Special Issue "Micromachined High Frequency Acoustic Wave Resonators and Filters"


A special issue of Micromachines (ISSN 2072-666X).

Deadline for manuscript submissions: closed (15 February 2012)

Special Issue Editor

Guest Editor
Dr. Harrie A.C. Tilmans
Imec, Leuven, Belgium
Website: http://www.imec.be
E-Mail: tilmans@imec.be
Interests: MEMS, actuators, acoustics, packaging, sensors, micromachining

Special Issue Information

Dear Colleagues,

Resonators find widespread use as frequency references, timing devices and as frequency selective devices in RF spectral processing, as well as for sensing purposes. Coupling of two or more resonators (either electrically or mechanically) is used to obtain filters with the desired characteristics. To meet the specifications for these applications, e.g., in terms of reference oscillator stability and phase noise, or, the filter insertion loss and out-of-band rejection, the resonators must have a high quality factor Q (of a few thousand, even exceeding ten thousand). Furthermore, “size matters” and electronics manufacturers are prompting the miniaturization of components. Silicon-based micromachining or MEMS technology is rapidly emerging as an enabling technology to bring about the much needed, cost-effective, small, low weight and high performance components, while offering multiple on-chip components and integrated signal processing. Although electromagnetic wave resonators (like LC resonators or cavity resonators) do exist, these cannot satisfy the size and Q requirements for a number of applications. Mechanical resonators or, more appropriately, acoustic wave (AW) resonators offer a very interesting alternative, and in some cases even present the only available solution, as for a given frequency the size is much smaller, while displaying Q-factors, that are one to two orders of magnitude better than the Q-factor of electromagnetic resonators.

Accordingly, we hereby announce a special issue addressing advances in design, fabrication, packaging, and, testing and characterization of micromachined high frequency acoustic wave resonators and filters, fashioned with silicon, dielectrics, piezoelectrics, carbon nanotube (CNT), metals and others. Example topics include RF bulk acoustic wave (RF-BAW) resonators and RF front-end filters, microelectromechanical (MEM) resonators (including quartz crystals), all-silicon CMOS-MEMS oscillator, drive and detection methods, frequency accuracy and trimming, resonator long term and temperature stability, Q-factor limitation, and, tunable resonators and filters. Related novel systems concepts and application proposals are acceptable contributions.

Dr. Harrie A. C. Tilmans
Guest Editor


  • microelectromechanical resonator/filter
  • acoustic wave resonator
  • BAW resonator/filter
  • FBAR
  • SAW resonator/filter
  • flexural beam resonator
  • MEM-based reference oscillator
  • RF bandpass filter
  • RF radio front-end
  • vibration actuators
  • vibration sensors
  • acoustic resonators
  • vibrating ultrasound transducers

Published Papers (2 papers)

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Displaying article 1-2
p. 509-528
by ,  and
Micromachines 2012, 3(2), 509-528; doi:10.3390/mi3020509
Received: 13 April 2012; in revised form: 5 May 2012 / Accepted: 31 May 2012 / Published: 6 June 2012
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(This article belongs to the Special Issue Micromachined High Frequency Acoustic Wave Resonators and Filters)
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p. 413-426
by ,  and
Micromachines 2012, 3(2), 413-426; doi:10.3390/mi3020413
Received: 29 March 2012; in revised form: 18 April 2012 / Accepted: 27 April 2012 / Published: 2 May 2012
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Last update: 27 February 2014

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