Design Considerations for a Micromachined Proportional Control Valve
AbstractPrecise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. A survey is therefore made of the primary design considerations of a micromachined, proportional control valve. Performance requirements are identified based on various applications. Valve operating principles and actuation schemes presented in the literature are evaluated with respect to functionality and technological feasibility. Proceeding from these analyses, we identify the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.
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Groen, M.S.; Brouwer, D.M.; Wiegerink, R.J.; Lötters, J.C. Design Considerations for a Micromachined Proportional Control Valve. Micromachines 2012, 3, 396-412.
Groen MS, Brouwer DM, Wiegerink RJ, Lötters JC. Design Considerations for a Micromachined Proportional Control Valve. Micromachines. 2012; 3(2):396-412.Chicago/Turabian Style
Groen, Maarten S.; Brouwer, Dannis M.; Wiegerink, Remco J.; Lötters, Joost C. 2012. "Design Considerations for a Micromachined Proportional Control Valve." Micromachines 3, no. 2: 396-412.