E-Mail Alert

Add your e-mail address to receive forthcoming issues of this journal:

Journal Browser

Journal Browser

Special Issue "Advances in Microelectromechanical Systems (MEMS) Materials"

Quicklinks

A special issue of Materials (ISSN 1996-1944).

Deadline for manuscript submissions: closed (28 February 2013)

Special Issue Editor

Guest Editor
Dr. Christopher Shearwood

School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore 639798, Singapore
Website | E-Mail
Phone: +6567905524
Fax: +56 67924062
Interests: MEMS; magnetic thin films; Piezo-magnetic materials; BioMEMS; micro-needles; drug delivery; smart materials; nano-metallic powders

Special Issue Information

Submission

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. Papers will be published continuously (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are refereed through a peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Materials is an international peer-reviewed Open Access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 1400 CHF (Swiss Francs).

Published Papers (3 papers)

View options order results:
result details:
Displaying articles 1-3
Export citation of selected articles as:

Research

Open AccessArticle Evaluation of Superficial and Dimensional Quality Features in Metallic Micro-Channels Manufactured by Micro-End-Milling
Materials 2013, 6(4), 1434-1451; doi:10.3390/ma6041434
Received: 1 March 2013 / Revised: 19 March 2013 / Accepted: 25 March 2013 / Published: 3 April 2013
Cited by 8 | PDF Full-text (2132 KB) | HTML Full-text | XML Full-text
Abstract
Miniaturization encourages the development of new manufacturing processes capable of fabricating features, like micro-channels, in order to use them for different applications, such as in fuel cells, heat exchangers, microfluidic devices and micro-electromechanical systems (MEMS). Many studies have been conducted on heat and
[...] Read more.
Miniaturization encourages the development of new manufacturing processes capable of fabricating features, like micro-channels, in order to use them for different applications, such as in fuel cells, heat exchangers, microfluidic devices and micro-electromechanical systems (MEMS). Many studies have been conducted on heat and fluid transfer in micro-channels, and they appeared significantly deviated from conventional theory, due to measurement errors and fabrication methods. The present research, in order to deal with this opportunity, is focused on a set of experiments in the micro-milling of channels made of aluminum, titanium alloys and stainless steel, varying parameters, such as spindle speed, depth of cut per pass (ap), channel depth (d), feed per tooth (fz) and coolant application. The experimental results were analyzed in terms of dimensional error, channel profile shape deviation from rectangular and surface quality (burr and roughness). The micro-milling process was capable of offering quality features required on the micro-channeled devices. Critical phenomena, like run-out, ploughing, minimum chip thickness and tool wear, were encountered as an explanation for the deviations in shape and for the surface quality of the micro-channels. The application of coolant and a low depth of cut per pass were significant to obtain better superficial quality features and a smaller dimensional error. In conclusion, the integration of superficial and geometrical features on the study of the quality of micro-channeled devices made of different metallic materials contributes to the understanding of the impact of calibrated cutting conditions in MEMS applications. Full article
(This article belongs to the Special Issue Advances in Microelectromechanical Systems (MEMS) Materials)
Figures

Open AccessArticle Modeling the Microstructure Curvature of Boron-Doped Silicon in Bulk Micromachined Accelerometer
Materials 2013, 6(1), 244-254; doi:10.3390/ma6010244
Received: 27 August 2012 / Revised: 29 December 2012 / Accepted: 7 January 2013 / Published: 15 January 2013
Cited by 6 | PDF Full-text (211 KB) | HTML Full-text | XML Full-text
Abstract
Microstructure curvature, or buckling, is observed in the micromachining of silicon sensors because of the doping of impurities for realizing certain electrical and mechanical processes. This behavior can be a key source of error in inertial sensors. Therefore, identifying the factors that influence
[...] Read more.
Microstructure curvature, or buckling, is observed in the micromachining of silicon sensors because of the doping of impurities for realizing certain electrical and mechanical processes. This behavior can be a key source of error in inertial sensors. Therefore, identifying the factors that influence the buckling value is important in designing MEMS devices. In this study, the curvature in the proof mass of an accelerometer is modeled as a multilayered solid model. Modeling is performed according to the characteristics of the solid diffusion mechanism in the bulk-dissolved wafer process (BDWP) based on the self-stopped etch technique. Moreover, the proposed multilayered solid model is established as an equivalent composite structure formed by a group of thin layers that are glued together. Each layer has a different Young’s modulus value and each undergoes different volume shrinkage strain owing to boron doping in silicon. Observations of five groups of proof mass blocks of accelerometers suggest that the theoretical model is effective in determining the buckling value of a fabricated structure. Full article
(This article belongs to the Special Issue Advances in Microelectromechanical Systems (MEMS) Materials)
Open AccessArticle A Novel Fractional Order Model for the Dynamic Hysteresis of Piezoelectrically Actuated Fast Tool Servo
Materials 2012, 5(12), 2465-2485; doi:10.3390/ma5122465
Received: 22 August 2012 / Revised: 5 November 2012 / Accepted: 14 November 2012 / Published: 23 November 2012
Cited by 3 | PDF Full-text (592 KB) | HTML Full-text | XML Full-text
Abstract
The main contribution of this paper is the development of a linearized model for describing the dynamic hysteresis behaviors of piezoelectrically actuated fast tool servo (FTS). A linearized hysteresis force model is proposed and mathematically described by a fractional order differential equation. Combining
[...] Read more.
The main contribution of this paper is the development of a linearized model for describing the dynamic hysteresis behaviors of piezoelectrically actuated fast tool servo (FTS). A linearized hysteresis force model is proposed and mathematically described by a fractional order differential equation. Combining the dynamic modeling of the FTS mechanism, a linearized fractional order dynamic hysteresis (LFDH) model for the piezoelectrically actuated FTS is established. The unique features of the LFDH model could be summarized as follows: (a) It could well describe the rate-dependent hysteresis due to its intrinsic characteristics of frequency-dependent nonlinear phase shifts and amplitude modulations; (b) The linearization scheme of the LFDH model would make it easier to implement the inverse dynamic control on piezoelectrically actuated micro-systems. To verify the effectiveness of the proposed model, a series of experiments are conducted. The toolpaths of the FTS for creating two typical micro-functional surfaces involving various harmonic components with different frequencies and amplitudes are scaled and employed as command signals for the piezoelectric actuator. The modeling errors in the steady state are less than ±2.5% within the full span range which is much smaller than certain state-of-the-art modeling methods, demonstrating the efficiency and superiority of the proposed model for modeling dynamic hysteresis effects. Moreover, it indicates that the piezoelectrically actuated micro systems would be more suitably described as a fractional order dynamic system. Full article
(This article belongs to the Special Issue Advances in Microelectromechanical Systems (MEMS) Materials)

Journal Contact

MDPI AG
Materials Editorial Office
St. Alban-Anlage 66, 4052 Basel, Switzerland
materials@mdpi.com
Tel. +41 61 683 77 34
Fax: +41 61 302 89 18
Editorial Board
Contact Details Submit to Materials
Back to Top