Journal Description
Micromachines
Micromachines
is a peer-reviewed, open access journal on the science and technology of small structures, devices and systems, published monthly online by MDPI.
- Open Access— free for readers, with article processing charges (APC) paid by authors or their institutions.
- High Visibility: indexed within Scopus, SCIE (Web of Science), PubMed, PMC, Ei Compendex, dblp, and other databases.
- Journal Rank: JCR - Q2 (Chemistry, Analytical) / CiteScore - Q2 (Mechanical Engineering)
- Rapid Publication: manuscripts are peer-reviewed and a first decision is provided to authors approximately 16.1 days after submission; acceptance to publication is undertaken in 1.9 days (median values for papers published in this journal in the second half of 2023).
- Recognition of Reviewers: reviewers who provide timely, thorough peer-review reports receive vouchers entitling them to a discount on the APC of their next publication in any MDPI journal, in appreciation of the work done.
- Testimonials: See what our editors and authors say about Micromachines.
Impact Factor:
3.4 (2022);
5-Year Impact Factor:
3.3 (2022)
Latest Articles
Characterization of Sand and Dust Pollution Degradation Based on Sensitive Structure of Microelectromechanical System Flow Sensor
Micromachines 2024, 15(5), 574; https://doi.org/10.3390/mi15050574 (registering DOI) - 26 Apr 2024
Abstract
The effect of sand and dust pollution on the sensitive structures of flow sensors in microelectromechanical systems (MEMS) is a hot issue in current MEMS reliability research. However, previous studies on sand and dust contamination have only searched for sensor accuracy degradation due
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The effect of sand and dust pollution on the sensitive structures of flow sensors in microelectromechanical systems (MEMS) is a hot issue in current MEMS reliability research. However, previous studies on sand and dust contamination have only searched for sensor accuracy degradation due to heat conduction in sand and dust cover and have yet to search for other failure-inducing factors. This paper aims to discover the other inducing factors for the accuracy failure of MEMS flow sensors under sand and dust pollution by using a combined model simulation and sample test method. The accuracy of a flow sensor is mainly reflected by the size of its thermistor, so in this study, the output value of the thermistor value was chosen as an electrical characterization parameter to verify the change in the sensor’s accuracy side by side. The results show that after excluding the influence of heat conduction, when sand particles fall on the device, the mutual friction between the sand particles will produce an electrostatic current; through the principle of electrostatic dissipation into the thermistor, the principle of measurement leads to the resistance value becoming smaller, and when the sand dust is stationary for some time, the resistance value returns to the expected level. This finding provides theoretical guidance for finding failure-inducing factors in MEMS failure modes.
Full article
(This article belongs to the Special Issue Selected Papers From the 25th Annual Conference and 14th International Conference of Chinese Society of Micro-Nano Technology (CSMNT 2023))
Open AccessArticle
Experimental and Simulation Research on Femtosecond Laser Induced Controllable Morphology of Monocrystalline SiC
by
Yang Hua, Zhenduo Zhang, Jiyu Du, Xiaoliang Liang, Wei Zhang, Yukui Cai and Quanjing Wang
Micromachines 2024, 15(5), 573; https://doi.org/10.3390/mi15050573 (registering DOI) - 26 Apr 2024
Abstract
Silicon carbide (SiC) is utilized in the automotive, semiconductor, and aerospace industries because of its desirable characteristics. Nevertheless, the traditional machining method induces surface microcracks, low geometrical precision, and severe tool wear due to the intrinsic high brittleness and hardness of SiC. Femtosecond
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Silicon carbide (SiC) is utilized in the automotive, semiconductor, and aerospace industries because of its desirable characteristics. Nevertheless, the traditional machining method induces surface microcracks, low geometrical precision, and severe tool wear due to the intrinsic high brittleness and hardness of SiC. Femtosecond laser processing as a high-precision machining method offers a new approach to SiC processing. However, during the process of femtosecond laser ablation, temperature redistribution and changes in geometrical morphology features are caused by alterations in carrier density. Therefore, the current study presented a multi-physics model that took carrier density alterations into account to more accurately predict the geometrical morphology for femtosecond laser ablating SiC. The transient nonlinear evolutions of the optical and physical characteristics of SiC irradiated by femtosecond laser were analyzed and the influence of laser parameters on the ablation morphology was studied. The femtosecond laser ablation experiments were performed, and the ablated surfaces were subsequently analyzed. The experimental results demonstrate that the proposed model can effectively predict the geometrical morphology. The predicted error of the ablation diameter is within the range from 0.15% to 7.44%. The predicted error of the ablation depth is within the range from 1.72% to 6.94%. This work can offer a new way to control the desired geometrical morphology of SiC in the automotive, semiconductor, and aerospace industries.
