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Micromachines
Special Issues
Recent Advances in MEMS Gyroscope
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Recent Advances in MEMS Gyroscope

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".

Deadline for manuscript submissions: closed (1 December 2020) | Viewed by 16184

Special Issue Editors

Dr. Gert I Andersson

E-Mail Website
Guest Editor
RISE Research Institutes of Sweden AB, Arvid Hedvalls Backe 4, SE-411 33 Göteborg, Sweden
Interests: MEMS inertial sensors including electronics, control algorithms, packaging and applications
Dr. Nils Hedenstierna

E-Mail Website
Guest Editor
Hedenstierna Innovation AB, Gothenburg, Sweden

Special Issue Information

Dear Colleagues,

MEMS gyroscopes have now been an industrial product for about 30 years. They are used in an ever-increasing number of applications: from high-end military applications to simple consumer products. An emerging application is automated driving that will require higher performance gyros than what is used in the automotive industry today, but to a much lower price than the high-end military applications. The basic function of a MEMS gyroscope has been known for decades but still the development and refinement continue around the world. The development goes both towards higher performance where MEMS gyros start to compete with FOG gyros but also towards low cost, low power and very large scale production. This special issue aims to include showcase research papers, short communications, and review articles that focus on recent development of MEMS gyros: New structures; Fabrication techniques; Modelling, Simulation; Bias-instability; Calibration techniques; Electronics, Reliability and Packaging.

Dr. Gert I Andersson
Dr. Nils Hedenstierna
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • New type of structures
  • New fabrication techniques
  • Modelling and simulation of MEMS gyros
  • techniques to improve bias–instability
  • improved and simplified calibration techniques
  • electronics: Charge-amplifiers, feedback, low-power electronics
  • improved immunity to vibrations and shocks
  • high reliability and safety-critical applications
  • packaging for high performance and/or low cost

Published Papers (4 papers)

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Research

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12 pages, 3768 KiB  
Article
Navigation Grade MEMS IMU for A Satellite
by Wanliang Zhao, Yuxiang Cheng, Sihan Zhao, Xiaomao Hu, Yijie Rong, Jie Duan and Jiawei Chen
Micromachines 2021, 12(2), 151; https://doi.org/10.3390/mi12020151 - 4 Feb 2021
Cited by 19 | Viewed by 3443
Abstract
This paper presents a navigation grade micro-electromechanical system (MEMS) inertial measurement unit (IMU) that was successfully applied for the first time in the Lobster-Eye X-ray Satellite in July 2020. A six-axis MEMS gyroscope redundant configuration is adopted in the unit to improve the [...] Read more.
This paper presents a navigation grade micro-electromechanical system (MEMS) inertial measurement unit (IMU) that was successfully applied for the first time in the Lobster-Eye X-ray Satellite in July 2020. A six-axis MEMS gyroscope redundant configuration is adopted in the unit to improve the performance through mutual calibration of a set of two-axis gyroscopes in the same direction. In the paper, a satisfactory precision of the gyroscope is achieved by customized and self-calibration gyroscopes whose parameters are adjusted at the expense of bandwidth and dynamics. According to the in-orbit measured data, the MEMS IMU provides an outstanding precision of better than 0.02 °/h (1σ) with excellent bias instability of 0.006 °/h and angle random walk (ARW) of around 0.003 °/h1/2. It is the highest precision MEMS IMU for commercial aerospace use ever publicly reported in the world to date. Full article
(This article belongs to the Special Issue Recent Advances in MEMS Gyroscope)
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14 pages, 2125 KiB  
Article
Adaptive Fuzzy Sliding Mode Control for a Micro Gyroscope with Backstepping Controller
by Juntao Fei, Yunmei Fang and Zhuli Yuan
Micromachines 2020, 11(11), 968; https://doi.org/10.3390/mi11110968 - 29 Oct 2020
Cited by 9 | Viewed by 1926
Abstract
This paper developed an adaptive backstepping fuzzy sliding control (ABFSC) approach for a micro gyroscope. Based on backstepping design, an adaptive fuzzy sliding mode control was proposed to adjust the fuzzy parameters with self-learning ability and reject the system nonlinearities. With the Lyapunov [...] Read more.
This paper developed an adaptive backstepping fuzzy sliding control (ABFSC) approach for a micro gyroscope. Based on backstepping design, an adaptive fuzzy sliding mode control was proposed to adjust the fuzzy parameters with self-learning ability and reject the system nonlinearities. With the Lyapunov function analysis of error function and sliding surface function, a comprehensive controller is derived to ensure the stability of the proposed control system. The proposed fuzzy control scheme does not need to know the system model in advance and could approximate the system nonlinearities well. The adaptive fuzzy control method has self-learning ability to adjust the fuzzy parameters. Simulation studies were implemented to prove the validity of the proposed ABFSMC strategy, showing that it can adapt to the changes of external disturbance and model parameters and has a satisfactory performance in tracking and approximation. Full article
(This article belongs to the Special Issue Recent Advances in MEMS Gyroscope)
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26 pages, 8241 KiB  
Article
Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope
by Syed Ali Raza Bukhari, Muhammad Mubasher Saleem, Umar Shahbaz Khan, Amir Hamza, Javaid Iqbal and Rana Iqtidar Shakoor
Micromachines 2020, 11(9), 862; https://doi.org/10.3390/mi11090862 - 17 Sep 2020
Cited by 14 | Viewed by 3887
Abstract
This paper presents microfabrication process-driven design of a multi-degree of freedom (multi-DoF) non-resonant electrostatic microelectromechanical systems (MEMS) gyroscope by considering the design constraints of commercially available low-cost and widely-used silicon-on-insulator multi-user MEMS processes (SOIMUMPs), with silicon as a structural material. The proposed design [...] Read more.
This paper presents microfabrication process-driven design of a multi-degree of freedom (multi-DoF) non-resonant electrostatic microelectromechanical systems (MEMS) gyroscope by considering the design constraints of commercially available low-cost and widely-used silicon-on-insulator multi-user MEMS processes (SOIMUMPs), with silicon as a structural material. The proposed design consists of a 3-DoF drive mode oscillator with the concept of addition of a collider mass which transmits energy from the drive mass to the passive sense mass. In the sense direction, 2-DoF sense mode oscillator is used to achieve dynamically-amplified displacement in the sense mass. A detailed analytical model for the dynamic response of MEMS gyroscope is presented and performance characteristics are validated through finite element method (FEM)-based simulations. The effect of operating air pressure and temperature variations on the air damping and resulting dynamic response is analyzed. The thermal stability of the design and corresponding effect on the mechanical and capacitive sensitivity, for an operating temperature range of −40 °C to 100 °C, is presented. The results showed that the proposed design is thermally stable, robust to environmental variations, and process tolerances with a wide operational bandwidth and high sensitivity. Moreover, a system-level model of the proposed gyroscope and its integration with the sensor electronics is presented to estimate the voltage sensitivity under the constraints of the readout electronic circuit. Full article
(This article belongs to the Special Issue Recent Advances in MEMS Gyroscope)
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Review

