16 pages, 3157 KB  
Article
Study on the Critical Wind Speed of a Resonant Cavity Piezoelectric Energy Harvester Driven by Driving Wind Pressure
by Xia Li, Zhiyuan Li, Qiang Liu and Xiaobiao Shan
Micromachines 2019, 10(12), 842; https://doi.org/10.3390/mi10120842 - 1 Dec 2019
Cited by 7 | Viewed by 3298
Abstract
In order to solve the problem of continuous and stable power supply for vehicle sensors, a resonant cavity piezoelectric energy harvester driven by driving wind pressure was designed. The harvester has an effective working range of wind speed. According to the energy conservation [...] Read more.
In order to solve the problem of continuous and stable power supply for vehicle sensors, a resonant cavity piezoelectric energy harvester driven by driving wind pressure was designed. The harvester has an effective working range of wind speed. According to the energy conservation law, the cut-in (initial) wind speed of the harvester was solved. The pressure distribution law of the elastic beam in the flow field was studied by the Fluent software package, and the results were loaded into a finite element model with a method of partition loading. The relationship between the wind speed and the maximum principal stress of the piezoelectric cantilever beam was analyzed, and the critical stress method was used to study the cut-out wind speed of the energy harvester. The results show that the cut-in wind speed of the piezoelectric energy harvester is 5.29 m/s, and the cut-out wind speed is 24 m/s. Finally, an experiment on the power generation performance of the energy harvester was carried out. The experimental results show that the cut-in and cut-out wind speeds of the piezoelectric energy harvester are 5 m/s and 24 m/s, respectively, and the best matching load is 60 kΩ. The average output power, generated by the harvester when the driving wind speed is 22 m/s, is 0.145 mW, and the corresponding power density is 1.2 mW/cm3. Full article
(This article belongs to the Special Issue Piezoelectric Transducers: Materials, Devices and Applications)
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15 pages, 4295 KB  
Article
A Potential Application of Triangular Microwells to Entrap Single Cancer Cells: A Canine Cutaneous Mast Cell Tumor Model
by Dettachai Ketpun, Alongkorn Pimpin, Tewan Tongmanee, Sudchaya Bhanpattanakul, Prapruddee Piyaviriyakul, Weerayut Srituravanich, Witsaroot Sripumkhai, Wutthinan Jeamsaksiri and Achariya Sailasuta
Micromachines 2019, 10(12), 841; https://doi.org/10.3390/mi10120841 - 1 Dec 2019
Cited by 5 | Viewed by 3522
Abstract
Cellular heterogeneity is a major hindrance, leading to the misunderstanding of dynamic cell biology. However, single cell analysis (SCA) has been used as a practical means to overcome this drawback. Many contemporary methodologies are available for single cell analysis; among these, microfluidics is [...] Read more.
Cellular heterogeneity is a major hindrance, leading to the misunderstanding of dynamic cell biology. However, single cell analysis (SCA) has been used as a practical means to overcome this drawback. Many contemporary methodologies are available for single cell analysis; among these, microfluidics is the most attractive and effective technology, due to its advantages of low-volume specimen consumption, label-free evaluation, and real-time monitoring, among others. In this paper, a conceptual application for microfluidic single cell analysis for veterinary research is presented. A microfluidic device is fabricated with an elastomer substrate, polydimethylsiloxane (PDMS), under standard soft lithography. The performance of the microdevice is high-throughput, sensitive, and user-friendly. A total of 53.1% of the triangular microwells were able to trap single canine cutaneous mast cell tumor (MCT) cells. Of these, 38.82% were single cell entrapments, while 14.34% were multiple cell entrapments. The ratio of single-to-multiple cell trapping was high, at 2.7:1. In addition, 80.5% of the trapped cells were viable, indicating that the system was non-lethal. OCT4A-immunofluorescence combined with the proposed system can assess OCT4A expression in trapped single cells more precisely than OCT4A-immunohistochemistry. Therefore, the results suggest that microfluidic single cell analysis could potentially reduce the impact of cellular heterogeneity. Full article
(This article belongs to the Special Issue Microfluidic for High-Throughput Screening)
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13 pages, 3436 KB  
Article
On-Chip Construction of Multilayered Hydrogel Microtubes for Engineered Vascular-Like Microstructures
by Tao Yue, Na Liu, Yuanyuan Liu, Yan Peng, Shaorong Xie, Jun Luo, Qiang Huang, Masaru Takeuchi and Toshio Fukuda
Micromachines 2019, 10(12), 840; https://doi.org/10.3390/mi10120840 - 1 Dec 2019
Cited by 15 | Viewed by 4700
Abstract
Multilayered and multicellular structures are indispensable for constructing functional artificial tissues. Engineered vascular-like microstructures with multiple layers are promising structures to be functionalized as artificial blood vessels. In this paper, we present an efficient method to construct multilayer microtubes embedding different microstructures based [...] Read more.
