MEMS Accelerometers: Modelling, Simulation, Design and Manufacturing
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".
Deadline for manuscript submissions: closed (15 February 2021) | Viewed by 2541
Special Issue Editors
Interests: MEMS; sensors; analog front end; analog-to-digital conversion; data fusion
Special Issues, Collections and Topics in MDPI journals
Interests: CMOS analog circuits; MEMS; sensor conditioning; signal processing
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
Accelerometers are a major application of MEMS technologies and represent a significant part of the MEMS market. Their performances have been widely improved in past decades, enabling them to move from consumer to tactical grade and then to penetrate more and more applications. However, significant efforts are still necessary to achieve a navigation grade, indispensable for very-high-end aeronautical applications. Moreover, to support the development of Internet of Things and autonomous systems, power consumption and cost of consumer products should be still reduced. To reach these goals, many different paths can be explored, such as new MEMS technologies, new sensing principles, improved signal conditioning, data fusion strategies, etc.
Therefore, this Special Issue focuses on modeling, simulation, design, and manufacturing of MEMS accelerometers. Original research and review papers are welcome. Topics include but are not limited to:
- Modeling and simulation of new sensing principle or improvement of existing principles;
- Accelerometer integration using new MEMS processes, new materials or standard microelectronics technologies;
- High-level modelling of MEMS accelerometers and co-simulation with electronics;
- Analog and digital signal conditioning;
- Array of accelerometers and data fusion algorithms;
- Test and calibration of MEMS accelerometers including integrated self-test, self-calibration and industrial test and calibration procedures.
Prof. Dr. Frederick Mailly
Prof. Dr. Pascal Nouet
Guest Editors
Manuscript Submission Information
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Keywords
- MEMS accelerometer
- inertial sensor
- IMU
- signal conditioning
- data fusion
- navigation
- MEMS technologies
