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Micromachines 2012, 3(2), 413-426; doi:10.3390/mi3020413
Article

Temperature Frequency Characteristics of Hexamethyldisiloxane (HMDSO) Polymer Coated Rayleigh Surface Acoustic Wave (SAW) Resonators for Gas-Phase Sensor Applications

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Received: 29 March 2012 / Revised: 18 April 2012 / Accepted: 27 April 2012 / Published: 2 May 2012
(This article belongs to the Special Issue Micromachined High Frequency Acoustic Wave Resonators and Filters)
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Abstract

Temperature induced frequency shifts may compromise the sensor response of polymer coated acoustic wave gas-phase sensors operating in environments of variable temperature. To correct the sensor data with the temperature response of the sensor the latter must be known. This study presents and discusses temperature frequency characteristics (TFCs) of solid hexamethyldisiloxane (HMDSO) polymer coated sensor resonators using the Rayleigh surface acoustic wave (RSAW) mode on ST-cut quartz. Using a RF-plasma polymerization process, RSAW sensor resonators optimized for maximum gas sensitivity have been coated with chemosensitive HMDSO films at 4 different thicknesses: 50, 100, 150 and 250 nm. Their TFCs have been measured over a (−100 to +110) °C temperature range and compared to the TFC of an uncoated device. An exponential 2,500 ppm downshift of the resonant frequency and a 40 K downshift of the sensor’s turn-over temperature (TOT) are observed when the HMDSO thickness increases from 0 to 250 nm. A partial temperature compensation effect caused by the film is also observed. A third order polynomial fit provides excellent agreement with the experimental TFC curve. The frequency downshift due to mass loading by the film, the TOT and the temperature coefficients are unambiguously related to each other.
Keywords: surface acoustic wave (SAW) resonators; polymer coating; plasma polymerization; hexamethyldisiloxane (HMDSO); temperature frequency characteristics (TFC) surface acoustic wave (SAW) resonators; polymer coating; plasma polymerization; hexamethyldisiloxane (HMDSO); temperature frequency characteristics (TFC)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Esmeryan, K.D.; Avramov, I.D.; Radeva, E.I. Temperature Frequency Characteristics of Hexamethyldisiloxane (HMDSO) Polymer Coated Rayleigh Surface Acoustic Wave (SAW) Resonators for Gas-Phase Sensor Applications. Micromachines 2012, 3, 413-426.

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