Multilayered and multicellular structures are indispensable for constructing functional artificial tissues. Engineered vascular-like microstructures with multiple layers are promising structures to be functionalized as artificial blood vessels. In this paper, we present an efficient method to construct multilayer microtubes embedding different microstructures based on direct fabrication and assembly inside a microfluidic device. This four-layer microfluidic device has two separate inlets for fabricating various microstructures. We have achieved alternating-layered microtubes by controlling the fabrication, flow, and assembly time of each microstructure, and as well, double-layered microtubes have been built by a two-step assembly method. Modifications of both the inner and outer layers was successfully demonstrated, and the flow conditions during the on-chip assembly were evaluated and optimized. Each microtube was successfully constructed within several minutes, showing the potential applications of the presented method for building engineered vascular-like microstructures with high efficiency. Full article
(This article belongs to the Special Issue Microfluidics for Soft Matter and Mechanobiology, Volume I)
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11 pages, 3423 KB  
Article
Flattening of Diluted Species Profile via Passive Geometry in a Microfluidic Device
by Michael Miles, Biddut Bhattacharjee, Nakul Sridhar, Apresio Kefin Fajrial, Kerri Ball, Yung Cheng Lee, Michael H. B. Stowell, William M. Old and Xiaoyun Ding
Micromachines 2019, 10(12), 839; https://doi.org/10.3390/mi10120839 - 30 Nov 2019
Cited by 2 | Viewed by 3364
Abstract
In recent years, microfluidic devices have become an important tool for use in lab-on-a-chip processes, including drug screening and delivery, bio-chemical reactions, sample preparation and analysis, chemotaxis, and separations. In many such processes, a flat cross-sectional concentration profile with uniform flow velocity across [...] Read more.
In recent years, microfluidic devices have become an important tool for use in lab-on-a-chip processes, including drug screening and delivery, bio-chemical reactions, sample preparation and analysis, chemotaxis, and separations. In many such processes, a flat cross-sectional concentration profile with uniform flow velocity across the channel is desired to achieve controlled and precise solute transport. This is often accommodated by the use of electroosmotic flow, however, it is not an ideal for many applications, particularly biomicrofluidics. Meanwhile, pressure-driven systems generally exhibit a parabolic cross-sectional concentration profile through a channel. We draw inspiration from finite element fluid dynamics simulations to design and fabricate a practical solution to achieving a flat solute concentration profile in a two-dimensional (2D) microfluidic channel. The channel possesses geometric features to passively flatten the solute profile before entering the defined region of interest in the microfluidic channel. An obviously flat solute profile across the channel is demonstrated in both simulation and experiment. This technology readily lends itself to many microfluidic applications which require controlled solute transport in pressure driven systems. Full article
(This article belongs to the Section C:Chemistry)
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12 pages, 6691 KB  
Article
Poly(methyl methacrylate) Coating of Titanium Workpieces to Reduce Burrs in Micro-drilling
by Luca Giorleo
Micromachines 2019, 10(12), 838; https://doi.org/10.3390/mi10120838 - 30 Nov 2019
Viewed by 3591
Abstract
A technique to reduce burr height in titanium micro-drilling is presented: a poly (methyl methacrylate) coating was applied before machining on the upper and lower surfaces of a titanium specimen (0.5-mm thick). After drilling, a cleaning process (acetone bath) was executed to eliminate [...] Read more.
A technique to reduce burr height in titanium micro-drilling is presented: a poly (methyl methacrylate) coating was applied before machining on the upper and lower surfaces of a titanium specimen (0.5-mm thick). After drilling, a cleaning process (acetone bath) was executed to eliminate the coating, and holes with less burr were obtained. The coating process was executed with a spin-coating machine. To test the efficacy of the technique, two different coating thicknesses (7.9 and 5.4 μm) and two drill bits (0.25- and 0.5-mm diameter) were evaluated. Qualitative and quantitative analyses of the holes obtained were performed with scanning electron microscopy and three-dimensional microscopy, respectively. The results highlight the efficacy of the technique to reduce the burr height by 70% in coated titanium relative to that in an uncoated titanium sheet. Full article
(This article belongs to the Section D:Materials and Processing)
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9 pages, 2869 KB  
Article
Microfluidic Time-Delay Valve Mechanism on Paper-Based Devices for Automated Competitive ELISA
by Yu-Ting Lai, Chia-Hsin Tsai, Ju-Chun Hsu and Yen-Wen Lu
Micromachines 2019, 10(12), 837; https://doi.org/10.3390/mi10120837 - 30 Nov 2019
Cited by 13 | Viewed by 5201
Abstract
Paper-based technologies have been drawing increasing attentions in the biosensor field due to their economical, ecofriendly, and easy-to-fabricate features. In this paper, we present a time-delay valve mechanism to automate a series of procedures for conducting competitive enzyme-linked immunosorbent assay (ELISA) on a [...] Read more.
Paper-based technologies have been drawing increasing attentions in the biosensor field due to their economical, ecofriendly, and easy-to-fabricate features. In this paper, we present a time-delay valve mechanism to automate a series of procedures for conducting competitive enzyme-linked immunosorbent assay (ELISA) on a paper-based device. The mechanism employs a controllable time-delay valve, which has surfactants to dissolve the hydrophobic barriers, in a fluid pathway. The valves can regulate the liquid and sequentially deliver the sample flow for automating ELISA procedures in microchannels. Competitive ELISA is achieved in a single step once the sample, or small molecule pesticide (e.g., Imidacloprid), is applied onto the paper-based device with a comparable sensitivity to plate-based competitive ELISA. The results further demonstrate the appositeness of using paper-based devices with the valve designs for on-the-go ELISA detection in agriculture and biomedical applications. Full article
(This article belongs to the Special Issue Next Generation Paper-based Devices for Analytical Applications)
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14 pages, 3976 KB  
Article
Design Optimization for a Microfluidic Crossflow Filtration System Incorporating a Micromixer
by Seon Yeop Jung, Jo Eun Park, Tae Gon Kang and Kyung Hyun Ahn
Micromachines 2019, 10(12), 836; https://doi.org/10.3390/mi10120836 - 30 Nov 2019
Cited by 15 | Viewed by 4855
Abstract
In this study, we report on a numerical study on design optimization for a microfluidic crossflow filtration system incorporated with the staggered herringbone micromixer (SHM). Computational fluid dynamics (CFD) and the Taguchi method were employed to find out an optimal set of design [...] Read more.
In this study, we report on a numerical study on design optimization for a microfluidic crossflow filtration system incorporated with the staggered herringbone micromixer (SHM). Computational fluid dynamics (CFD) and the Taguchi method were employed to find out an optimal set of design parameters, mitigating fouling in the filtration system. The flow and the mass transfer characteristics in a reference SHM model and a plain rectangular microchannel were numerically investigated in detail. Downwelling flows in the SHM model lead to backtransport of foulants from the permeable wall, which slows down the development of the concentration boundary layer in the filtration system. Four design parameters — the number of grooves, the groove depth, the interspace between two neighboring grooves, and the interspace between half mixing periods — were chosen to construct a set of numerical experiments using an orthogonal array L 9 ( 3 4 ) from the Taguchi method. The Analysis of Variance (ANOVA) using the evaluated signal-to-noise (SN) ratios enabled us to identify the contribution of each design parameter on the performance. The proposed optimal SHM model indeed showed the lowest growth rate of the wall concentration compared to other SHM models. Full article
(This article belongs to the Special Issue Optimization of Microfluidic Devices)
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12 pages, 6137 KB  
Article
Silicon Carbide Microstrip Radiation Detectors
by Donatella Puglisi and Giuseppe Bertuccio
Micromachines 2019, 10(12), 835; https://doi.org/10.3390/mi10120835 - 30 Nov 2019
Cited by 54 | Viewed by 5244
Abstract
Compared with the most commonly used silicon and germanium, which need to work at cryogenic or low temperatures to decrease their noise levels, wide-bandgap compound semiconductors such as silicon carbide allow the operation of radiation detectors at room temperature, with high performance, and [...] Read more.
