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Micromachines 2012, 3(1), 194-203; doi:10.3390/mi3010194
Article

Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades

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Received: 6 February 2012; in revised form: 23 February 2012 / Accepted: 13 March 2012 / Published: 15 March 2012
(This article belongs to the Special Issue Micro Flow Controllers)
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Abstract: We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than five decades, from 100 nL/h up to more than 10 mL/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.
Keywords: integrated microsystems; thermal flow sensors; Coriolis flow sensors; surface channel technology integrated microsystems; thermal flow sensors; Coriolis flow sensors; surface channel technology
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Lötters, J.C.; Lammerink, T.S.; Groenesteijn, J.; Haneveld, J.; Wiegerink, R.J. Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades. Micromachines 2012, 3, 194-203.

AMA Style

Lötters JC, Lammerink TS, Groenesteijn J, Haneveld J, Wiegerink RJ. Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades. Micromachines. 2012; 3(1):194-203.

Chicago/Turabian Style

Lötters, Joost C.; Lammerink, Theo S.J.; Groenesteijn, Jarno; Haneveld, Jeroen; Wiegerink, Remco J. 2012. "Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades." Micromachines 3, no. 1: 194-203.


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