Full article
(This article belongs to the Section D:Materials and Processing)
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Open AccessArticle
A New Type of Hydraulic Clutch with Magnetorheological Fluid: Theory and Experiment
by
Karol Musiałek, Ireneusz Musiałek, Karol Osowski, Artur Olszak, Aneta Mikulska, Zbigniew Kęsy, Andrzej Kęsy and Seung-Bok Choi
Micromachines 2024, 15(5), 572; https://doi.org/10.3390/mi15050572 (registering DOI) - 26 Apr 2024
Abstract
This paper presents a new type of hydraulic clutch operating by means of magnetorheological (MR) fluids and the results achieved from both theoretical analysis and experimental measurement. A hydraulic clutch system with MR working fluid and a rotating magnetic field located was designed.
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This paper presents a new type of hydraulic clutch operating by means of magnetorheological (MR) fluids and the results achieved from both theoretical analysis and experimental measurement. A hydraulic clutch system with MR working fluid and a rotating magnetic field located was designed. The clutch was based on the principle of using a rotating magnetic field created by an alternating current electromagnet to set the MR fluid in motion. To test the hydraulic clutch with a rotating magnetic field, MR fluids were produced by our laboratory, consisting of solid iron particles of various diameters mixed with a silicone oil. With MR working fluid and a rotating magnetic core was designed. The rheological properties of the MR fluids were assessed on the basis of tests carried out with a Brookfield DV2T rheometer equipped with a magnetic device for generating a magnetic field. The characteristics of the hydraulic clutch were tested on a specially built test stand. It was found that the torque transmitted by the clutch increased with the rotational speed of the magnetic field and with a lower rotational speed of the beaker in which the working fluid was placed. It was also found that the greatest torque occurred with the working fluid with the highest iron content. Based on the analysis of the structure and characteristics of the clutch in which the magnetic field is used, it has been shown that the design of the developed clutch is similar to that of an induction clutch, and its characteristics correspond to the characteristics of the eddy current clutch. Therefore, the proposed new clutch with MR fluid and rotating magnetic field can be applied to stationary power transmission systems in a manner similar to an eddy current clutch.
Full article
(This article belongs to the Section E:Engineering and Technology)
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Open AccessCommunication
Effect of GaN Cap Thickness on the DC Performance of AlGaN/GaN HEMTs
by
Zuorong Nie, Kai Wang, Xiaoyi Liu and Hong Wang
Micromachines 2024, 15(5), 571; https://doi.org/10.3390/mi15050571 (registering DOI) - 26 Apr 2024
Abstract
We prepared AlGaN/GaN high electron mobility transistors (HEMTs) with GaN cap thicknesses of 0, 1, 3, and 5 nm and compared the material characteristics and device performances. It was found that the surface morphology of the epitaxial layer was effectively improved after the
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We prepared AlGaN/GaN high electron mobility transistors (HEMTs) with GaN cap thicknesses of 0, 1, 3, and 5 nm and compared the material characteristics and device performances. It was found that the surface morphology of the epitaxial layer was effectively improved after the introduction of the GaN cap layer. With the increase of the GaN cap thickness, the carrier concentration (ns) decreased and the carrier mobility (μH) increased. Although the drain saturation current (IdSat) of the device decreased with the increasing GaN cap thickness, the excessively thin GaN layer was not suitable for the cap layer. The thicker GaN layer not only improved the surface topography of the epitaxial layer but also effectively improved the off-state characteristics of the device. The optimal cap thickness was determined to be 3 nm. With the introduction of the 3 nm GaN cap, the IdSat was not significantly reduced. However, both the off-state gate leakage current (IgLeak) and the off-state leakage current (IdLeak) decreased by about two orders of magnitude, and the breakdown voltage (BV) increased by about 70 V.
Full article
(This article belongs to the Special Issue GaN Heterostructure Devices: From Materials to Application)
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Open AccessArticle
A Real-Time Monitoring Method for Selective Laser Melting of TA1 Materials Based on Radiation Detection of a Molten Pool
by
Tao Zhou, Wei Huang and Congyan Chen
Micromachines 2024, 15(5), 570; https://doi.org/10.3390/mi15050570 (registering DOI) - 26 Apr 2024
Abstract
Selective laser melting (SLM) technology is a promising additive manufacturing technology. However, due to the numerous influencing factors in this complex process, a reliable real-time method is needed to monitor the forming process of SLM. The molten pool is the smallest forming unit
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Selective laser melting (SLM) technology is a promising additive manufacturing technology. However, due to the numerous influencing factors in this complex process, a reliable real-time method is needed to monitor the forming process of SLM. The molten pool is the smallest forming unit in the SLM process, the consistency of which can effectively reflect the quality of the printing process. By using a coaxial optical path structure and a compound amplifier circuit, high-speed acquisition of molten pool radiation can be realized. Next, single factor analysis and orthogonal experimentation were used to investigate the influence levels of key process parameters on the radiation of molten pool. In addition, numerical simulation was carried out with the same parameter setting schemes, the results of which are consistent with those in radiation detection experiments. It is shown that the laser power has the greatest effect on the radiation of the molten pool, while the scanning speed and the hatch spacing have little effect on the radiation. Finally, the positioning experiment involving the small hole structure was carried out, and the experimental results showed that the device could accurately locate the position coordinates of the given hole structure.
Full article
(This article belongs to the Special Issue Advanced Additive Manufacturing Techniques: From Fundamental Research to Applications)
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Open AccessArticle
Fabrication of Ordered Macropore Arrays in n-Type Silicon Wafer by Anodic Etching Using Double-Tank Electrochemical Cell
by
Jing Zhang, Faqiang Zhang, Mingsheng Ma and Zhifu Liu
Micromachines 2024, 15(5), 569; https://doi.org/10.3390/mi15050569 (registering DOI) - 26 Apr 2024
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In this work, ordered macropore arrays in n-type silicon wafers were fabricated by anodic etching using a double-tank electrochemical cell. The effects of the wafer thickness, etching time and voltage on the quality of macropore arrays were investigated. Homogeneous macropore arrays could be
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In this work, ordered macropore arrays in n-type silicon wafers were fabricated by anodic etching using a double-tank electrochemical cell. The effects of the wafer thickness, etching time and voltage on the quality of macropore arrays were investigated. Homogeneous macropore arrays could be achieved in 200 μm thick silicon wafers, but could not be obtained from 300 and 400 μm thick silicon wafers. Highly ordered macropore arrays with an aspect ratio of 19 were fabricated in 200 μm thick n-type silicon at 4.5 V. The etching current decreases in 200 μm thick silicon but increases in thicker silicon with an increase in time. It demonstrates that the minority carrier transportation capability from the illuminated surface to the reactive surface is different for silicon wafers with different thicknesses. The minority carrier concentration at the illuminated surface for stable macropore formation and the current under different etching voltages were calculated based on a hole transport model. The results show that appropriately decreasing wafer thickness and increasing voltage can help stable macropore array fabrication in the illumination-limited double-tank cell.
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Open AccessArticle
Advanced Modeling and Simulation of Multilayer Spin–Transfer Torque Magnetoresistive Random Access Memory with Interface Exchange Coupling
by
Mario Bendra, Roberto Lacerda de Orio, Siegfried Selberherr, Wolfgang Goes and Viktor Sverdlov
Micromachines 2024, 15(5), 568; https://doi.org/10.3390/mi15050568 (registering DOI) - 26 Apr 2024
Abstract
In advancing the study of magnetization dynamics in STT-MRAM devices, we employ the spin drift–diffusion model to address the back-hopping effect. This issue manifests as unwanted switching either in the composite free layer or in the reference layer in synthetic antiferromagnets—a challenge that
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In advancing the study of magnetization dynamics in STT-MRAM devices, we employ the spin drift–diffusion model to address the back-hopping effect. This issue manifests as unwanted switching either in the composite free layer or in the reference layer in synthetic antiferromagnets—a challenge that becomes more pronounced with device miniaturization. Although this miniaturization aims to enhance memory density, it inadvertently compromises data integrity. Parallel to this examination, our investigation of the interface exchange coupling within multilayer structures unveils critical insights into the efficacy and dependability of spintronic devices. We particularly scrutinize how exchange coupling, mediated by non-magnetic layers, influences the magnetic interplay between adjacent ferromagnetic layers, thereby affecting their magnetic stability and domain wall movements. This investigation is crucial for understanding the switching behavior in multi-layered structures. Our integrated methodology, which uses both charge and spin currents, demonstrates a comprehensive understanding of MRAM dynamics. It emphasizes the strategic optimization of exchange coupling to improve the performance of multi-layered spintronic devices. Such enhancements are anticipated to encourage improvements in data retention and the write/read speeds of memory devices. This research, thus, marks a significant leap forward in the refinement of high-capacity, high-performance memory technologies.