Compared with the most commonly used silicon and germanium, which need to work at cryogenic or low temperatures to decrease their noise levels, wide-bandgap compound semiconductors such as silicon carbide allow the operation of radiation detectors at room temperature, with high performance, and without the use of any bulky and expensive cooling equipment. In this work, we investigated the electrical and spectroscopic performance of an innovative position-sensitive semiconductor radiation detector in epitaxial 4H-SiC. The full depletion of the epitaxial layer (124 µm, 5.2 × 1013 cm−3) was reached by biasing the detector up to 600 V. For comparison, two different microstrip detectors were fully characterized from −20 °C to +107 °C. The obtained results show that our prototype detector is suitable for high resolution X-ray spectroscopy with imaging capability in a wide range of operating temperatures. Full article
(This article belongs to the Special Issue SiC based Miniaturized Devices)
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19 pages, 3230 KB  
Review
Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities
by Andreas Späth
Micromachines 2019, 10(12), 834; https://doi.org/10.3390/mi10120834 - 30 Nov 2019
Cited by 5 | Viewed by 5522
Abstract
Focused soft X-ray beam induced deposition (FXBID) is a novel technique for direct-write nanofabrication of metallic nanostructures from metal organic precursor gases. It combines the established concepts of focused electron beam induced processing (FEBIP) and X-ray lithography (XRL). The present setup is based [...] Read more.
Focused soft X-ray beam induced deposition (FXBID) is a novel technique for direct-write nanofabrication of metallic nanostructures from metal organic precursor gases. It combines the established concepts of focused electron beam induced processing (FEBIP) and X-ray lithography (XRL). The present setup is based on a scanning transmission X-ray microscope (STXM) equipped with a gas flow cell to provide metal organic precursor molecules towards the intended deposition zone. Fundamentals of X-ray microscopy instrumentation and X-ray radiation chemistry relevant for FXBID development are presented in a comprehensive form. Recently published proof-of-concept studies on initial experiments on FXBID nanolithography are reviewed for an overview on current progress and proposed advances of nanofabrication performance. Potential applications and advantages of FXBID are discussed with respect to competing electron/ion based techniques. Full article
(This article belongs to the Special Issue Multi-Dimensional Direct-Write Nanofabrication )
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13 pages, 2453 KB  
Article
Automated Pre-Analytic Processing of Whole Saliva Using Magnet-Beating for Point-of-Care Protein Biomarker Analysis
by Benita Johannsen, Lara Müller, Desirée Baumgartner, Lena Karkossa, Susanna M. Früh, Nagihan Bostanci, Michal Karpíšek, Roland Zengerle, Nils Paust and Konstantinos Mitsakakis
Micromachines 2019, 10(12), 833; https://doi.org/10.3390/mi10120833 - 30 Nov 2019
Cited by 20 | Viewed by 5652
Abstract
Saliva offers many advantages for point-of-care (PoC) diagnostic applications due to non-invasive, easy, and cost-effective methods of collection. However, the complex matrix with its non-Newtonian behavior and high viscosity poses handling challenges. Several tedious and long pre-analytic steps, incompatible with PoC use, are [...] Read more.
Saliva offers many advantages for point-of-care (PoC) diagnostic applications due to non-invasive, easy, and cost-effective methods of collection. However, the complex matrix with its non-Newtonian behavior and high viscosity poses handling challenges. Several tedious and long pre-analytic steps, incompatible with PoC use, are required to liquefy and homogenize saliva samples before protein analysis can be performed. We apply magnet-beating to reduce hands-on time and to simplify sample preparation. A magnet in a chamber containing the whole saliva is actuated inside a centrifugal microfluidic cartridge by the interplay of centrifugal and magnetic forces. Rigorous mixing, which homogenizes the saliva sample, is then initiated. Consequently, fewer manual steps are required to introduce the whole saliva into the cartridge. After 4 min of magnet-beating, the processed sample can be used for protein analysis. The viscosity of whole saliva has been reduced from 10.4 to 2.3 mPa s. Immunoassay results after magnet-beating for three salivary periodontal markers (MMP-8, MMP-9, TIMP-1) showed a linear correlation with a slope of 0.99 when compared to results of reference method treated samples. Conclusively, magnet-beating has been shown to be a suitable method for the pre-analytic processing of whole saliva for fully automated PoC protein analysis. Full article
(This article belongs to the Special Issue Microsystems for Point-of-Care Testing)
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13 pages, 2063 KB  
Article
Determination of the Membrane Transport Properties of Jurkat Cells with a Microfluidic Device
by Tianhang Yang, Ji Peng, Zhiquan Shu, Praveen K. Sekar, Songjing Li and Dayong Gao
Micromachines 2019, 10(12), 832; https://doi.org/10.3390/mi10120832 - 29 Nov 2019
Cited by 27 | Viewed by 4527
Abstract
The Jurkat cell is an immortalized line of human acute lymphocyte leukemia cells that is widely used in the study of adoptive cell therapy, a novel treatment of several advanced forms of cancer. The ability to transport water and solutes across the cell [...] Read more.
