Special Issue "Laser-Based Nano Fabrication and Nano Lithography"

A special issue of Nanomaterials (ISSN 2079-4991).

Deadline for manuscript submissions: closed (31 May 2018)

Special Issue Editors

Guest Editor
Prof. Dr. Koji Sugioka

RIKEN Center for Advanced Photonics, Hirosawa 2-1, Wako, Saitama 351-0198, Japan
Website | E-Mail
Interests: Laser processing; Micro/nanofabrication; 3D fabrication; Biochip
Guest Editor
Prof. Ya Cheng

State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China; State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China
Website | E-Mail
Phone: +86-21-69918546
Fax: +86-21-69918021
Interests: ultrafast nonlinear optics and spectroscopy; nonlinear optics at nanometer scale; and super-resolution nanofabrication based on non-perturbative nonlinear optics processes

Special Issue Information

Dear Colleagues,

The improvement of fabrication resolutions is an eternal challenge for miniaturizing and enhancing the integration degrees of devices. Laser processing is one of the most widely-used techniques in manufacturing due to its high-flexibility, high-speed, and environment-friendliness. The fabrication resolution of laser processing is, however, limited by the diffraction limit. Recently, many efforts have been made to overcome the diffraction limit in nano fabrication. Specifically, combinations of multiphoton absorption by ultrafast lasers and the threshold effect associated with a Gaussian beam profile provide fabrication resolutions far beyond the diffraction limit. The use of the optical near-field achieves nano ablation with feature sizes below 100 nm. Multiple pulse irradiation from the ultrafast laser produces periodic nanostructures with a spatial period much smaller than the wavelength. Unlimited diffraction resolutions can also be achieved with shaped laser beams. In the meanwhile, lasers are also widely used for synthesis of nano materials including fullerenes and nano particles. In view of the rapid advancement of this field in recent years, this Special Issue aims at introducing the state-of-the-art in nano fabrication and nano lithography, based on laser technologies, by leading groups in the field.

  • Laser processing
  • Ultrafast laser
  • Nano material synthesis
  • Nano fabrication
  • Nano ablation
  • Nano lithography
  • Optical near field
  • Nano ripple formation
  • Shaped beam processing

Prof. Koji Sugioka
Prof. Ya Cheng
Guest Editors

Manuscript Submission Information

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Published Papers (1 paper)

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Research

Open AccessArticle Liquid-Assisted Femtosecond Laser Precision-Machining of Silica
Nanomaterials 2018, 8(5), 287; https://doi.org/10.3390/nano8050287
Received: 12 April 2018 / Revised: 21 April 2018 / Accepted: 23 April 2018 / Published: 28 April 2018
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Abstract
We report a systematical study on the liquid assisted femtosecond laser machining of quartz plate in water and under different etching solutions. The ablation features in liquid showed a better structuring quality and improved resolution with 1/3~1/2 smaller features as compared with those
[...] Read more.
We report a systematical study on the liquid assisted femtosecond laser machining of quartz plate in water and under different etching solutions. The ablation features in liquid showed a better structuring quality and improved resolution with 1/3~1/2 smaller features as compared with those made in air. It has been demonstrated that laser induced periodic structures are present to a lesser extent when laser processed in water solutions. The redistribution of oxygen revealed a strong surface modification, which is related to the etching selectivity of laser irradiated regions. Laser ablation in KOH and HF solution showed very different morphology, which relates to the evolution of laser induced plasma on the formation of micro/nano-features in liquid. This work extends laser precision fabrication of hard materials. The mechanism of strong absorption in the regions with permittivity (epsilon) near zero is discussed. Full article
(This article belongs to the Special Issue Laser-Based Nano Fabrication and Nano Lithography)
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