In a flow-focusing microdroplet generator, by changing the flow rates of the two immiscible fluids, production speed can be increased from tens to thousands of droplets per second. However, because of the nonlinearity of the flow-focusing microdroplet generator, the production speed of droplets is difficult to quantitatively study for the typical flow-focusing geometry. In this paper, we demonstrate an efficient method that can precisely predict the droplet production speed for a wide range of fluid flow rates. While monodisperse droplets are formed in the flow-focusing microchannel, droplet spacing as a function of time was measured experimentally. We discovered that droplet spacing changes periodically with time during each process of droplet generation. By comparing the frequency of droplet spacing fluctuations with the droplet production speed, precise predictions of droplet production speed can be obtained for different flow conditions in the flow-focusing microdroplet generator. Full article

A nano-stepping motor can translate or rotate when its piezoelectric element pair is electrically driven in-phase or anti-phase. It offers millimeter-level stroke, sub-micron-level stepping size, and sub-nanometer-level scanning resolution. This article proposes a visual servo system to control the nano-stepping motor, since its stepping size is not consistent due to changing contact friction, using a custom built microscopic instrument and image recognition software. Three kinds of trajectories—straight lines, circles, and pentagrams—are performed successfully. The smallest straightness and roundness ever tested are 0.291 µm and 2.380 µm. Experimental results show that the proposed controller can effectively compensate for the error and precisely navigate the rotor along a desired trajectory. Full article

Micropatterning techniques have been widely used in biology, particularly in studies involving cell adhesion and proliferation on different substrates. Cell micropatterning approaches are also increasingly employed as in vitro tools to investigate intracellular mechanotransduction processes. In this report, we examined how modulating cellular shapes on two-dimensional rectangular fibronectin micropatterns of different widths influences nuclear mechanotransduction mediated by emerin, a nuclear envelope protein implicated in Emery–Dreifuss muscular dystrophy (EDMD). Fibronectin microcontact printing was tested onto glass coverslips functionalized with three different silane reagents (hexamethyldisilazane (HMDS), (3-Aminopropyl)triethoxysilane (APTES) and (3-Glycidyloxypropyl)trimethoxysilane (GPTMS)) using a vapor-phase deposition method. We observed that HMDS provides the most reliable printing surface for cell micropatterning, notably because it forms a hydrophobic organosilane monolayer that favors the retainment of surface antifouling agents on the coverslips. We showed that, under specific mechanical cues, emerin-null human skin fibroblasts display a significantly more deformed nucleus than skin fibroblasts expressing wild type emerin, indicating that emerin plays a crucial role in nuclear adaptability to mechanical stresses. We further showed that proper nuclear responses to forces involve a significant relocation of emerin from the inner nuclear envelope towards the outer nuclear envelope and the endoplasmic reticulum membrane network. Cell micropatterning by fibronectin microcontact printing directly on HMDS-treated glass represents a simple approach to apply steady-state biophysical cues to cells and study their specific mechanobiology responses in vitro. Full article

Constructing micro-sized machines always involves the problem of how to bring the energy (electric, magnetic, light, electro wetting, vibrational, etc.) source to the device to produce mechanical movements. The paper presents a rotational micro-sized motor (the diameter of the rotor is 350 µm) driven by low frequency (200–700 Hz) circular vibrations, made by two piezoelectric actuators, through the medium of a water droplet with diameter of 1 mm (volume 3.6 µL). The theoretical model presents how to produce the circular streaming (rotation) of the liquid around an infinitely long pillar with micro-sized diameter. The practical application has been focused to make a time-stable circular stream of the medium around the finite long vibrated pillar with diameter of 80 µm in the presence of disturbances produced by the vibrated plate where the pillar is placed. Only the time-stable circular stream in the water droplet around the pillar produces enough energy to rotate the micro-sized rotor. The rotational speed of the rotor is controlled in both directions from −20 rad/s to +26 rad/s. 3D printed mechanical amplifiers of vibrations, driven by piezoelectric actuators, amplify the amplitude of the piezoelectric actuator up to 20 µm in the frequency region of 200 to 700 Hz. Full article

