Next Article in Journal
SirT1—A Sensor for Monitoring Self-Renewal and Aging Process in Retinal Stem Cells
Previous Article in Journal
An Emergency-Adaptive Routing Scheme for Wireless Sensor Networks for Building Fire Hazard Monitoring
Previous Article in Special Issue
Level Set Approach to Anisotropic Wet Etching of Silicon
Sensors 2010, 10(6), 6149-6171; doi:10.3390/s100606149
Review

Review on the Modeling of Electrostatic MEMS

1
, 2
, 1
 and 3,*
Received: 9 March 2010; in revised form: 18 May 2010 / Accepted: 24 May 2010 / Published: 21 June 2010
View Full-Text   |   Download PDF [660 KB, uploaded 21 June 2014]   |   Browse Figures
Abstract: Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.
Keywords: electrostatics; electromechanics; MEMS; pull-in voltage electrostatics; electromechanics; MEMS; pull-in voltage
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Export to BibTeX |
EndNote


MDPI and ACS Style

Chuang, W.-C.; Lee, H.-L.; Chang, P.-Z.; Hu, Y.-C. Review on the Modeling of Electrostatic MEMS. Sensors 2010, 10, 6149-6171.

AMA Style

Chuang W-C, Lee H-L, Chang P-Z, Hu Y-C. Review on the Modeling of Electrostatic MEMS. Sensors. 2010; 10(6):6149-6171.

Chicago/Turabian Style

Chuang, Wan-Chun; Lee, Hsin-Li; Chang, Pei-Zen; Hu, Yuh-Chung. 2010. "Review on the Modeling of Electrostatic MEMS." Sensors 10, no. 6: 6149-6171.


Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert