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Sensors 2010, 10(6), 6149-6171; doi:10.3390/s100606149

Review on the Modeling of Electrostatic MEMS

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 and 3,*
Received: 9 March 2010 / Revised: 18 May 2010 / Accepted: 24 May 2010 / Published: 21 June 2010
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Abstract: Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.
Keywords: electrostatics; electromechanics; MEMS; pull-in voltage electrostatics; electromechanics; MEMS; pull-in voltage
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Chuang, W.-C.; Lee, H.-L.; Chang, P.-Z.; Hu, Y.-C. Review on the Modeling of Electrostatic MEMS. Sensors 2010, 10, 6149-6171.

AMA Style

Chuang W-C, Lee H-L, Chang P-Z, Hu Y-C. Review on the Modeling of Electrostatic MEMS. Sensors. 2010; 10(6):6149-6171.

Chicago/Turabian Style

Chuang, Wan-Chun; Lee, Hsin-Li; Chang, Pei-Zen; Hu, Yuh-Chung. 2010. "Review on the Modeling of Electrostatic MEMS." Sensors 10, no. 6: 6149-6171.

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