There have been growing interests in droplet-based microfluidics due to its capability to outperform conventional biological assays by providing various advantages, such as precise handling of liquid/cell samples, fast reaction time, and extremely high-throughput analysis/screening. The droplet-based microfluidics utilizes the interaction between the interfacial tension and the fluidic shear force to break continuous fluids into uniform-sized segments within a microchannel. In this paper, the effect of different viscosities of carrier oil on water-in-oil emulsion, particularly how droplet size and droplet generation rate are affected, has been investigated using a commonly used T-junction microfluidic droplet generator design connected to a pressure-controlled pump. We have tested mineral oils with four different viscosities (5, 7, 10, and 15 cSt) to compare the droplet generation under five different flow pressure conditions (i.e., water flow pressure of 30–150 mbar and oil flow pressure of 40–200 mbar). The results showed that regardless of the flow pressure levels, the droplet size decreased as the oil viscosity increased. Average size of the droplets decreased by approximately 32% when the viscosity of the oil changed from 5 to 15 cSt at the flow pressure of 30 mbar for water and 40 mbar for oil. Interestingly, a similar trend was observed in the droplet generation rate. Droplet generation rate and the oil viscosity showed high linear correlation (R² = 0.9979) at the water flow pressure 30 mbar and oil flow pressure 40 mbar. Full article

This paper describes a compact microfluidic analytical device developed for the detection of low airborne formaldehyde concentrations. This microdevice was based on a three-step analysis, i.e., the passive gaseous formaldehyde uptake using a microporous membrane into an acetylacetone solution, the derivatization with acetylacetone to form 3,5-diacetyl-1,4-dihydrolutidine, and the quantification of the latter using fluorescence detection. For a rapid and easier implementation, a cylindrical geometry of the microporous element was considered to perform laboratory-controlled experiments with known formaldehyde concentrations and to establish the proof of concept. This work reports the evaluation of the uptake performance according to the microporous tube length, the liquid flow rate inside the tube, the gas flow rate outside the tube, and the gaseous formaldehyde concentration. A 10.0 cm microporous tube combined with a gas flow rate of 250 NmL/min (normal milliliters per minute) and a liquid flow rate of 17 µL/min were found to be the optimized conditions. In these experimental conditions, the fluorescence signal increased linearly with the gaseous formaldehyde concentration in the range 0–118 µg/m³, with the detection limit being estimated as 0.13 µg/m³ when considering a signal-to-noise ratio of 3. Full article

This paper reports an InAs/InAsSb strained-layer superlattice (SLS) mid-wavelength infrared detector and a focal plane array particularly suited for high-temperature operation. Utilizing the nBn architecture, the detector structure was grown by molecular beam epitaxy and consists of a 5.5 µm thick n-type SLS as the infrared-absorbing element. Through detailed characterization, it was found that the detector exhibits a cut-off wavelength of 5.5 um, a peak external quantum efficiency (without anti-reflection coating) of 56%, and a dark current of 3.4 × 10⁻⁴ A/cm², which is a factor of 9 times Rule 07, at 160 K temperature. It was also found that the quantum efficiency increases with temperature and reaches ~56% at 140 K, which is probably due to the diffusion length being shorter than the absorber thickness at temperatures below 140 K. A 320 × 256 focal plane array was also fabricated and tested, revealing noise equivalent temperature difference of ~10 mK at 80 K with f/2.3 optics and 3 ms integration time. The overall performance indicates that these SLS detectors have the potential to reach the performance comparable to InSb detectors at temperatures higher than 80 K, enabling high-temperature operation. Full article

