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Nanomaterials 2018, 8(5), 287; https://doi.org/10.3390/nano8050287

Liquid-Assisted Femtosecond Laser Precision-Machining of Silica

1
State Key Laboratory of Integrated Optoelectronics, School of Mechanical Science and Engineering, Nanling Campus, Jilin University, Changchun 130025, China
2
State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
3
Centre for Micro-Photonics, Faculty of Science, Engineering and Technology, Swinburne University of Technology, Hawthorn, VIC 3122, Australia
4
Melbourne Centre for Nanofabrication, ANFF, 151 Wellington Road, Clayton, VIC 3168, Australia
5
State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Haidian, Beijing 100084, China
*
Author to whom correspondence should be addressed.
Received: 12 April 2018 / Revised: 21 April 2018 / Accepted: 23 April 2018 / Published: 28 April 2018
(This article belongs to the Special Issue Laser-Based Nano Fabrication and Nano Lithography)
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Abstract

We report a systematical study on the liquid assisted femtosecond laser machining of quartz plate in water and under different etching solutions. The ablation features in liquid showed a better structuring quality and improved resolution with 1/3~1/2 smaller features as compared with those made in air. It has been demonstrated that laser induced periodic structures are present to a lesser extent when laser processed in water solutions. The redistribution of oxygen revealed a strong surface modification, which is related to the etching selectivity of laser irradiated regions. Laser ablation in KOH and HF solution showed very different morphology, which relates to the evolution of laser induced plasma on the formation of micro/nano-features in liquid. This work extends laser precision fabrication of hard materials. The mechanism of strong absorption in the regions with permittivity (epsilon) near zero is discussed. View Full-Text
Keywords: femtosecond laser; silica; Laser materials processing; nonlinear optics at surfaces femtosecond laser; silica; Laser materials processing; nonlinear optics at surfaces
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Cao, X.-W.; Chen, Q.-D.; Fan, H.; Zhang, L.; Juodkazis, S.; Sun, H.-B. Liquid-Assisted Femtosecond Laser Precision-Machining of Silica. Nanomaterials 2018, 8, 287.

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