Full article
(This article belongs to the Special Issue Magnetic and Spin Devices, 3rd Edition)
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Open AccessArticle
Stray Magnetic Field Variations and Micromagnetic Simulations: Models for Ni0.8Fe0.2 Disks Used for Microparticle Trapping
by
Gregory B. Vieira, Eliza Howard, Prannoy Lankapalli, Iesha Phillips, Keith Hoffmeister and Jackson Holley
Micromachines 2024, 15(5), 567; https://doi.org/10.3390/mi15050567 (registering DOI) - 26 Apr 2024
Abstract
Patterned micro-scale thin-film magnetic structures, in conjunction with weak (~few tens of Oe) applied magnetic fields, can create energy landscapes capable of trapping and transporting fluid-borne magnetic microparticles. These energy landscapes arise from magnetic field magnitude variations that arise in the vicinity of
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Patterned micro-scale thin-film magnetic structures, in conjunction with weak (~few tens of Oe) applied magnetic fields, can create energy landscapes capable of trapping and transporting fluid-borne magnetic microparticles. These energy landscapes arise from magnetic field magnitude variations that arise in the vicinity of the magnetic structures. In this study, we examine means of calculating magnetic fields in the local vicinity of permalloy (Ni0.8Fe0.2) microdisks in weak (~tens of Oe) external magnetic fields. To do this, we employ micromagnetic simulations and the resulting calculations of fields. Because field calculation from micromagnetic simulations is computationally time-intensive, we discuss a method for fitting simulated results to improve calculation speed. Resulting stray fields vary dramatically based on variations in micromagnetic simulations—vortex vs. non-vortex micromagnetic results—which can each appear despite identical simulation final conditions, resulting in field strengths that differ by about a factor of two.
Full article
(This article belongs to the Special Issue Recent Advances in Magnetic Micro/Nano-Manipulation)
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Open AccessArticle
Numerical Investigation of Heat Transfer and Development in Spherical Condensation Droplets
by
Jian Dong, Siguang Lu, Bilong Liu, Jie Wu and Mengqi Chen
Micromachines 2024, 15(5), 566; https://doi.org/10.3390/mi15050566 (registering DOI) - 26 Apr 2024
Abstract
This study establishes thermodynamic assumptions regarding the growth of condensation droplets and a mathematical formulation of droplet energy functionals. A model of the gas–liquid interface condensation rate based on kinetic theory is derived to clarify the relationship between condensation conditions and intermediate variables.
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This study establishes thermodynamic assumptions regarding the growth of condensation droplets and a mathematical formulation of droplet energy functionals. A model of the gas–liquid interface condensation rate based on kinetic theory is derived to clarify the relationship between condensation conditions and intermediate variables. The energy functional of a droplet, derived using the principle of least action, partially elucidates the inherent self-organizing growth laws of condensed droplets, enabling predictive modeling of the droplet’s growth. Considering the effects of the condensation environment and droplet heat transfer mechanisms on droplet growth dynamics, we divide the process into three distinct stages, marked by critical thresholds of 105 nm3 and 1010 nm3. Our model effectively explains why the observed contact angle fails to reach the expected Wenzel contact angle. This research presents a detailed analysis of the factors affecting surface condensation and heat transfer. The predictions of our model have an error rate of less than 3% error compared to baseline experiments. Consequently, these insights can significantly contribute to and improve the design of condensation heat transfer surfaces for the phase-change heat sinks in microprocessor chips.
Full article
(This article belongs to the Section A:Physics)
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Open AccessArticle
Low-Temperature and High-Efficiency Solid-Phase Amplification Based on Formamide
by
Jialing Huang, Huan Li, Fengfeng Shu, Wenchao Zhou, Yihui Wu, Yue Wang, Xiao Lv, Ming Gao, Zihan Song and Shixun Zhao
Micromachines 2024, 15(5), 565; https://doi.org/10.3390/mi15050565 (registering DOI) - 26 Apr 2024
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The thermal stability of DNA immobilized on a solid surface is one of the factors that affects the efficiency of solid-phase amplification (SP-PCR). Although variable temperature amplification ensures high specificity of the reaction by precisely controlling temperature changes, excessively high temperatures during denaturation
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The thermal stability of DNA immobilized on a solid surface is one of the factors that affects the efficiency of solid-phase amplification (SP-PCR). Although variable temperature amplification ensures high specificity of the reaction by precisely controlling temperature changes, excessively high temperatures during denaturation can negatively affect DNA stability. Formamide (FA) enables DNA denaturation at lower temperatures, showing potential for SP-PCR. Research on FA’s impacts on DNA microarrays is still limited, necessitating further optimization in exploring the characteristics of FA in SP-PCR according to particular application needs. We immobilized DNA on a chip using a crosslinker and generated DNA microarrays through bridge amplification based on FA denaturation on our automated reaction device. We optimized the denaturation and hybridization parameters of FA, achieving a maximum cluster density of 2.83 × 104 colonies/mm2. Compared to high-temperature denaturation, FA denaturation required a lower template concentration and milder reaction conditions and produced higher cluster density, demonstrating that FA effectively improves hybridization rates on surfaces. Regarding the immobilized DNA stability, the FA group exhibited a 45% loss of DNA, resulting in a 15% higher DNA retention rate compared to the high-temperature group, indicating that FA can better maintain DNA stability. Our study suggests that using FA improves the immobilized DNA stability and amplification efficiency in SP-PCR.
