Micromachines 2012, 3(1), 194-203; doi:10.3390/mi3010194
Article

Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades

Joost C. Lötters 1,2,* email, Theo S.J. Lammerink 1 email, Jarno Groenesteijn 1 email, Jeroen Haneveld 1,3 email and Remco J. Wiegerink 1 email
1 MESA+ Institute for Nanotechnology, Department of TST, Faculty of EEMCS, University of Twente, P.O. Box 217, 7500 AE, Enschede, The Netherlands 2 Bronkhorst High-Tech BV, Nijverheidsstraat 1A, 7261 AK, Ruurlo, The Netherlands 3 Micronit BV, Colosseum 15, 7521 PV, Enschede, The Netherlands
* Author to whom correspondence should be addressed.
Received: 6 February 2012; in revised form: 23 February 2012 / Accepted: 13 March 2012 / Published: 15 March 2012
(This article belongs to the Special Issue Micro Flow Controllers)
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Abstract: We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than five decades, from 100 nL/h up to more than 10 mL/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.
Keywords: integrated microsystems; thermal flow sensors; Coriolis flow sensors; surface channel technology

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Cite This Article

MDPI and ACS Style

Lötters, J.C.; Lammerink, T.S.; Groenesteijn, J.; Haneveld, J.; Wiegerink, R.J. Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades. Micromachines 2012, 3, 194-203.

AMA Style

Lötters JC, Lammerink TS, Groenesteijn J, Haneveld J, Wiegerink RJ. Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades. Micromachines. 2012; 3(1):194-203.

Chicago/Turabian Style

Lötters, Joost C.; Lammerink, Theo S.J.; Groenesteijn, Jarno; Haneveld, Jeroen; Wiegerink, Remco J. 2012. "Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades." Micromachines 3, no. 1: 194-203.

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