Next Article in Journal
Potential of Piezoelectric MEMS Resonators for Grape Must Fermentation Monitoring
Next Article in Special Issue
PZT-Actuated and -Sensed Resonant Micromirrors with Large Scan Angles Applying Mechanical Leverage Amplification for Biaxial Scanning
Previous Article in Journal
Microfluidic and Nanofluidic Resistive Pulse Sensing: A Review
Previous Article in Special Issue
An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon Microscopy
Article Menu
Issue 7 (July) cover image

Export Article

Open AccessArticle
Micromachines 2017, 8(7), 203; doi:10.3390/mi8070203

Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption

1
Micro and Nanotechnology Research Center, Universidad Veracruzana, Calzada Ruiz Cortines 455, Boca del Río, VER 94294, Mexico
2
Depto, Ingeniería Mecánica, Campus Irapuato-Salamanca, Universidad de Guanajuato/Carretera Salamanca-Valle de Santiago Km. 3.5 + 1.8 km, Salamanca, GTO 36885, Mexico
3
Sistemas Automatizados, Centro de Ingeniería y Desarrollo Industrial/Av. Pie de la Cuesta No. 702, Desarrollo San Pablo, Querétaro 76125 México
4
Engineering Faculty, Universidad Veracruzana, Calzada Ruiz Cortines 455, Boca del Río, Veracruz 94294, Mexico
*
Author to whom correspondence should be addressed.
Received: 14 January 2017 / Revised: 19 June 2017 / Accepted: 20 June 2017 / Published: 25 June 2017
(This article belongs to the Special Issue MEMS Mirrors)

Abstract

Endoscopic optical-coherence tomography (OCT) systems require low cost mirrors with small footprint size, out-of-plane deflections and low bias voltage. These requirements can be achieved with electrothermal actuators based on microelectromechanical systems (MEMS). We present the design and modeling of polysilicon electrothermal actuators for a MEMS mirror (100 μm × 100 μm × 2.25 μm). These actuators are composed by two beam types (2.25 μm thickness) with different cross-section area, which are separated by 2 μm gap. The mirror and actuators are designed through the Sandia Ultra-planar Multi-level MEMS Technology V (SUMMiT V®) process, obtaining a small footprint size (1028 μm × 1028 µm) for actuators of 550 µm length. The actuators have out-of-plane displacements caused by low dc voltages and without use material layers with distinct thermal expansion coefficients. The temperature behavior along the actuators is calculated through analytical models that include terms of heat energy generation, heat conduction and heat energy loss. The force method is used to predict the maximum out-of-plane displacements in the actuator tip as function of supplied voltage. Both analytical models, under steady-state conditions, employ the polysilicon resistivity as function of the temperature. The electrothermal-and structural behavior of the actuators is studied considering different beams dimensions (length and width) and dc bias voltages from 0.5 to 2.5 V. For 2.5 V, the actuator of 550 µm length reaches a maximum temperature, displacement and electrical power of 115 °C, 10.3 µm and 6.3 mW, respectively. The designed actuation mechanism can be useful for MEMS mirrors of different sizes with potential application in endoscopic OCT systems that require low power consumption. View Full-Text
Keywords: electrothermal actuators; endoscopic optical-coherence tomography; microelectromechanical systems (MEMS) mirror; polysilicon; SUMMiT V electrothermal actuators; endoscopic optical-coherence tomography; microelectromechanical systems (MEMS) mirror; polysilicon; SUMMiT V
Figures

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Lara-Castro, M.; Herrera-Amaya, A.; Escarola-Rosas, M.A.; Vázquez-Toledo, M.; López-Huerta, F.; Aguilera-Cortés, L.A.; Herrera-May, A.L. Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption. Micromachines 2017, 8, 203.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top