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36 pages, 3803 KiB  
Review
Random Error Reduction Algorithms for MEMS Inertial Sensor Accuracy Improvement—A Review
by Shipeng Han, Zhen Meng, Olatunji Omisore, Toluwanimi Akinyemi and Yuepeng Yan
Micromachines 2020, 11(11), 1021; https://doi.org/10.3390/mi11111021 - 21 Nov 2020
Cited by 43 | Viewed by 5847
Abstract
Research and industrial studies have indicated that small size, low cost, high precision, and ease of integration are vital features that characterize microelectromechanical systems (MEMS) inertial sensors for mass production and diverse applications. In recent times, sensors like MEMS accelerometers and MEMS gyroscopes [...] Read more.
Research and industrial studies have indicated that small size, low cost, high precision, and ease of integration are vital features that characterize microelectromechanical systems (MEMS) inertial sensors for mass production and diverse applications. In recent times, sensors like MEMS accelerometers and MEMS gyroscopes have been sought in an increased application range such as medical devices for health care to defense and military weapons. An important limitation of MEMS inertial sensors is repeatedly documented as the ease of being influenced by environmental noise from random sources, along with mechanical and electronic artifacts in the underlying systems, and other random noise. Thus, random error processing is essential for proper elimination of artifact signals and improvement of the accuracy and reliability from such sensors. In this paper, a systematic review is carried out by investigating different random error signal processing models that have been recently developed for MEMS inertial sensor precision improvement. For this purpose, an in-depth literature search was performed on several databases viz., Web of Science, IEEE Xplore, Science Direct, and Association for Computing Machinery Digital Library. Forty-nine representative papers that focused on the processing of signals from MEMS accelerometers, MEMS gyroscopes, and MEMS inertial measuring units, published in journal or conference formats, and indexed on the databases within the last 10 years, were downloaded and carefully reviewed. From this literature overview, 30 mainstream algorithms were extracted and categorized into seven groups, which were analyzed to present the contributions, strengths, and weaknesses of the literature. Additionally, a summary of the models developed in the studies was presented, along with their working principles viz., application domain, and the conclusions made in the studies. Finally, the development trend of MEMS inertial sensor technology and its application prospects were presented. Full article
(This article belongs to the Special Issue Recent Advances in MEMS Gyroscope)
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