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Micromachines 2011, 2(3), 356-368; doi:10.3390/mi2030356

Liquid Encapsulation in Parylene Microstructures Using Integrated Annular-Plate Stiction Valves

Department of Biomedical Engineering, University of Southern California, Los Angeles, CA 90089, USA
Author to whom correspondence should be addressed.
Received: 1 August 2011 / Revised: 28 August 2011 / Accepted: 29 August 2011 / Published: 8 September 2011
(This article belongs to the Special Issue Polymer MEMS)
View Full-Text   |   Download PDF [3147 KB, uploaded 8 September 2011]   |  


We report the design, fabrication and characterization of micromachined Parylene structures for self-sealing liquid encapsulation applications. Automatic sealing is enabled through the use of an integrated annular-plate stiction valve which greatly reduces device footprint over in-plane configurations. We achieve automatic wafer-level liquid entrapment without using adhesives or processing at elevated pressures or temperatures. The ability to track changes to the internal liquid volume through the use of electrochemical impedance measurements is also presented.
Keywords: Parylene C; liquid encapsulation; stiction Parylene C; liquid encapsulation; stiction
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Gutierrez, C.A.; Meng, E. Liquid Encapsulation in Parylene Microstructures Using Integrated Annular-Plate Stiction Valves. Micromachines 2011, 2, 356-368.

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