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Sensors 2017, 17(11), 2497; https://doi.org/10.3390/s17112497

Precise Measurement of Gas Volumes by Means of Low-Offset MEMS Flow Sensors with μL/min Resolution

1
IEIIT-PISA, CNR, Via G. Caruso 16, 56122 Pisa, Italy
2
Department of Ingegneria dell’Informazione, University of Pisa, 56122 Pisa, Italy
*
Author to whom correspondence should be addressed.
Received: 6 October 2017 / Revised: 26 October 2017 / Accepted: 27 October 2017 / Published: 31 October 2017
(This article belongs to the Special Issue Integrated MEMS Sensors for the IoT Era)
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Abstract

Experiments devoted to evaluate the performance of a MEMS thermal flow sensor in measuring gas volumes are described. The sensor is a single-chip platform, including several sensing structures and a low-offset, low-noise readout interface. A recently proposed offset compensation approach is implemented obtaining low temperature drift and excellent long time stability. The sensor is fabricated by applying a simple micromachining procedure to a chip produced using the BCD6s process of STMicroelectronics. Application of a gas conveyor allowed inclusion of the sensing structure into a channel of sub-millimeter cross-section. The results of measurements performed by making controlled air volumes pass through the sensor channel in both directions at rates from 0.1 to 5 mL/min are described. View Full-Text
Keywords: gas volume measurement; MEMS flow sensor; thermal flow sensor; system on a chip gas volume measurement; MEMS flow sensor; thermal flow sensor; system on a chip
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Piotto, M.; Del Cesta, S.; Bruschi, P. Precise Measurement of Gas Volumes by Means of Low-Offset MEMS Flow Sensors with μL/min Resolution. Sensors 2017, 17, 2497.

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