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Micromachines 2012, 3(1), 194-203; doi:10.3390/mi3010194
Article

Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades

1,2,* , 1
,
1
,
1,3
 and
1
1 MESA+ Institute for Nanotechnology, Department of TST, Faculty of EEMCS, University of Twente, P.O. Box 217, 7500 AE, Enschede, The Netherlands 2 Bronkhorst High-Tech BV, Nijverheidsstraat 1A, 7261 AK, Ruurlo, The Netherlands 3 Micronit BV, Colosseum 15, 7521 PV, Enschede, The Netherlands
* Author to whom correspondence should be addressed.
Received: 6 February 2012 / Revised: 23 February 2012 / Accepted: 13 March 2012 / Published: 15 March 2012
(This article belongs to the Special Issue Micro Flow Controllers)
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Abstract

We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than five decades, from 100 nL/h up to more than 10 mL/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.
Keywords: integrated microsystems; thermal flow sensors; Coriolis flow sensors; surface channel technology integrated microsystems; thermal flow sensors; Coriolis flow sensors; surface channel technology
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Lötters, J.C.; Lammerink, T.S.; Groenesteijn, J.; Haneveld, J.; Wiegerink, R.J. Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades. Micromachines 2012, 3, 194-203.

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