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Sensors 2010, 10(6), 6149-6171; doi:10.3390/s100606149

Review on the Modeling of Electrostatic MEMS

Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan
MicroSystems Technology Center, Industrial Technology Research Institute, Taipei, Taiwan
Department of Mechanical and Electromechanical Engineering, Center of Green Technology, National ILan University, ILan, Taiwan
Author to whom correspondence should be addressed.
Received: 9 March 2010 / Revised: 18 May 2010 / Accepted: 24 May 2010 / Published: 21 June 2010
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering - 2009)
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Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices. View Full-Text
Keywords: electrostatics; electromechanics; MEMS; pull-in voltage electrostatics; electromechanics; MEMS; pull-in voltage
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Chuang, W.-C.; Lee, H.-L.; Chang, P.-Z.; Hu, Y.-C. Review on the Modeling of Electrostatic MEMS. Sensors 2010, 10, 6149-6171.

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