Special Issue "Microresonators"

A special issue of Micromachines (ISSN 2072-666X).

Deadline for manuscript submissions: closed (31 January 2016)

Special Issue Editor

Guest Editor
Prof. Dr. Behraad Bahreyni

Integrated Multi-Transducer Systems Laboratory, Simon Fraser University, MSE 4176, 250-13450 102nd Ave, Surrey, BC V3T 0A3, Canada
Website | E-Mail
Phone: 7787828694
Interests: microfabrication and micromachining technology; design of mechanical micro-sensors; design of resonant sensors and devices; interface and signal conditioning circuits for microsensors

Special Issue Information

Dear Colleagues,

Micromachining is an enabling technology that has paved the way for the introduction of numerous novel devices and systems. Micromachined transducers use a variety of transduction mechanisms to convert energy between different physical domains into each other. As such, fabrication techniques for micromachined devices are mainly optimized around a specific transduction mechanism. Among the different transduction mechanisms, resonance stands out in terms of its opportunities and benefits. Micromachined resonators are used in a variety of applications. Their high quality factors make them suitable in timing and signal processing applications. On the other hand, a resonant sensor provides a frequency-modulated output, which is robust against noise and interference and can be precisely measured. Employing the favorable characteristics of micromachined resonators has been the subject of academic and industrial research efforts over the past two decades.

Micromachines announces a Special Issue on the topic of Microresonators. We invite the submission of original research papers on following topics:

  • Microresonator design, fabrication, and characterization
  • Applications of microresonators for timing and frequency control
  • Applications of microresonators for filtering and signal processing
  • Applications of microresonators for physical sensing
  • Applications of microresonators for chemical sensing
  • Resonant micro-actuators
  • Nonlinearities in MEMS resonators
  • Coupled resonators
  • Interface electronics for microresonators
  • Other research topics related to microresonators

We look forward to receiving your contributions.

Prof. Dr. Behraad Bahreyni
Guest Editor

Keywords

  • microresonators
  • resonance
  • MEMS
  • micromachining
  • micro-sensors
  • oscillators
  • interface circuit

Published Papers (5 papers)

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Research

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Open AccessArticle Characterization of a Laterally Oscillating Microresonator Operating in the Nonlinear Region
Micromachines 2016, 7(8), 132; doi:10.3390/mi7080132
Received: 18 March 2016 / Revised: 24 June 2016 / Accepted: 25 July 2016 / Published: 2 August 2016
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Abstract
Microresonators are popular structures used in a variety of applications. They generally operate in the linear region where the vibration amplitude is limited, thereby limiting the signal-to-noise ratio. The nonlinear vibration region, where amplitudes and, consequently, the signal-to-noise ratio are relatively large, is
[...] Read more.
Microresonators are popular structures used in a variety of applications. They generally operate in the linear region where the vibration amplitude is limited, thereby limiting the signal-to-noise ratio. The nonlinear vibration region, where amplitudes and, consequently, the signal-to-noise ratio are relatively large, is generally avoided owing to instabilities and complexities in analysing the vibrations. In this work, a nonlinear dynamic model with a damping constant obtained from Monte Carlo simulation was derived to describe the vibration responses of microresonators operating in the nonlinear region. A laterally oscillating comb-drive driven resonator was designed, fabricated and characterized at various pressures and driving signals to validate the model. A simple method to extract the quality factor of the resonator in the nonlinear region was also proposed. The measured quality factors were compared with those obtained from the nonlinear model and a good agreement was obtained. Full article
(This article belongs to the Special Issue Microresonators)
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Open AccessArticle Multiparameter Microwave Characterization and Probing of Ultralow Glucose Concentration Using a Microfabricated Biochip
Micromachines 2016, 7(6), 93; doi:10.3390/mi7060093
Received: 18 March 2016 / Revised: 1 May 2016 / Accepted: 13 May 2016 / Published: 24 May 2016
PDF Full-text (1788 KB) | HTML Full-text | XML Full-text | Supplementary Files
Abstract
This paper presents a planar biochip consisting of electromagnetically coupled, symmetric, square open loops for the multiparameter microwave characterization of deionized water, a phosphate-buffered saline solution, and a fructose-deionized water solution. The characterization additionally includes the probing of an ultralow glucose concentration in
[...] Read more.
This paper presents a planar biochip consisting of electromagnetically coupled, symmetric, square open loops for the multiparameter microwave characterization of deionized water, a phosphate-buffered saline solution, and a fructose-deionized water solution. The characterization additionally includes the probing of an ultralow glucose concentration in a very small volume of human sera and in solutions of d-glucose powder and deionized water. The interaction between the coupled electromagnetic field and the aqueous solution sample translates into a predictable relationship between the electrical characteristics of the biochip (magnitude and phase of S-parameters, attenuation, phase constant, group delay, characteristic impedance, and effective complex permittivity) and the physical properties of the solution. Owing to the microfabrication technology used for fabricating the proposed microbiochip, it is possible to develop robust, compact square open loops with a microsized coupling gap that characterizes a very small volume (1 μL) of the sample. Additionally, the biochip’s impedance peaks at its resonances were modeled using glucose-level-dependent coupling capacitance between folded square open loops and mutual inductance between center-loaded T-shaped stubs. These peaks linearly shifted in frequencies and markedly varied in impedance. Consequently, a physiologically relevant amount of glucose (50–400 mg/dL) with a high sensitivity (up to 2.036 Ω/(mg·dL−1)) and an ultralow detection limit (up to 4.8 nmol/L) was linearly detected. Full article
(This article belongs to the Special Issue Microresonators)
Figures

