Special Issue "Micro Flow Controllers"

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A special issue of Micromachines (ISSN 2072-666X).

Deadline for manuscript submissions: closed (30 January 2012)

Special Issue Editor

Guest Editor
Dr. Joost Lötters
1 Transducers Science and Technology (TST), MESA+ Institute for Nanotechnology, University of Twente, PO Box 217, 7500 AE Enschede, The Netherlands
2 Bronkhorst High-Tech BV, Nijverheidsstraat 1A, 7261 AK Ruurlo, The Netherlands
Website: http://www.utwente.nl/ewi/tst/members/
E-Mail: j.c.lotters@ewi.utwente.nl
Interests: Design, modelling, fabrication and application of microfluidic handling systems, including MEMS thermal and Coriolis flow sensors and controllers, MEMS pressure sensors, MEMS control valves and micromachined flow analysis sytems such as multiparameter flow measurement systems and micro Wobbe index meters

Special Issue Information

Dear Colleagues,

Worldwide, accurate measurement and control of small and extremely small mass flow rates of both gases and liquids is becoming more and more important, driven by numerous economically important applications in for instance semiconductor industry, analytical instrumentation, energy, and micro reaction systems. Accordingly, we hereby announce a special issue addressing advances in design, modeling and simulation, fabrication, and characterization of micromachined mass flow sensors and controllers. Such devices have typically critical feature size on the order of ~1-500 μm and process or design control on a microscale. We invite submission of papers on devices for accurate measurement and control of (extremely) small mass flow rates of both gases and liquids, and corresponding measurement and control principles, for instance the thermal, ultrasonic and Coriolis principles for flow measurement, and the piezo-electric, electromagnetic and electrostatic principles for flow control. Related novel systems concepts, electronic instrumentation and application proposals are acceptable contributions. Moreover, innovative methods in calibration equipment and methodology, micro- and nanomachining, device characterization, etc., are of interest.

I am looking forward to receiving your valuable contributions!

Dr. Joost Lötters
Guest Editor

Keywords

  • flow sensors
  • mass flow sensors
  • flow controllers
  • mass flow controllers
  • thermal flow sensors
  • Coriolis flow sensors
  • ultrasonic flow sensors
  • actuators
  • valves
  • control valves
  • MEMS
  • micromachining
  • electromagnetic actuator
  • piezo-electric actuator
  • electrostatic actuator

Published Papers (14 papers)

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Displaying article 1-14
p. 550-573
by ,  and
Micromachines 2012, 3(3), 550-573; doi:10.3390/mi3030550
Received: 13 June 2012; in revised form: 3 July 2012 / Accepted: 16 July 2012 / Published: 23 July 2012
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(This article belongs to the Special Issue Micro Flow Controllers)
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p. 529-541
by , , , , ,  and
Micromachines 2012, 3(2), 529-541; doi:10.3390/mi3020529
Received: 26 April 2012; in revised form: 22 May 2012 / Accepted: 8 June 2012 / Published: 15 June 2012
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(This article belongs to the Special Issue Micro Flow Controllers)
p. 442-461
by ,  and
Micromachines 2012, 3(2), 442-461; doi:10.3390/mi3020442
Received: 24 March 2012; in revised form: 18 April 2012 / Accepted: 2 May 2012 / Published: 10 May 2012
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(This article belongs to the Special Issue Micro Flow Controllers)
p. 379-395
by  and
Micromachines 2012, 3(2), 379-395; doi:10.3390/mi3020379
Received: 20 March 2012; in revised form: 17 April 2012 / Accepted: 24 April 2012 / Published: 27 April 2012
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(This article belongs to the Special Issue Micro Flow Controllers)
p. 396-412
by , ,  and
Micromachines 2012, 3(2), 396-412; doi:10.3390/mi3020396
Received: 6 February 2012; in revised form: 6 April 2012 / Accepted: 24 April 2012 / Published: 27 April 2012
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(This article belongs to the Special Issue Micro Flow Controllers)
p. 325-330
by  and
Micromachines 2012, 3(2), 325-330; doi:10.3390/mi3020325
Received: 5 March 2012; in revised form: 5 April 2012 / Accepted: 18 April 2012 / Published: 26 April 2012
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(This article belongs to the Special Issue Micro Flow Controllers)
p. 364-378
by , ,  and
Micromachines 2012, 3(2), 364-378; doi:10.3390/mi3020364
Received: 3 March 2012; in revised form: 27 March 2012 / Accepted: 19 April 2012 / Published: 26 April 2012
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(This article belongs to the Special Issue Micro Flow Controllers)
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p. 295-314
by  and
Micromachines 2012, 3(2), 295-314; doi:10.3390/mi3020295
Received: 27 February 2012; in revised form: 27 March 2012 / Accepted: 5 April 2012 / Published: 10 April 2012
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(This article belongs to the Special Issue Micro Flow Controllers)
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p. 279-294
by  and
Micromachines 2012, 3(2), 279-294; doi:10.3390/mi3020279
Received: 11 February 2012; in revised form: 15 March 2012 / Accepted: 27 March 2012 / Published: 29 March 2012
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(This article belongs to the Special Issue Micro Flow Controllers)
p. 244-254
by , ,  and
Micromachines 2012, 3(2), 244-254; doi:10.3390/mi3020244
Received: 15 February 2012; in revised form: 15 March 2012 / Accepted: 23 March 2012 / Published: 27 March 2012
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(This article belongs to the Special Issue Micro Flow Controllers)
p. 225-243
by  and
Micromachines 2012, 3(2), 225-243; doi:10.3390/mi3020225
Received: 23 February 2012; in revised form: 6 March 2012 / Accepted: 21 March 2012 / Published: 26 March 2012
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(This article belongs to the Special Issue Micro Flow Controllers)
p. 194-203
by , , ,  and
Micromachines 2012, 3(1), 194-203; doi:10.3390/mi3010194
Received: 6 February 2012; in revised form: 23 February 2012 / Accepted: 13 March 2012 / Published: 15 March 2012
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(This article belongs to the Special Issue Micro Flow Controllers)
p. 150-167
by ,  and
Micromachines 2012, 3(1), 150-167; doi:10.3390/mi3010150
Received: 1 February 2012; in revised form: 2 March 2012 / Accepted: 12 March 2012 / Published: 14 March 2012
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(This article belongs to the Special Issue Micro Flow Controllers)
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p. 1-9
by ,  and
Micromachines 2012, 3(1), 1-9; doi:10.3390/mi3010001
Received: 7 November 2011; in revised form: 12 December 2011 / Accepted: 15 December 2011 / Published: 22 December 2011
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Last update: 27 February 2014

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