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Review on the Modeling of Electrostatic MEMS
AbstractElectrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.
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Chuang, W.-C.; Lee, H.-L.; Chang, P.-Z.; Hu, Y.-C. Review on the Modeling of Electrostatic MEMS. Sensors 2010, 10, 6149-6171.View more citation formats
Chuang W-C, Lee H-L, Chang P-Z, Hu Y-C. Review on the Modeling of Electrostatic MEMS. Sensors. 2010; 10(6):6149-6171.Chicago/Turabian Style
Chuang, Wan-Chun; Lee, Hsin-Li; Chang, Pei-Zen; Hu, Yuh-Chung. 2010. "Review on the Modeling of Electrostatic MEMS." Sensors 10, no. 6: 6149-6171.