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Sensors 2017, 17(9), 2152; https://doi.org/10.3390/s17092152

Application of Surface Protective Coating to Enhance Environment-Withstanding Property of the MEMS 2D Wind Direction and Wind Speed Sensor

1
Smart Sensor Research Center, Korea Electronics Technology Institute, Seongnam 13509, Korea
2
Department of Material Science & Engineering, University of Seoul, Seoul 02504, Korea
*
Author to whom correspondence should be addressed.
Received: 13 July 2017 / Revised: 14 September 2017 / Accepted: 18 September 2017 / Published: 19 September 2017
(This article belongs to the Special Issue Integrated MEMS Sensors for the IoT Era)
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Abstract

In this study, a microelectromechanical system (MEMS) two-dimensional (2D) wind direction and wind speed sensor consisting of a square heating source and four thermopiles was manufactured using the heat detection method. The heating source and thermopiles of the manufactured sensor must be exposed to air to detect wind speed and wind direction. Therefore, there are concerns that the sensor could be contaminated by deposition or adhesion of dust, sandy dust, snow, rain, and so forth, in the air, and that the membrane may be damaged by physical shock. Hence, there was a need to protect the heating source, thermopiles, and the membrane from environmental and physical shock. The upper protective coating to protect both the heating source and thermopiles and the lower protective coating to protect the membrane were formed by using high-molecular substances such as SU-8, Teflon and polyimide (PI). The sensor characteristics with the applied protective coatings were evaluated. View Full-Text
Keywords: MEMS; wind sensor; protective coating MEMS; wind sensor; protective coating
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Shin, K.-S.; Lee, D.-S.; Song, S.-W.; Jung, J.P. Application of Surface Protective Coating to Enhance Environment-Withstanding Property of the MEMS 2D Wind Direction and Wind Speed Sensor. Sensors 2017, 17, 2152.

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