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Design Considerations for a Micromachined Proportional Control Valve
MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500AE Enschede, The Netherlands
Mechanical Automation and Mechatronics, University of Twente, P.O. Box 217, 7500AE Enschede, The Netherlands
DEMCON Advanced Mechatronics, Zutphenstraat 25, 7575EJ Oldenzaal, The Netherlands
Bronkhorst High-Tech B.V., Nijverheidsstraat 1A, 7261AK Ruurlo, The Netherlands
* Author to whom correspondence should be addressed.
Received: 6 February 2012; in revised form: 6 April 2012 / Accepted: 24 April 2012 / Published: 27 April 2012
Abstract: Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. A survey is therefore made of the primary design considerations of a micromachined, proportional control valve. Performance requirements are identified based on various applications. Valve operating principles and actuation schemes presented in the literature are evaluated with respect to functionality and technological feasibility. Proceeding from these analyses, we identify the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.
Keywords: microvalve; flow control; low leakage; mass flow controller; micro actuator; MEMS
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MDPI and ACS Style
Groen, M.S.; Brouwer, D.M.; Wiegerink, R.J.; Lötters, J.C. Design Considerations for a Micromachined Proportional Control Valve. Micromachines 2012, 3, 396-412.
Groen MS, Brouwer DM, Wiegerink RJ, Lötters JC. Design Considerations for a Micromachined Proportional Control Valve. Micromachines. 2012; 3(2):396-412.
Groen, Maarten S.; Brouwer, Dannis M.; Wiegerink, Remco J.; Lötters, Joost C. 2012. "Design Considerations for a Micromachined Proportional Control Valve." Micromachines 3, no. 2: 396-412.