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A Hybrid Thermopneumatic and Electrostatic Microvalve with Integrated Position Sensing
Micromachines 2012, 3(2), 396-412; doi:10.3390/mi3020396

Design Considerations for a Micromachined Proportional Control Valve

1,* , 2,3
Received: 6 February 2012 / Revised: 6 April 2012 / Accepted: 24 April 2012 / Published: 27 April 2012
(This article belongs to the Special Issue Micro Flow Controllers)
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Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. A survey is therefore made of the primary design considerations of a micromachined, proportional control valve. Performance requirements are identified based on various applications. Valve operating principles and actuation schemes presented in the literature are evaluated with respect to functionality and technological feasibility. Proceeding from these analyses, we identify the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.
Keywords: microvalve; flow control; low leakage; mass flow controller; micro actuator; MEMS microvalve; flow control; low leakage; mass flow controller; micro actuator; MEMS
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Groen, M.S.; Brouwer, D.M.; Wiegerink, R.J.; Lötters, J.C. Design Considerations for a Micromachined Proportional Control Valve. Micromachines 2012, 3, 396-412.

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