Order Reprints
Journal: Micromachines, 2011
Volume: 2
Page(s): 356-368
Article:
Liquid Encapsulation in Parylene Microstructures Using Integrated Annular-Plate Stiction Valves
Gutierrez, C.A.; Meng, E.
http://www.mdpi.com/2072-666X/2/3/356
