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Journal: Micromachines, 2017
Volume: 8
Number: 13

Article: Time-Efficient High-Resolution Large-Area Nano-Patterning of Silicon Dioxide
Authors: by Li Lin, Yiyu Ou, Martin Aagesen, Flemming Jensen, Berit Herstrøm and Haiyan Ou
Link: https://www.mdpi.com/2072-666X/8/1/13

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