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Open AccessReview
Growing Trend to Adopt Speckle Variance Optical Coherence Tomography for Biological Tissue Assessments in Pre-Clinical Applications
by
Ruchire Eranga Wijesinghe, Nipun Shantha Kahatapitiya, Changho Lee, Sangyeob Han, Shinheon Kim, Sm Abu Saleah, Daewoon Seong, Bhagya Nathali Silva, Udaya Wijenayake, Naresh Kumar Ravichandran, Mansik Jeon and Jeehyun Kim
Micromachines 2024, 15(5), 564; https://doi.org/10.3390/mi15050564 (registering DOI) - 25 Apr 2024
Abstract
Speckle patterns are a generic feature in coherent imaging techniques like optical coherence tomography (OCT). Although speckles are granular like noise texture, which degrades the image, they carry information that can be benefited by processing and thereby furnishing crucial information of sample structures,
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Speckle patterns are a generic feature in coherent imaging techniques like optical coherence tomography (OCT). Although speckles are granular like noise texture, which degrades the image, they carry information that can be benefited by processing and thereby furnishing crucial information of sample structures, which can serve to provide significant important structural details of samples in in vivo longitudinal pre-clinical monitoring and assessments. Since the motions of tissue molecules are indicated through speckle patterns, speckle variance OCT (SV-OCT) can be well-utilized for quantitative assessments of speckle variance (SV) in biological tissues. SV-OCT has been acknowledged as a promising method for mapping microvasculature in transverse-directional blood vessels with high resolution in micrometers in both the transverse and depth directions. The fundamental scope of this article reviews the state-of-the-art and clinical benefits of SV-OCT to assess biological tissues for pre-clinical applications. In particular, focus on precise quantifications of in vivo vascular response, therapy assessments, and real-time temporal vascular effects of SV-OCT are primarily emphasized. Finally, SV-OCT-incorporating pre-clinical techniques with high potential are presented for future biomedical applications.
Full article
(This article belongs to the Special Issue Optical Coherence Tomography (OCT) Technique and Its Applications)
Open AccessArticle
Design and Fabrication of 3.5 GHz Band-Pass Film Bulk Acoustic Resonator Filter
by
Yu Zhou, Yupeng Zheng, Qinwen Xu, Yuanhang Qu, Yuqi Ren, Xiaoming Huang, Chao Gao, Yan Liu, Shishang Guo, Yao Cai and Chengliang Sun
Micromachines 2024, 15(5), 563; https://doi.org/10.3390/mi15050563 (registering DOI) - 25 Apr 2024
Abstract
With the development of wireless communication, increasing signal processing presents higher requirements for radio frequency (RF) systems. Piezoelectric acoustic filters, as important elements of an RF front-end, have been widely used in 5G-generation systems. In this work, we propose a Sc0.2Al
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With the development of wireless communication, increasing signal processing presents higher requirements for radio frequency (RF) systems. Piezoelectric acoustic filters, as important elements of an RF front-end, have been widely used in 5G-generation systems. In this work, we propose a Sc0.2Al0.8N-based film bulk acoustic wave resonator (FBAR) for use in the design of radio frequency filters for the 5G mid-band spectrum with a passband from 3.4 to 3.6 GHz. With the excellent piezoelectric properties of Sc0.2Al0.8N, FBAR shows a large of 13.1%, which can meet the requirement of passband width. Based on the resonant characteristics of Sc0.2Al0.8N FBAR devices, we demonstrate and fabricate different ladder-type FBAR filters with second, third and fourth orders. The test results show that the out-of-band rejection improves and the insertion loss decreases slightly as the filter order increases, although the frequency of the passband is lower than the predicted ones due to fabrication deviation. The passband from 3.27 to 3.47 GHz is achieved with a 200 MHz bandwidth and insertion loss lower than 2 dB. This work provides a potential approach using ScAlN-based FBAR technology to meet the band-pass filter requirements of 5G mid-band frequencies.
