Next Article in Journal
Flexible Tactile Sensor Using Polyurethane Thin Film
Next Article in Special Issue
Time of Flight Sensor with a Flow Parallel Wire
Previous Article in Journal / Special Issue
A Digitally Controllable Polymer-Based Microfluidic Mixing Module Array
Article Menu

Export Article

Open AccessArticle
Micromachines 2012, 3(2), 295-314; doi:10.3390/mi3020295

Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

1
Dipartimento di Ingegneria dell’Informazione, University of Pisa, via G. Caruso 16, I-56122 Pisa, Italy
2
Istituto di Elettronica e di Ingegneria dell’Informazione e delle Telecomunicazioni, Pisa, CNR, via G. Caruso 16, I-56122 Pisa, Italy
*
Author to whom correspondence should be addressed.
Received: 27 February 2012 / Revised: 27 March 2012 / Accepted: 5 April 2012 / Published: 10 April 2012
(This article belongs to the Special Issue Micro Flow Controllers)
View Full-Text   |   Download PDF [636 KB, uploaded 10 April 2012]   |  

Abstract

Flow sensors are the key elements in most systems for monitoring and controlling fluid flows. With the introduction of MEMS thermal flow sensors, unprecedented performances, such as ultra wide measurement ranges, low power consumptions and extreme miniaturization, have been achieved, although several critical issues have still to be solved. In this work, a systematic approach to the design of integrated thermal flow sensors, with specification of resolution, dynamic range, power consumption and pressure insertion loss is proposed. All the critical components of the sensors, namely thermal microstructure, package and read-out interface are examined, showing their impact on the sensor performance and indicating effective optimization strategies. The proposed design procedures are supported by experiments performed using a recently developed test chip,including several different sensing structures and a flexible electronic interface. View Full-Text
Keywords: thermal flow sensors; device optimization; MEMS; multi heater; sensitivity; resolution thermal flow sensors; device optimization; MEMS; multi heater; sensitivity; resolution
Figures

This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Bruschi, P.; Piotto, M. Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss. Micromachines 2012, 3, 295-314.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top