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Sensors 2010, 10(6), 6149-6171; doi:10.3390/s100606149
Review

Review on the Modeling of Electrostatic MEMS

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Received: 9 March 2010 / Revised: 18 May 2010 / Accepted: 24 May 2010 / Published: 21 June 2010
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Abstract

Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.
Keywords: electrostatics; electromechanics; MEMS; pull-in voltage electrostatics; electromechanics; MEMS; pull-in voltage
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Chuang, W.-C.; Lee, H.-L.; Chang, P.-Z.; Hu, Y.-C. Review on the Modeling of Electrostatic MEMS. Sensors 2010, 10, 6149-6171.

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