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J. Low Power Electron. Appl. 2014, 4(2), 110-118; doi:10.3390/jlpea4020110
Article

Analysis of Threshold Voltage Flexibility in Ultrathin-BOX SOI FinFETs

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Received: 28 February 2014; in revised form: 7 May 2014 / Accepted: 16 May 2014 / Published: 23 May 2014
(This article belongs to the Special Issue Selected Papers from IEEE S3S Conference 2013)
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Abstract: A threshold voltage (Vth) controllable multigate FinFET on a 10-nm-thick ultrathin BOX (UTB) SOI substrate have been investigated. It is revealed that the Vth of the FinFET on the UTB SOI substrate is effectively modulated thanks to the improved coupling between the Si channel and the back gate. We have also carried out analysis of the Vth controllability in terms of the size dependence such as the gate length (LG) and the fin width (TFin).
Keywords: FinFET; SOI; threshold FinFET; SOI; threshold
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Endo, K.; Migita, S.; Ishikawa, Y.; Matsukawa, T.; O'uchi, S.-I.; Tsukada, J.; Mizubayashi, W.; Morita, Y.; Ota, H.; Yamauchi, H.; Masahara, M. Analysis of Threshold Voltage Flexibility in Ultrathin-BOX SOI FinFETs. J. Low Power Electron. Appl. 2014, 4, 110-118.

AMA Style

Endo K, Migita S, Ishikawa Y, Matsukawa T, O'uchi S-I, Tsukada J, Mizubayashi W, Morita Y, Ota H, Yamauchi H, Masahara M. Analysis of Threshold Voltage Flexibility in Ultrathin-BOX SOI FinFETs. Journal of Low Power Electronics and Applications. 2014; 4(2):110-118.

Chicago/Turabian Style

Endo, Kazuhiko; Migita, Shinji; Ishikawa, Yuki; Matsukawa, Takashi; O'uchi, Shin-ichi; Tsukada, Junji; Mizubayashi, Wataru; Morita, Yukinori; Ota, Hiroyuki; Yamauchi, Hitomi; Masahara, Meishoku. 2014. "Analysis of Threshold Voltage Flexibility in Ultrathin-BOX SOI FinFETs." J. Low Power Electron. Appl. 4, no. 2: 110-118.


J. Low Power Electron. Appl. EISSN 2079-9268 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert