Micromachined Flow Sensors in Biomedical Applications
AbstractApplication fields of micromachined devices are growing very rapidly due to the continuous improvement of three dimensional technologies of micro-fabrication. In particular, applications of micromachined sensors to monitor gas and liquid flows hold immense potential because of their valuable characteristics (e.g., low energy consumption, relatively good accuracy, the ability to measure very small flow, and small size). Moreover, the feedback provided by integrating microflow sensors to micro mass flow controllers is essential to deliver accurately set target small flows. This paper is a review of some application areas in the biomedical field of micromachined flow sensors, such as blood flow, respiratory monitoring, and drug delivery among others. Particular attention is dedicated to the description of the measurement principles utilized in early and current research. Finally, some observations about characteristics and issues of these devices are also reported.
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Silvestri, S.; Schena, E. Micromachined Flow Sensors in Biomedical Applications. Micromachines 2012, 3, 225-243.
Silvestri S, Schena E. Micromachined Flow Sensors in Biomedical Applications. Micromachines. 2012; 3(2):225-243.Chicago/Turabian Style
Silvestri, Sergio; Schena, Emiliano. 2012. "Micromachined Flow Sensors in Biomedical Applications." Micromachines 3, no. 2: 225-243.