-SRAM cell were investigated using a TCAD simulator. For SRAM operation, the optimum doping profile of the NFBFET was used for non-turn-off characteristics. For the M3D-FBFET-SRAM cell, the operation of the SRAM and electrical coupling occurring between the top and bottom tier transistor were investigated. As the thickness of interlayer dielectric decreases, the reading ‘ON’ current decreases. To prevent performance degradation, two ways to compensate for current level were suggested. Full article
(This article belongs to the Special Issue NANO KOREA 2022)
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12 pages, 3687 KiB  
Article
Low-Voltage-Driven SnO2-Based H2S Microsensor with Optimized Micro-Heater for Portable Gas Sensor Applications
by Dong Geon Jung, Junyeop Lee, Jin Beom Kwon, Bohee Maeng, Hee Kyung An and Daewoong Jung
Micromachines 2022, 13(10), 1609; https://doi.org/10.3390/mi13101609 - 27 Sep 2022
Cited by 4 | Viewed by 1550
Abstract
To realize portable gas sensor applications, it is necessary to develop hydrogen sulfide (H2S) microsensors capable of operating at lower voltages with high response, good selectivity and stability, and fast response and recovery times. A gas sensor with a high operating [...] Read more.
To realize portable gas sensor applications, it is necessary to develop hydrogen sulfide (H2S) microsensors capable of operating at lower voltages with high response, good selectivity and stability, and fast response and recovery times. A gas sensor with a high operating voltage (>5 V) is not suitable for portable applications because it demands additional circuitry, such as a charge pump circuit (supply voltage of common circuits is approximately 1.8–5 V). Among H2S microsensor components, that is, the substrate, sensing area, electrode, and micro-heater, the proper design of the micro-heater is particularly important, owing to the role of thermal energy in ensuring the efficient detection of H2S. This study proposes and develops tin (IV)-oxide (SnO2)-based H2S microsensors with different geometrically designed embedded micro-heaters. The proposed micro-heaters affect the operating temperature of the H2S sensors, and the micro-heater with a rectangular mesh pattern exhibits superior heating performance at a relatively low operating voltage (3–4 V) compared to those with line (5–7 V) and rectangular patterns (3–5 V). Moreover, utilizing a micro-heater with a rectangular mesh pattern, the fabricated SnO2-based H2S microsensor was driven at a low operating voltage and offered good detection capability at a low H2S concentration (0–10 ppm), with a quick response (<51 s) and recovery time (<101 s). Full article
(This article belongs to the Special Issue NANO KOREA 2022)
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12 pages, 4107 KiB  
Article
An Investigation of the Effect of the Work-Function Variation of a Monolithic 3D Inverter Stacked with MOSFETs
by Geun Jae Lee and Yun Seop Yu
Micromachines 2022, 13(9), 1524; https://doi.org/10.3390/mi13091524 - 14 Sep 2022
Viewed by 1338
Abstract
The effect of the work-function variation (WFV) of metal-oxide-semiconductor field-effect transistor (MOSFET) gates on a monolithic 3D inverter (M3DINV) structure is investigated in the current paper. The M3DINV has a structure in which MOSFETs are sequentially stacked. The WFV effect of the top- [...] Read more.
The effect of the work-function variation (WFV) of metal-oxide-semiconductor field-effect transistor (MOSFET) gates on a monolithic 3D inverter (M3DINV) structure is investigated in the current paper. The M3DINV has a structure in which MOSFETs are sequentially stacked. The WFV effect of the top- and bottom-tier gates on the M3DINV is investigated using technology computer-aided design (TCAD) and a Monte-Carlo sampling simulation of TCAD. When the interlayer dielectric thickness (TILD) changes from 5 to 100 nm, electrical parameters, such as the threshold voltage, subthreshold swing, on-current, and off-current of the top-tier N-MOSFET and the parameter changes by the change in gate voltage of the bottom-tier P-MOSFET, are investigated. As TILD decreases below about 30 nm, the means and standard deviations of the electrical parameters rapidly increase. This means that the coupling and its distribution are relatively large in the regime and thus should be well considered for M3D circuit simulation. In addition, due to the increase in standard deviation, the WFV effect of both the top- and bottom-tier MOSFET gates was observed to be greater than those of only the top-tier MOSFET gates and only the bottom-tier MOSFET gates. Full article
(This article belongs to the Special Issue NANO KOREA 2022)
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12 pages, 5288 KiB  
Article
Development of Functional Ophthalmic Materials Using Natural Materials and Gold Nanoparticles
by Su-Mi Shin, Hye-In Park and A-Young Sung
Micromachines 2022, 13(9), 1451; https://doi.org/10.3390/mi13091451 - 01 Sep 2022
Cited by 3 | Viewed by 1211
Abstract
Ginsenoside, known as a natural substance, is a saponin component in ginseng and has various effects, such as antibacterial, antioxidant, and anti-inflammatory effects. In addition, gold nanoparticles can realize various optical and physical properties according to particle size and shape. For polymer polymerization, [...] Read more.
Ginsenoside, known as a natural substance, is a saponin component in ginseng and has various effects, such as antibacterial, antioxidant, and anti-inflammatory effects. In addition, gold nanoparticles can realize various optical and physical properties according to particle size and shape. For polymer polymerization, ginsenoside and gold nanoparticles were used as additives and copolymerized with a basic silicone hydrogel material. As gold nanoparticles, spherical and rod-shaped particles were used, and basic physical properties, such as water content, refractive index, and wettability of the prepared ophthalmic lenses, were measured. As a result of measuring the physical properties of the resulting polymer, it was found that the contact angle decreased by about 1.6% to 83.1% as the addition ratio of ginsenoside increased. In addition, as the addition ratio of metal nanoparticles increased, the refractive index was found to increase regardless of the shape of the nanoparticles. In addition, in the case of water content, the spherical shape gradually decreased according to the addition ratio, while the rod shape gradually increased according to the addition ratio. Therefore, it was found that the addition of ginsenoside, known as a saponin-based natural substance, has excellent wettability, and gold nanoparticles with different shapes have different properties. Thus, it is judged that the resulting copolymer can be utilized as a variety of highly functional ophthalmic polymer materials with high refractive index and high wettability. Full article
(This article belongs to the Special Issue NANO KOREA 2022)
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