The Jurkat cell is an immortalized line of human acute lymphocyte leukemia cells that is widely used in the study of adoptive cell therapy, a novel treatment of several advanced forms of cancer. The ability to transport water and solutes across the cell membrane under different temperatures is an important factor for deciding the specific protocol for cryopreservation of the Jurkat cell. In this study we propose a comprehensive process for determination of membrane transport properties of Jurkat cell. using a novel microfluidic controlled single cell-trapping system. The osmotic behavior of an individual Jurkat cell to water and dimethyl sulfoxide (DMSO), a commonly used cryoprotective agent (CPA), under constant temperature, was recorded under a microscope utilizing the modified microfluidic system. The images of the Jurkat cell under osmotic change were processed to obtain a relationship between cell volume change and time. The experimental results were fitted using a two-parameter transport numeric model to calculate the Jurkat cell membrane permeability to water and DMSO at room temperature (22 °C). This model and the calculated parameters can help scientists optimize the cryopreservation protocol for any cell type with optimal cryoprotective agents and cooling rate for future experiments. Full article
(This article belongs to the Special Issue Microfluidics for Cells and Other Organisms, Volume II)
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21 pages, 12541 KB  
Article
Manufacturing of Al Alloy Microrods by Micro Cutting in a Micromachining Center
by M. Azizur Rahman, Mustafizur Rahman, Mozammel Mia, A.B.M.A. Asad and Ahmed Fardin
Micromachines 2019, 10(12), 831; https://doi.org/10.3390/mi10120831 - 29 Nov 2019
Cited by 9 | Viewed by 4466
Abstract
This paper presents the micromanufacturing of aluminum (Al) alloy microrods using micro turning as a competing process to other nontraditional micromachining methods. In that regard, the challenges in such manufacturing have been identified and overcome. The strategies of step-by-step cutting have also been [...] Read more.
This paper presents the micromanufacturing of aluminum (Al) alloy microrods using micro turning as a competing process to other nontraditional micromachining methods. In that regard, the challenges in such manufacturing have been identified and overcome. The strategies of step-by-step cutting have also been delineated. In addition, the influence of step size and step length on the cutting and thrust forces were investigated. The chip morphology for micromachining was examined using scanning electron microscopic imagery. The safe dimension of the microrod was calculated and, subsequently, used to fabricate microrod, conical tip rod, and grooved rod from 3 mm long and 1.5 mm diameter rod using an appropriately coded computer numerical control (CNC) micromachining center. Our results showed that the thrust force was responsible for part deflection, emphasizing the necessity for computing safe dimensions. At shallow step sizes, the thrust force was more dominant, causing plastic deformation associated with rubbing and burnishing. The chips produced were irregular and sliced in nature. Conversely, at high step sizes, the cutting force superseded the thrust force, resulting in chips that were spread more along the width as opposed to the depth. The chips also had a smoother interacting surface. Finally, micro turning was successfully implemented to manufacture milli-scale structures (i.e., 3 mm long) with micro features (150 to 230 μm diameter) on aluminum alloy materials. Full article
(This article belongs to the Section D:Materials and Processing)
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26 pages, 3383 KB  
Review
Flexible Microfluidics: Fundamentals, Recent Developments, and Applications
by Hedieh Fallahi, Jun Zhang, Hoang-Phuong Phan and Nam-Trung Nguyen
Micromachines 2019, 10(12), 830; https://doi.org/10.3390/mi10120830 - 29 Nov 2019
Cited by 180 | Viewed by 13941
Abstract
Miniaturization has been the driving force of scientific and technological advances over recent decades. Recently, flexibility has gained significant interest, particularly in miniaturization approaches for biomedical devices, wearable sensing technologies, and drug delivery. Flexible microfluidics is an emerging area that impacts upon a [...] Read more.
