Special Issue "Micromachined High Frequency Acoustic Wave Resonators and Filters"
A special issue of Micromachines (ISSN 2072-666X).
Deadline for manuscript submissions: closed (15 February 2012)
Resonators find widespread use as frequency references, timing devices and as frequency selective devices in RF spectral processing, as well as for sensing purposes. Coupling of two or more resonators (either electrically or mechanically) is used to obtain filters with the desired characteristics. To meet the specifications for these applications, e.g., in terms of reference oscillator stability and phase noise, or, the filter insertion loss and out-of-band rejection, the resonators must have a high quality factor Q (of a few thousand, even exceeding ten thousand). Furthermore, “size matters” and electronics manufacturers are prompting the miniaturization of components. Silicon-based micromachining or MEMS technology is rapidly emerging as an enabling technology to bring about the much needed, cost-effective, small, low weight and high performance components, while offering multiple on-chip components and integrated signal processing. Although electromagnetic wave resonators (like LC resonators or cavity resonators) do exist, these cannot satisfy the size and Q requirements for a number of applications. Mechanical resonators or, more appropriately, acoustic wave (AW) resonators offer a very interesting alternative, and in some cases even present the only available solution, as for a given frequency the size is much smaller, while displaying Q-factors, that are one to two orders of magnitude better than the Q-factor of electromagnetic resonators.
Accordingly, we hereby announce a special issue addressing advances in design, fabrication, packaging, and, testing and characterization of micromachined high frequency acoustic wave resonators and filters, fashioned with silicon, dielectrics, piezoelectrics, carbon nanotube (CNT), metals and others. Example topics include RF bulk acoustic wave (RF-BAW) resonators and RF front-end filters, microelectromechanical (MEM) resonators (including quartz crystals), all-silicon CMOS-MEMS oscillator, drive and detection methods, frequency accuracy and trimming, resonator long term and temperature stability, Q-factor limitation, and, tunable resonators and filters. Related novel systems concepts and application proposals are acceptable contributions.
Dr. Harrie A. C. Tilmans
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. Papers will be published continuously (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are refereed through a peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed Open Access quarterly journal published by MDPI.
Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 500 CHF (Swiss Francs). English correction and/or formatting fees of 250 CHF (Swiss Francs) will be charged in certain cases for those articles accepted for publication that require extensive additional formatting and/or English corrections.
- microelectromechanical resonator/filter
- acoustic wave resonator
- BAW resonator/filter
- SAW resonator/filter
- flexural beam resonator
- MEM-based reference oscillator
- RF bandpass filter
- RF radio front-end
- vibration actuators
- vibration sensors
- acoustic resonators
- vibrating ultrasound transducers
Article: Temperature Frequency Characteristics of Hexamethyldisiloxane (HMDSO) Polymer Coated Rayleigh Surface Acoustic Wave (SAW) Resonators for Gas-Phase Sensor Applications
Micromachines 2012, 3(2), 413-426; doi:10.3390/mi3020413
Received: 29 March 2012; in revised form: 18 April 2012 / Accepted: 27 April 2012 / Published: 2 May 2012| Download PDF Full-text (575 KB) | Download XML Full-text
Micromachines 2012, 3(2), 509-528; doi:10.3390/mi3020509
Received: 13 April 2012; in revised form: 5 May 2012 / Accepted: 31 May 2012 / Published: 6 June 2012| Download PDF Full-text (3380 KB) | Download XML Full-text
The below list represents only planned manuscripts. Some of these manuscripts have not been received by the Editorial Office yet. Papers submitted to MDPI journals are subject to peer-review.
Type of Paper: Article
Tentative Title: Modeling Non-Equilibrium Cooling for Phase Noise Reduction in MEMS-Based Varactor-Tuned Oscillators
Author: Hector J. De Los Santos
Affiliation: NanoMEMS Research, LLC, P.O. Box 18614, Irvine, CA 92623 USA; E-Mail: firstname.lastname@example.org
Abstract: Tentative Abstract: MEMS-based tunable capacitors (varactors) are gaining much attention for application in voltage-controlled integrated circuit oscillators. While these varactors exhibit superior linearity, as compared to semiconductor diode varactors, the Brownian motion inherent in MEMS/NEMS varactors may contribute to increase oscillator phase noise, thus degrading their performance. To overcome Brownian motion-induce phase noise, the concept of non-equilibrium cooling, in which a properly phased RF pump is used to reduced the Brownian motion vibration component of the MEMS/NEMS motion amplitude of the varactor, has been proposed. In this paper, the concept of non-equilibrium cooling is described in detail, and an Advanced Design System (ADS) model developed for application in MEMS/NEMS-based VCO design is, for the first time, presented.
Last update: 6 December 2011