Dye-sensitized solar cells (DSSCs) are fabricated with freestanding TiO₂ nanotube arrays (TNTAs) which are incorporated with Au nanoparticles (NPs) and carbon materials via electrodeposition and chemical vapor deposition (CVD) method to create a plasmonic effect and better electron transport that will enhance their energy conversion efficiency (ECE). The ECE of DSSCs based on the freestanding TNTAs is 5.87%. The ECE of DSSCs, based on the freestanding TNTAs with Au NPs or carbon materials, is 6.57% or 6.59%, respectively, and the final results of DSSCs according to the freestanding TNTAs with Au NPs and carbon materials is increased from 5.87% to 7.24%, which is an enhancement of 23.34% owing to plasmonic effect and better electron transport. Au NPs are incorporated into the channel of freestanding TNTAs and are characterized by CS-corrected-field emission transmission electron microscope (Cs-FE-TEM) and elemental mapping. Carbon materials are also well-incorporated in the channel of freestanding TNTAs and are analyzed by Raman spectroscopy. Full article

We report on a transient response model of thin cylindrical piezoelectric transducers used in the petroleum logging tools, parallel to a recently established transient response model of thin spherical-shell transducers. Established on a series of parallel-connected equivalent-circuits, this model provides insightful information on the physical characteristics of the thin cylindrical piezoelectric transducers, i.e., the transient response, center-frequency, and directivity of the transducer. We have developed a measurement system corresponding to the new model to provide a state-of-the-art comparison between theory and experiment. We found that the measured results were in good agreement with those of theoretical calculations. Full article

Two-dimensional acoustofluidic fields in an ultrasonic chamber actuated by segmented ring-shaped vibration sources with different excitation phases are simulated by COMSOL Multiphysics. Diverse acoustic streaming patterns, including aggregation and rotational modes, can be feasibly generated by the excitation of several sessile ultrasonic sources which only vibrate along radial direction. Numerical simulation of particle trajectory driven by acoustic radiation force and streaming-induced drag force also demonstrates that micro-scale particles suspended in the acoustofluidic chamber can be trapped in the velocity potential well of fluid flow or can rotate around the cavity center with the circumferential acoustic streaming field. Preliminary investigation of simple Russian doll- or Matryoshka-type configurations (double-layer vibration sources) provide a novel method of multifarious structure design in future researches on the combination of phononic crystals and acoustic streaming fields. The implementation of multiple segmented ring-shaped vibration sources offers flexibility for the control of acoustic streaming fields in microfluidic devices for various applications. We believe that this kind of acoustofluidic design is expected to be a promising tool for the investigation of rapid microfluidic mixing on a chip and contactless rotational manipulation of biosamples, such as cells or nematodes. Full article

Metallic structures can be used for the localized heating of fluid and the controlled generation of microfluidic currents. Carefully designed currents can move and trap small particles and cells. Here we demonstrate a new bi-metallic substrate that allows much more powerful micro-scale manipulation. We show that there are multiple regimes of opto-fluidic manipulation that can be controlled by an external laser power. While the lowest power does not affect even small objects, medium power can be used for efficiently capturing and trapping particles and cells. Finally, the high-power regime can be used for 3D levitation that, for the first time, has been demonstrated in this paper. Additionally, we demonstrate opto-fluidic manipulation for an extraordinarily dynamic range of masses extending eight orders of magnitude: from 80 fg nano-wires to 5.4 µg live worms. Full article

