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Journal: Micromachines, 2017
Volume: 8
Number: 159

Article: An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon Microscopy
Authors: by Haijun Li, Xiyu Duan, Gaoming Li, Kenn R. Oldham and Thomas D. Wang
Link: https://www.mdpi.com/2072-666X/8/5/159

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