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Micromachines 2012, 3(2), 509-528; doi:10.3390/mi3020509

High-Q MEMS Resonators for Laser Beam Scanning Displays

* ,
Fraunhofer Institute for Silicon Technology ISIT, Fraunhofer Strasse 1, Itzehoe D-25524, Germany
* Author to whom correspondence should be addressed.
Received: 13 April 2012 / Revised: 5 May 2012 / Accepted: 31 May 2012 / Published: 6 June 2012
(This article belongs to the Special Issue Micromachined High Frequency Acoustic Wave Resonators and Filters)


This paper reports on design, fabrication and characterization of high-Q MEMS resonators to be used in optical applications like laser displays and LIDAR range sensors. Stacked vertical comb drives for electrostatic actuation of single-axis scanners and biaxial MEMS mirrors were realized in a dual layer polysilicon SOI process. High Q-factors up to 145,000 have been achieved applying wafer level vacuum packaging technology including deposition of titanium thin film getters. The effective reduction of gas damping allows the MEMS actuator to achieve large amplitudes at high oscillation frequencies while driving voltage and power consumption can be minimized. Exemplarily shown is a micro scanner that achieves a total optical scan angle of 86 degrees at a resonant frequency of 30.8 kHz, which fulfills the requirements for HD720 resolution. Furthermore, results of a new wafer based glass-forming technology for fabrication of three dimensionally shaped glass lids with tilted optical windows are presented.
Keywords: MEMS mirror; vacuum package; laser projection; laser display; HD-resolution MEMS mirror; vacuum package; laser projection; laser display; HD-resolution
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Hofmann, U.; Janes, J.; Quenzer, H.-J. High-Q MEMS Resonators for Laser Beam Scanning Displays. Micromachines 2012, 3, 509-528.

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