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Level Set Approach to Anisotropic Wet Etching of Silicon
Institute of Physics, Pregrevica 118, 11080 Beograd, Serbia
Vinča Institute of Nuclear Sciences, P.O. Box 522, 11001 Beograd, Serbia
* Author to whom correspondence should be addressed.
Received: 31 December 2009; in revised form: 8 April 2010 / Accepted: 13 April 2010 / Published: 17 May 2010
Abstract: In this paper a methodology for the three dimensional (3D) modeling and simulation of the profile evolution during anisotropic wet etching of silicon based on the level set method is presented. Etching rate anisotropy in silicon is modeled taking into account full silicon symmetry properties, by means of the interpolation technique using experimentally obtained values for the etching rates along thirteen principal and high index directions in KOH solutions. The resulting level set equations are solved using an open source implementation of the sparse field method (ITK library, developed in medical image processing community), extended for the case of non-convex Hamiltonians. Simulation results for some interesting initial 3D shapes, as well as some more practical examples illustrating anisotropic etching simulation in the presence of masks (simple square aperture mask, convex corner undercutting and convex corner compensation, formation of suspended structures) are shown also. The obtained results show that level set method can be used as an effective tool for wet etching process modeling, and that is a viable alternative to the Cellular Automata method which now prevails in the simulations of the wet etching process.
Keywords: etching; level set; profile evolution; simulation
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Radjenović, B.; Radmilović-Radjenović, M.; Mitrić, M. Level Set Approach to Anisotropic Wet Etching of Silicon. Sensors 2010, 10, 4950-4967.
Radjenović B, Radmilović-Radjenović M, Mitrić M. Level Set Approach to Anisotropic Wet Etching of Silicon. Sensors. 2010; 10(5):4950-4967.
Radjenović, Branislav; Radmilović-Radjenović, Marija; Mitrić, Miodrag. 2010. "Level Set Approach to Anisotropic Wet Etching of Silicon." Sensors 10, no. 5: 4950-4967.