Miniaturization has been the driving force of scientific and technological advances over recent decades. Recently, flexibility has gained significant interest, particularly in miniaturization approaches for biomedical devices, wearable sensing technologies, and drug delivery. Flexible microfluidics is an emerging area that impacts upon a range of research areas including chemistry, electronics, biology, and medicine. Various materials with flexibility and stretchability have been used in flexible microfluidics. Flexible microchannels allow for strong fluid-structure interactions. Thus, they behave in a different way from rigid microchannels with fluid passing through them. This unique behaviour introduces new characteristics that can be deployed in microfluidic applications and functions such as valving, pumping, mixing, and separation. To date, a specialised review of flexible microfluidics that considers both the fundamentals and applications is missing in the literature. This review aims to provide a comprehensive summary including: (i) Materials used for fabrication of flexible microfluidics, (ii) basics and roles of flexibility on microfluidic functions, (iii) applications of flexible microfluidics in wearable electronics and biology, and (iv) future perspectives of flexible microfluidics. The review provides researchers and engineers with an extensive and updated understanding of the principles and applications of flexible microfluidics. Full article
(This article belongs to the Special Issue 10th Anniversary of Micromachines)
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12 pages, 3787 KB  
Article
Antimicrobial Activity of Silver Containing Crosslinked Poly(Acrylic Acid) Fibers
by Mohammad Mofidfar, Eun Seon Kim, Emily L. Larkin, Lisa Long, Wayne D. Jennings, Samad Ahadian, Mahmoud A. Ghannoum and Gary E. Wnek
Micromachines 2019, 10(12), 829; https://doi.org/10.3390/mi10120829 - 28 Nov 2019
Cited by 24 | Viewed by 5207
Abstract
Bacterial and fungal pathogens have caused serious problems to the human health. This is particularly true for untreatable infectious diseases and clinical situations where there is no reliable treatment for infected patients. To increase the antimicrobial activity of materials, we introduce silver nanoparticle [...] Read more.
Bacterial and fungal pathogens have caused serious problems to the human health. This is particularly true for untreatable infectious diseases and clinical situations where there is no reliable treatment for infected patients. To increase the antimicrobial activity of materials, we introduce silver nanoparticle (NP) patches in which the NPs are incorporated to the surface of smooth and uniform poly(acrylic acid) (PAA) nanofibers. The PAA nanofibers were thermally crosslinked with ethylene glycol via heat treatment through a mild method. The characterization of the resulting PAA-silver NP patches was done using scanning electron microscopy (SEM), UV spectroscopy, X-ray diffraction (XRD), and X-ray photoelectron spectroscopy (XPS). To demonstrate the antimicrobial activity of PAA, we incorporated the patches containing the silver NPs into strains of fungi such as Candida albicans (C. albican) and bacteria such as Methicillin-resistant Staphylococcus aureus (MRSA). The PAA-silver fibers achieved zones of inhibition against C. albicans and MRSA indicating their antimicrobial activity against both fungi and bacteria. We conclude that silver NP patches exhibited multiple inhibitory actions for the interruption and blockage of activity fungal and bacterial strains, which has the potential as an antimicrobial agent in infectious diseases. Moreover, the proposed material has the potential to be used in antimicrobial textile fabrics, food packaging films, and wound dressings. Full article
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11 pages, 5328 KB  
Technical Note
Atmospheric Pressure Plasma Processing of an Optical Sinusoidal Grid
by Duo Li, Na Li, Xing Su, Peng Ji and Bo Wang
Micromachines 2019, 10(12), 828; https://doi.org/10.3390/mi10120828 - 28 Nov 2019
Cited by 4 | Viewed by 2649
Abstract
Sinusoidal grid with nanometric precision is adopted as a surface encoder to measure multiple degree-of-freedom motions. This paper proposes the atmospheric pressure plasma processing (APPP) technique to fabricate an optical sinusoidal grid surface. The characteristics of removal function and surface generation mechanism are [...] Read more.
Sinusoidal grid with nanometric precision is adopted as a surface encoder to measure multiple degree-of-freedom motions. This paper proposes the atmospheric pressure plasma processing (APPP) technique to fabricate an optical sinusoidal grid surface. The characteristics of removal function and surface generation mechanism are firstly presented. Both simulation and experiment validate the effectiveness of APPP to fabricate a sinusoidal grid surface with nanometric precision. Post mechanical polishing experiments show that APPP features can be well maintained while the surface roughness is greatly reduced to meet the optical requirement. Full article
(This article belongs to the Special Issue Ultra Precision Technologies for Micromachining)
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