Sensors 2010, 10(6), 6149-6171; doi:10.3390/s100606149

Review on the Modeling of Electrostatic MEMS

1email, 2email, 1email and 3,* email
Received: 9 March 2010; in revised form: 18 May 2010 / Accepted: 24 May 2010 / Published: 21 June 2010
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.
Keywords: electrostatics; electromechanics; MEMS; pull-in voltage
PDF Full-text Download PDF Full-Text [660 KB, uploaded 21 June 2014 03:03 CEST]

Export to BibTeX |

MDPI and ACS Style

Chuang, W.-C.; Lee, H.-L.; Chang, P.-Z.; Hu, Y.-C. Review on the Modeling of Electrostatic MEMS. Sensors 2010, 10, 6149-6171.

AMA Style

Chuang W-C, Lee H-L, Chang P-Z, Hu Y-C. Review on the Modeling of Electrostatic MEMS. Sensors. 2010; 10(6):6149-6171.

Chicago/Turabian Style

Chuang, Wan-Chun; Lee, Hsin-Li; Chang, Pei-Zen; Hu, Yuh-Chung. 2010. "Review on the Modeling of Electrostatic MEMS." Sensors 10, no. 6: 6149-6171.

Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert