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Journal: Sensors, 2007
Volume: 7
Page(s): 3071-3083
3071-3083
Article: Three Cavity Tunable MEMS Fabry Perot Interferometer
Parashar, A.; Shah, A.; Packirisamy, M.; Sivakumar, N.

http://www.mdpi.com/1424-8220/7/12/3071

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