Precise Measurement of Gas Volumes by Means of Low-Offset MEMS Flow Sensors with μL/min Resolution
AbstractExperiments devoted to evaluate the performance of a MEMS thermal flow sensor in measuring gas volumes are described. The sensor is a single-chip platform, including several sensing structures and a low-offset, low-noise readout interface. A recently proposed offset compensation approach is implemented obtaining low temperature drift and excellent long time stability. The sensor is fabricated by applying a simple micromachining procedure to a chip produced using the BCD6s process of STMicroelectronics. Application of a gas conveyor allowed inclusion of the sensing structure into a channel of sub-millimeter cross-section. The results of measurements performed by making controlled air volumes pass through the sensor channel in both directions at rates from 0.1 to 5 mL/min are described. View Full-Text
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Piotto, M.; Del Cesta, S.; Bruschi, P. Precise Measurement of Gas Volumes by Means of Low-Offset MEMS Flow Sensors with μL/min Resolution. Sensors 2017, 17, 2497.
Piotto M, Del Cesta S, Bruschi P. Precise Measurement of Gas Volumes by Means of Low-Offset MEMS Flow Sensors with μL/min Resolution. Sensors. 2017; 17(11):2497.Chicago/Turabian Style
Piotto, Massimo; Del Cesta, Simone; Bruschi, Paolo. 2017. "Precise Measurement of Gas Volumes by Means of Low-Offset MEMS Flow Sensors with μL/min Resolution." Sensors 17, no. 11: 2497.
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