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Journal: Micromachines, 2016
Volume: 7
Number: 30

Article: CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology
Authors: by Jose Luis Muñoz-Gamarra, Arantxa Uranga and Nuria Barniol
Link: https://www.mdpi.com/2072-666X/7/2/30

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