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Review on the Modeling of Electrostatic MEMS
Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan
MicroSystems Technology Center, Industrial Technology Research Institute, Taipei, Taiwan
Department of Mechanical and Electromechanical Engineering, Center of Green Technology, National ILan University, ILan, Taiwan
* Author to whom correspondence should be addressed.
Received: 9 March 2010; in revised form: 18 May 2010 / Accepted: 24 May 2010 / Published: 21 June 2010
Abstract: Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.
Keywords: electrostatics; electromechanics; MEMS; pull-in voltage
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Chuang, W.-C.; Lee, H.-L.; Chang, P.-Z.; Hu, Y.-C. Review on the Modeling of Electrostatic MEMS. Sensors 2010, 10, 6149-6171.
Chuang W-C, Lee H-L, Chang P-Z, Hu Y-C. Review on the Modeling of Electrostatic MEMS. Sensors. 2010; 10(6):6149-6171.
Chuang, Wan-Chun; Lee, Hsin-Li; Chang, Pei-Zen; Hu, Yuh-Chung. 2010. "Review on the Modeling of Electrostatic MEMS." Sensors 10, no. 6: 6149-6171.