Open AccessArticle A Novel Bulk Acoustic Wave Resonator for Filters and Sensors Applications
Micromachines 2015, 6(9), 1306-1316; doi:10.3390/mi6091306
Received: 24 July 2015 / Revised: 20 August 2015 / Accepted: 1 September 2015 / Published: 8 September 2015
Cited by 1 | PDF Full-text (1682 KB) | HTML Full-text | XML Full-text | Supplementary Files
Abstract
Bulk acoustic wave (BAW) resonators are widely applied in filters and gravimetric sensors for physical or biochemical sensing. In this work, a new architecture of BAW resonator is demonstrated, which introduces a pair of reflection layers onto the top of a thin film
[...] Read more.
Bulk acoustic wave (BAW) resonators are widely applied in filters and gravimetric sensors for physical or biochemical sensing. In this work, a new architecture of BAW resonator is demonstrated, which introduces a pair of reflection layers onto the top of a thin film bulk acoustic resonator (FBAR) device. The new device can be transformed between type I and type II dispersions by varying the thicknesses of the reflection layers. A computational modeling is developed to fully investigate the acoustic waves and the dispersion types of the device theoretically. The novel structure makes it feasible to fabricate both type resonators in one filter, which offers an effective alternative to improve the pass band flatness in the filter. Additionally, this new device exhibits a high quality factor (Q) in the liquid, which opens a possibility for real time measurement in solutions with a superior limitation of detection (LOD) in sensor applications. Full article
(This article belongs to the Special Issue Microresonators)

Review

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Open AccessReview Micromachined Resonators: A Review
Micromachines 2016, 7(9), 160; doi:10.3390/mi7090160
Received: 2 June 2016 / Revised: 24 July 2016 / Accepted: 25 July 2016 / Published: 8 September 2016
Cited by 7 | PDF Full-text (14411 KB) | HTML Full-text | XML Full-text
Abstract
This paper is a review of the remarkable progress that has been made during the past few decades in design, modeling, and fabrication of micromachined resonators. Although micro-resonators have come a long way since their early days of development, they are yet to
[...] Read more.
This paper is a review of the remarkable progress that has been made during the past few decades in design, modeling, and fabrication of micromachined resonators. Although micro-resonators have come a long way since their early days of development, they are yet to fulfill the rightful vision of their pervasive use across a wide variety of applications. This is partially due to the complexities associated with the physics that limit their performance, the intricacies involved in the processes that are used in their manufacturing, and the trade-offs in using different transduction mechanisms for their implementation. This work is intended to offer a brief introduction to all such details with references to the most influential contributions in the field for those interested in a deeper understanding of the material. Full article
(This article belongs to the Special Issue Microresonators)
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Open AccessReview Miniature Microwave Notch Filters and Comparators Based on Transmission Lines Loaded with Stepped Impedance Resonators (SIRs)
Micromachines 2016, 7(1), 1; doi:10.3390/mi7010001
Received: 9 November 2015 / Revised: 14 December 2015 / Accepted: 19 December 2015 / Published: 23 December 2015
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Abstract
In this paper, different configurations of transmission lines loaded with stepped impedance resonators (SIRs) are reviewed. This includes microstrip lines loaded with pairs of SIRs, and coplanar waveguides (CPW) loaded with multi-section SIRs. Due to the high electric coupling between the line and
[...] Read more.
In this paper, different configurations of transmission lines loaded with stepped impedance resonators (SIRs) are reviewed. This includes microstrip lines loaded with pairs of SIRs, and coplanar waveguides (CPW) loaded with multi-section SIRs. Due to the high electric coupling between the line and the resonant elements, the structures are electrically small, i.e., dimensions are small as compared to the wavelength at the fundamental resonance. The circuit models describing these structures are discussed and validated, and the potential applications as notch filters and comparators are highlighted. Full article
(This article belongs to the Special Issue Microresonators)
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