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Micromachines 2017, 8(5), 159; doi:10.3390/mi8050159

An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon Microscopy

1
Department of Internal Medicine, University of Michigan, Ann Arbor, MI 48109, USA
2
Department of Biomedical Engineering, University of Michigan, Ann Arbor, MI 48109, USA
3
Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI 48109, USA
*
Author to whom correspondence should be addressed.
Academic Editor: Huikai Xie
Received: 3 April 2017 / Revised: 9 May 2017 / Accepted: 10 May 2017 / Published: 15 May 2017
(This article belongs to the Special Issue MEMS Mirrors)
View Full-Text   |   Download PDF [5794 KB, uploaded 15 May 2017]   |  

Abstract

We present an electrostatic microelectromechanical systems (MEMS) resonant scanner with large out-of-plane translational stroke for fast axial-scanning in a multi-photon microscope system for real-time vertical cross-sectional imaging. The scanner has a compact footprint with dimensions of 2.1 mm × 2.1 mm × 0.44 mm, and employs a novel lever-based compliant mechanism to enable large vertical displacements of a reflective mirror with slight tilt angles. Test results show that by using parametrical resonance, the scanner can provide a fast out-of-plane translational motion with ≥400 μm displacement and ≤0.14° tilt angle over a wide frequency range of ~390 Hz at ambient pressure. By employing this MEMS translational scanner and a biaxial MEMS mirror for lateral scanning, vertical cross-sectional imaging with a beam axial-scanning range of 200 μm and a frame rate of ~5–10 Hz is enabled in a remote scan multi-photon fluorescence imaging system. View Full-Text
Keywords: MEMS scanner; axial scanning; multiphoton microscopy MEMS scanner; axial scanning; multiphoton microscopy
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Li, H.; Duan, X.; Li, G.; Oldham, K.R.; Wang, T.D. An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon Microscopy. Micromachines 2017, 8, 159.

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