Full article
Open AccessCommunication
Wireless Temperature Measurement for Curved Surfaces Based on AlN Surface Acoustic Wave Resonators
by
Huali Liu, Zhixin Zhou and Liang Lou
Micromachines 2024, 15(5), 562; https://doi.org/10.3390/mi15050562 (registering DOI) - 25 Apr 2024
Abstract
In this paper, we propose a novel method for temperature measurement using surface acoustic wave (SAW) temperature sensors on curved or irregular surfaces. We integrate SAW resonators onto flexible printed circuit boards (FPCBs) to ensure better conformity of the temperature sensor with the
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In this paper, we propose a novel method for temperature measurement using surface acoustic wave (SAW) temperature sensors on curved or irregular surfaces. We integrate SAW resonators onto flexible printed circuit boards (FPCBs) to ensure better conformity of the temperature sensor with the surface of the object under test. Compared to traditional rigid PCBs, FPCBs offer greater dynamic flexibility, lighter weight, and thinner thickness, which make them an ideal choice for making SAW devices working for temperature measurements under curved surfaces. We design a temperature sensor array consisting of three devices with different operating frequencies to measure the temperature at multiple points on the surface of the object. To distinguish between different target points in the sensor array, each sensor operates at a different frequency, and the operating frequency bands do not overlap. This differentiation is achieved using Frequency Division Multiple Access (FDMA) technology. Experimental results indicate that the frequency temperature coefficients of these sensors are −30.248 ppm/°C, −30.195 ppm/°C, and −30.115 ppm/°C, respectively. In addition, the sensor array enables wireless communication via antenna and transceiver circuits. This innovation heralds enhanced adaptability and applicability for SAW temperature sensor applications.
Full article
(This article belongs to the Special Issue Micro/Nano Sensors: Fabrication and Applications)
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Open AccessArticle
Reliability Study of Metal-Oxide Semiconductors in Integrated Circuits
by
Boris V. Malozyomov, Nikita V. Martyushev, Natalia Nikolaevna Bryukhanova, Viktor V. Kondratiev, Roman V. Kononenko, Pavel P. Pavlov, Victoria V. Romanova and Yuliya I. Karlina
Micromachines 2024, 15(5), 561; https://doi.org/10.3390/mi15050561 - 24 Apr 2024
Abstract
This paper is devoted to the study of CMOS IC parameter degradation during reliability testing. The paper presents a review of literature data on the issue of the reliability of semiconductor devices and integrated circuits and the types of failures leading to the
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This paper is devoted to the study of CMOS IC parameter degradation during reliability testing. The paper presents a review of literature data on the issue of the reliability of semiconductor devices and integrated circuits and the types of failures leading to the degradation of IC parameters. It describes the tests carried out on the reliability of controlled parameters of integrated circuit TPS54332, such as quiescent current, quiescent current in standby mode, resistance of the open key, and instability of the set output voltage in the whole range of input voltages and in the whole range of load currents. The calculated values of activation energies and acceleration coefficients for different test temperature regimes are given. As a result of the work done, sample rejection tests have been carried out on the TPS54332 IC under study. Experimental fail-safe tests were carried out, with subsequent analysis of the chip samples by the controlled parameter quiescent current. On the basis of the obtained experimental values, the values of activation energy and acceleration coefficient at different temperature regimes were calculated. The dependencies of activation energy and acceleration coefficient on temperature were plotted, which show that activation energy linearly increases with increasing temperature, while the acceleration coefficient, on the contrary, decreases. It was also found that the value of the calculated activation energy of the chip is 0.1 eV less than the standard value of the activation energy.
Full article
(This article belongs to the Special Issue High-Reliability Semiconductor Devices and Integrated Circuits, 2nd Edition)
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Open AccessArticle
Wafer-Scale Characterization of 1692-Pixel-Per-Inch Blue Micro-LED Arrays with an Optimized ITO Layer
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Eun-Kyung Chu, Eun Jeong Youn, Hyun Woong Kim, Bum Doo Park, Ho Kun Sung and Hyeong-Ho Park
Micromachines 2024, 15(5), 560; https://doi.org/10.3390/mi15050560 - 24 Apr 2024
Abstract
Wafer-scale blue micro-light-emitting diode (micro-LED) arrays were fabricated with a pixel size of 12 μm, a pixel pitch of 15 μm, and a pixel density of 1692 pixels per inch, achieved by optimizing the properties of e-beam-deposited and sputter-deposited indium tin oxide (ITO).
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Wafer-scale blue micro-light-emitting diode (micro-LED) arrays were fabricated with a pixel size of 12 μm, a pixel pitch of 15 μm, and a pixel density of 1692 pixels per inch, achieved by optimizing the properties of e-beam-deposited and sputter-deposited indium tin oxide (ITO). Although the sputter-deposited ITO (S-ITO) films exhibited a densely packed morphology and lower resistivity compared to the e-beam-deposited ITO (E-ITO) films, the forward voltage (VF) values of a micro-LED with the S-ITO films were higher than those with the E-ITO films. The VF values for a single pixel and for four pixels with E-ITO films were 2.82 V and 2.83 V, respectively, while the corresponding values for S-ITO films were 3.50 V and 3.52 V. This was attributed to ion bombardment damage and nitrogen vacancies in the p-GaN layer. Surprisingly, the VF variations of a single pixel and of four pixels with the optimized E-ITO spreading layer from five different regions were only 0.09 V and 0.10 V, respectively. This extremely uniform VF variation is suitable for creating micro-LED displays to be used in AR and VR applications, circumventing the bottleneck in the development of long-lifespan and high-brightness organic LED devices for industrial mass production.
Full article
(This article belongs to the Special Issue Advanced Thin-Films: Design, Fabrication and Applications, 2nd Edition)
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Open AccessReview
Recent Developments in Magnetic Hyperthermia Therapy (MHT) and Magnetic Particle Imaging (MPI) in the Brain Tumor Field: A Scoping Review and Meta-Analysis
by
Frederika Rentzeperis, Daniel Rivera, Jack Y. Zhang, Cole Brown, Tirone Young, Benjamin Rodriguez, Alexander Schupper, Gabrielle Price, Jack Gomberg, Tyree Williams, Alexandros Bouras and Constantinos Hadjipanayis
Micromachines 2024, 15(5), 559; https://doi.org/10.3390/mi15050559 - 24 Apr 2024
Abstract
Magnetic hyperthermia therapy (MHT) is a promising treatment modality for brain tumors using magnetic nanoparticles (MNPs) locally delivered to the tumor and activated with an external alternating magnetic field (AMF) to generate antitumor effects through localized heating. Magnetic particle imaging (MPI) is an
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Magnetic hyperthermia therapy (MHT) is a promising treatment modality for brain tumors using magnetic nanoparticles (MNPs) locally delivered to the tumor and activated with an external alternating magnetic field (AMF) to generate antitumor effects through localized heating. Magnetic particle imaging (MPI) is an emerging technology offering strong signal-to-noise for nanoparticle localization. A scoping review was performed by systematically querying Pubmed, Scopus, and Embase. In total, 251 articles were returned, 12 included. Articles were analyzed for nanoparticle type used, MHT parameters, and MPI applications. Preliminary results show that MHT is an exciting treatment modality with unique advantages over current heat-based therapies for brain cancer. Effective application relies on the further development of unique magnetic nanoparticle constructs and imaging modalities, such as MPI, that can enable real-time MNP imaging for improved therapeutic outcomes.
Full article
(This article belongs to the Special Issue Magnetic Materials and Devices)
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Open AccessArticle
Hybrid Filtering Compensation Algorithm for Suppressing Random Errors in MEMS Arrays
by
Siyuan Liang, Tianyu Guo, Rongrong Chen and Xuguang Li
Micromachines 2024, 15(5), 558; https://doi.org/10.3390/mi15050558 - 24 Apr 2024
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To solve the high error phenomenon of microelectromechanical systems (MEMS) due to their poor signal-to-noise ratio, this paper proposes an online compensation algorithm wavelet threshold back-propagation neural network (WT-BPNN), based on a neural network and designed to effectively suppress the random error of
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To solve the high error phenomenon of microelectromechanical systems (MEMS) due to their poor signal-to-noise ratio, this paper proposes an online compensation algorithm wavelet threshold back-propagation neural network (WT-BPNN), based on a neural network and designed to effectively suppress the random error of MEMS arrays. The algorithm denoises MEMS and compensates for the error using a back propagation neural network (BPNN). To verify the feasibility of the proposed algorithm, we deployed it in a ZYNQ-based MEMS array hardware. The experimental results showed that the zero-bias instability, angular random wander, and angular velocity random wander of the gyroscope were improved by about 12 dB, 10 dB, and 7 dB, respectively, compared with the original device in static scenarios, and the dispersion of the output data was reduced by about 8 dB in various dynamic environments, which effectively verified the robustness and feasibility of the algorithm.
