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Journal: Sensors, 2010
Volume: 10
Page(s): 4950-4967
4950-4967
Article: Level Set Approach to Anisotropic Wet Etching of Silicon
Radjenović, B.; Radmilović-Radjenović, M.; Mitrić, M.

http://www.mdpi.com/1424-8220/10/5/4950

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