Integrated MEMS Sensors for the IoT Era

Dear Colleagues,

The implementation of the many ideas underlying the Internet of Things (IoT) concept requires, for the future breeds of smart objects (smart-phones, smart-homes, smart-cloths, smart-robots), the capability to gain awareness of the surrounding environment through the knowledge of an ever-growing set of chemical and physical parameters. In this scenario, the availability of sensors with the characteristics of small size, low-power consumption, and low-cost is becoming one of the main priorities. These requirements find their natural fulfilment in MEMS (Micro-Electro-Mechanical System) technologies, which allow integration of several sensors into a single chip (SoC) or a single package (SiP), along with complex electronic interfaces.

In spite of the undeniable success of a few notable examples of MEMS devices, such as inertial sensors, pressure sensors, and microphones, further research is required to keep the MEMS sensor market growing at the impressive pace of the last few years. Performances of well-established devices need to be improved to enable new applications, whereas sensors for quantities of major interest are still to be validated or even conceived.

This Special Issue aims to assemble an overview of the current state-of-the-art in the field of MEMS sensors, focusing on recent contributions representing a step forward in terms of key figures, such as resolution, repeatability, reliability, selectivity, power consumption and miniaturization. Welcome are also reserarch or review manuscripts that highlight the major challenges which researchers are going to face in the development of the future sensor generation. Topics include, but are not limited to:

-) Physical sensors based on MEMS technologies
-) MEMS microphones
-) Chemical sensors based on MEMS technologies
-) Sensor Systems on a Chip
-) Sensor Systems on a Package
-) Labs on Chip based on MEMS technologies
-) Non-silicon MEMS sensors
-) Functional packaging of MEMS sensors.

Prof. Dr. Paolo Bruschi
Dr. Massimo Piotto
Guest Editors

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