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Open AccessArticle
A Cross-Process Signal Integrity Analysis (CPSIA) Method and Design Optimization for Wafer-on-Wafer Stacked DRAM
by
Xiping Jiang, Xuerong Jia, Song Wang, Yixin Guo, Fuzhi Guo, Xiaodong Long, Li Geng, Jianguo Yang and Ming Liu
Micromachines 2024, 15(5), 557; https://doi.org/10.3390/mi15050557 - 23 Apr 2024
Abstract
A multi-layer stacked Dynamic Random Access Memory (DRAM) platform is introduced to address the memory wall issue. This platform features high-density vertical interconnects established between DRAM units for high-capacity memory and logic units for computation, utilizing Wafer-on-Wafer (WoW) hybrid bonding and mini Through-Silicon
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A multi-layer stacked Dynamic Random Access Memory (DRAM) platform is introduced to address the memory wall issue. This platform features high-density vertical interconnects established between DRAM units for high-capacity memory and logic units for computation, utilizing Wafer-on-Wafer (WoW) hybrid bonding and mini Through-Silicon Via (TSV) technologies. This 3DIC architecture includes commercial DRAM, logic, and 3DIC manufacturing processes. Their design documents typically come from different foundries, presenting challenges for signal integrity design and analysis. This paper establishes a lumped circuit based on 3DIC physical structure and calculates all values of the lumped elements in the circuit model with the transmission line model. A Cross-Process Signal Integrity Analysis (CPSIA) method is introduced, which integrates three different manufacturing processes by modeling vertical stacking cells and connecting DRAM and logic netlists in one simulation environment. In combination with the dedicated buffer driving method, the CPSIA method is used to analyze 3DIC impacts. Simulation results show that the timing uncertainty introduced by 3DIC crosstalk ranges from 31 ps to 62 ps. This analysis result explains the stable slight variation in the maximum frequency observed in vertically stacked memory arrays from different DRAM layers in the physical testing results, demonstrating the effectiveness of this CPSIA method.
Full article
(This article belongs to the Special Issue Latest Advancements in Semiconductor Materials, Devices, and Systems)
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Open AccessReview
MEMS Switch Realities: Addressing Challenges and Pioneering Solutions
by
Kurmendra and Saurabh Agarwal
Micromachines 2024, 15(5), 556; https://doi.org/10.3390/mi15050556 (registering DOI) - 23 Apr 2024
Abstract
Micro-Electro-Mechanical System (MEMS) switches have emerged as pivotal components in the realm of miniature electronic devices, promising unprecedented advancements in size, power consumption, and versatility. This literature review paper meticulously examines the key issues and challenges encountered in the development and application of
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Micro-Electro-Mechanical System (MEMS) switches have emerged as pivotal components in the realm of miniature electronic devices, promising unprecedented advancements in size, power consumption, and versatility. This literature review paper meticulously examines the key issues and challenges encountered in the development and application of MEMS switches. The comprehensive survey encompasses critical aspects such as material selection, fabrication intricacies, performance metrics including switching time and reliability, and the impact of these switches on diverse technological domains. The review critically analyzes the influence of design parameters, actuation mechanisms, and material properties on the performance of MEMS switches. Additionally, it explores recent advancements, breakthroughs, and innovative solutions proposed by researchers to address these challenges. The synthesis of the existing literature not only elucidates the current state of MEMS switch technology but also paves the way for future research avenues. The findings presented herein serve as a valuable resource for researchers, engineers, and technologists engaged in advancing MEMS switch technology, offering insights into the current landscape and guiding future endeavors in this rapidly evolving field.
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(This article belongs to the Special Issue MEMS/NEMS for Sensing: Array, Integration, Intelligence and Application)
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Open AccessArticle
Rational Design of a Surface Acoustic Wave Device for Wearable Body Temperature Monitoring
by
Yudi Xie, Minglong Deng, Jinkai Chen, Yue Duan, Jikai Zhang, Danyu Mu, Shurong Dong, Jikui Luo, Hao Jin and Shoji Kakio
Micromachines 2024, 15(5), 555; https://doi.org/10.3390/mi15050555 - 23 Apr 2024
Abstract
Continuous monitoring of vital signs based on advanced sensing technologies has attracted extensive attention due to the ravages of COVID-19. A maintenance-free and low-cost passive wireless sensing system based on surface acoustic wave (SAW) device can be used to continuously monitor temperature. However,
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Continuous monitoring of vital signs based on advanced sensing technologies has attracted extensive attention due to the ravages of COVID-19. A maintenance-free and low-cost passive wireless sensing system based on surface acoustic wave (SAW) device can be used to continuously monitor temperature. However, the current SAW-based passive sensing system is mostly designed at a low frequency around 433 MHz, which leads to the relatively large size of SAW devices and antenna, hindering their application in wearable devices. In this paper, SAW devices with a resonant frequency distributed in the 870 MHz to 960 MHz range are rationally designed and fabricated. Based on the finite-element method (FEM) and coupling-of-modes (COM) model, the device parameters, including interdigital transducer (IDT) pairs, aperture size, and reflector pairs, are systematically optimized, and the theoretical and experimental results show high consistency. Finally, SAW temperature sensors with a quality factor greater than 2200 are obtained for real-time temperature monitoring ranging from 20 to 50 °C. Benefitting from the higher operating frequency, the size of the sensing system can be reduced for human body temperature monitoring, showing its potential to be used as a wearable monitoring device in the future.
Full article
(This article belongs to the Special Issue Novel Surface and Bulk Acoustic Wave Devices)
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