The stress state is a crucial parameter for the design of innovative microelectromechanical systems based on silicon carbide (SiC) material. Hence, mechanical properties of such structures highly depend on the fabrication process. Despite significant progresses in thin-film growth and fabrication process, monitoring the strain of the suspended SiC thin-films is still challenging. However, 3C-SiC membranes on silicon (Si) substrates have been demonstrated, but due to the low quality of the SiC/Si heteroepitaxy, high levels of residual strains were always observed. In order to achieve promising self-standing films with low residual stress, an alternative micromachining technique based on electrochemical etching of high quality homoepitaxy 4H-SiC layers was evaluated. This work is dedicated to the determination of their mechanical properties and more specifically, to the characterization of a 4H-SiC freestanding film with a circular shape. An inverse problem method was implemented, where experimental results obtained from bulge test are fitted with theoretical static load-deflection curves of the stressed membrane. To assess data validity, the dynamic behavior of the membrane was also investigated: Experimentally, by means of laser Doppler vibrometry (LDV) and theoretically, by means of finite element computations. The two methods provided very similar results since one obtained a Young’s modulus of 410 GPa and a residual stress value of 41 MPa from bulge test against 400 GPa and 30 MPa for the LDV analysis. The determined Young’s modulus is in good agreement with literature values. Moreover, residual stress values demonstrate that the fabrication of low-stressed SiC films is achievable thanks to the micromachining process developed. Full article

As one of the core devices for an electro-optic analog-to-digital converter (ADC), the Mach–Zehnder (MZ) modulator plays an important role, and the output stability of the MZ modulator has a decisive influence on the conversion accuracy of the ADC. This paper proposed a pilot tone-based method to stabilize the bias point of the modulator. This method could obtain the corresponding control voltage of the MZ modulator by adding a KHz-level dither tone to the bias end of the modulator and calculating the ratio of the first and second harmonic components. The experimental results showed that the output optical power of the modulator was stable at 3.2 dB when the bias point of the modulator was set at the orthogonal point. Moreover, the fluctuation range was not more than 0.15 dB, the first harmonic of the output signal was stable at 50.5 dB, and the fluctuation range was not more than 0.6 dB. The proposed bias controller based on the field programmable gate array (FPGA) and digital signal processing (DSP) can stabilize the modulator bias point at the orthogonal point and with a relatively high locking accuracy. Full article

In this contribution, we compare the performance of Focused Electron Beam-induced Deposition (FEBID) and Focused Ion Beam-induced Deposition (FIBID) at room temperature and under cryogenic conditions (the prefix “Cryo” is used here for cryogenic). Under cryogenic conditions, the precursor material condensates on the substrate, forming a layer that is several nm thick. Its subsequent exposure to a focused electron or ion beam and posterior heating to 50 °C reveals the deposit. Due to the extremely low charge dose required, Cryo-FEBID and Cryo-FIBID are found to excel in terms of growth rate, which is typically a few hundred/thousand times higher than room-temperature deposition. Cryo-FIBID using the W(CO)₆ precursor has demonstrated the growth of metallic deposits, with resistivity not far from the corresponding deposits grown at room temperature. This paves the way for its application in circuit edit and the fast and direct growth of micro/nano-electrical contacts with decreased ion damage. The last part of the contribution is dedicated to the comparison of these techniques with other charge-based lithography techniques in terms of the charge dose required and process complexity. The comparison indicates that Cryo-FIBID is very competitive and shows great potential for future lithography developments. Full article

The microvalve for accurate flow control under low fluidic pressure is vital in cost-effective and miniaturized microfluidic devices. This paper proposes a novel microfluidic passive valve comprising of a liquid chamber, an elastic membrane, and an ellipsoidal control chamber, which actualizes a high flow rate control under an ultra-low threshold pressure. A prototype of the microvalve was fabricated by 3D printing and UV laser-cutting technologies and was tested under static and time-dependent pressure conditions. The prototype microvalve showed a nearly constant flow rate of 4.03 mL/min, with a variation of ~4.22% under the inlet liquid pressures varied from 6 kPa to 12 kPa. In addition, the microvalve could stabilize the flow rate of liquid under the time-varying sinusoidal pressures or the square wave pressures. To validate the functionality of the microvalve, the prototype microvalve was applied in a gas-driven flow system which employed an air blower or human mouth blowing as the low-cost gas source. The microvalve was demonstrated to successfully regulate the steady flow delivery in the system under the low driving pressures produced by the above gas sources. We believe that this new microfluidic passive valve will be suitable for controlling fluid flow in portable microfluidic devices or systems of wider applications. Full article