Optical Sensors, Measurements, and Metrology
A special issue of Photonics (ISSN 2304-6732).
Deadline for manuscript submissions: closed (30 June 2023) | Viewed by 7037
Special Issue Editor
Interests: ring laser gyro physics and applications; laser methods and means of displacement measurement; fiber optic gyro physics and applications; precision laser angle measurement systems for metrology; systems of refraction index measurement
Special Issue Information
Dear Colleagues,
This Special Issue focuses on optical sensors, the measurements of various values and parameters that can be made by using these sensors, their metrological characteristics, and the methods of obtaining them. This research, development, calibration, and characterization of optical sensors can be applied in metrology in order to achieve the highest accuracy and, thus, the lowest uncertainty.
Results of research on classical technologies, such as Fizeau interferometers, displacement laser interferometers, and angle measurement interferometers, are welcome, as well as those based on more recent innovative techniques, such as fiber optical sensors, waveguide sensors with a Mach–Zehnder modulator, and waveguide resonator gyros, and that cover the latest developments based on surface profiling, multi-wavelength digital holography, wavefront sensors, laser distance sensors, etc. Papers that focus on overcoming challenges, i.e., those related to grating interferometers used in photolithography scanner position measurement systems to measure the positions of the wafer stages, will also be appreciated.
Prof. Dr. Yuri Filatov
Guest Editor
Manuscript Submission Information
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Keywords
- optical sensor
- accuracy
- uncertainty
- laser interferometer
- waveguide sensors
- fiber optical sensors
- wavefront sensors
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