17 pages, 31229 KB  
Review
Functional Metallic Microcomponents via Liquid-Phase Multiphoton Direct Laser Writing: A Review
by Erik Hagen Waller, Stefan Dix, Jonas Gutsche, Artur Widera and Georg von Freymann
Micromachines 2019, 10(12), 827; https://doi.org/10.3390/mi10120827 - 28 Nov 2019
Cited by 26 | Viewed by 6109
Abstract
We present an overview of functional metallic microstructures fabricated via direct laser writing out of the liquid phase. Metallic microstructures often are key components in diverse applications such as, e.g., microelectromechanical systems (MEMS). Since the metallic component’s functionality mostly depends on other components, [...] Read more.
We present an overview of functional metallic microstructures fabricated via direct laser writing out of the liquid phase. Metallic microstructures often are key components in diverse applications such as, e.g., microelectromechanical systems (MEMS). Since the metallic component’s functionality mostly depends on other components, a technology that enables on-chip fabrication of these metal structures is highly desirable. Direct laser writing via multiphoton absorption is such a fabrication method. In the past, it has mostly been used to fabricate multidimensional polymeric structures. However, during the last few years different groups have put effort into the development of novel photosensitive materials that enable fabrication of metallic—especially gold and silver—microstructures. The results of these efforts are summarized in this review and show that direct laser fabrication of metallic microstructures has reached the level of applicability. Full article
(This article belongs to the Special Issue Multi-Dimensional Direct-Write Nanofabrication )
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14 pages, 2206 KB  
Article
A Comparison of Methods to Measure the Coupling Coefficient of Electromagnetic Vibration Energy Harvesters
by Mario Mösch and Gerhard Fischerauer
Micromachines 2019, 10(12), 826; https://doi.org/10.3390/mi10120826 - 28 Nov 2019
Cited by 21 | Viewed by 4864
Abstract
Vibration energy harvesters transform environmental vibration energy into usable electrical energy. The transformation is only possible because of a coupling between the mechanical part of the energy harvester and the electric circuit. This paper compares several measurement methods to determine the electromagnetic coupling [...] Read more.
Vibration energy harvesters transform environmental vibration energy into usable electrical energy. The transformation is only possible because of a coupling between the mechanical part of the energy harvester and the electric circuit. This paper compares several measurement methods to determine the electromagnetic coupling coefficient. These methods are applied to various implementations of an energy harvester and the results are compared with one another and with simulation data by analyzing the magnetic flux. The average deviation between the measurement methods and the simulation data in our study was 5%. This good agreement validates the methods. Based on this, we recommend determination of the coupling coefficient and the optimum load resistance for maximum power harvesting on the basis of simulations and the open circuit method, because this procedure leads to the shortest measurement times. Full article
(This article belongs to the Section A:Physics)
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39 pages, 2393 KB  
Review
3D-Printed Lab-on-a-Chip Diagnostic Systems-Developing a Safe-by-Design Manufacturing Approach
by Panagiotis Karayannis, Fotini Petrakli, Anastasia Gkika and Elias P. Koumoulos
Micromachines 2019, 10(12), 825; https://doi.org/10.3390/mi10120825 - 28 Nov 2019
Cited by 25 | Viewed by 7787
Abstract
The aim of this study is to provide a detailed strategy for Safe-by-Design (SbD) 3D-printed lab-on-a-chip (LOC) device manufacturing, using Fused Filament Fabrication (FFF) technology. First, the applicability of FFF in lab-on-a-chip device development is briefly discussed. Subsequently, a methodology to categorize, identify [...] Read more.
The aim of this study is to provide a detailed strategy for Safe-by-Design (SbD) 3D-printed lab-on-a-chip (LOC) device manufacturing, using Fused Filament Fabrication (FFF) technology. First, the applicability of FFF in lab-on-a-chip device development is briefly discussed. Subsequently, a methodology to categorize, identify and implement SbD measures for FFF is suggested. Furthermore, the most crucial health risks involved in FFF processes are examined, placing the focus on the examination of ultrafine particle (UFP) and Volatile Organic Compound (VOC) emission hazards. Thus, a SbD scheme for lab-on-a-chip manufacturing is provided, while also taking into account process optimization for obtaining satisfactory printed LOC quality. This work can serve as a guideline for the effective application of FFF technology for lab-on-a-chip manufacturing through the safest applicable way, towards a continuous effort to support sustainable development of lab-on-a-chip devices through cost-effective means. Full article
(This article belongs to the Special Issue 3D Printed Microfluidic Devices and Its Applications)
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14 pages, 5289 KB  
Article
Numerical Analysis and Experimental Study on Fabrication of High Aspect Ratio Tapered Ultrafine Holes by Over-Growth Electroforming Process
by Yunyan Zhang, Pingmei Ming, Runqing Li, Ge Qin, Xinmin Zhang, Liang Yan, Xinchao Li and Xingshuai Zheng
Micromachines 2019, 10(12), 824; https://doi.org/10.3390/mi10120824 - 27 Nov 2019
Cited by 4 | Viewed by 3142
Abstract
High aspect ratio (HAR) ultrafine tapered holes (diameter ≤5 μm; AR ≥5) are the most important elements for some high-tech perforated metallic products, but they are very difficult to manufacture. Therefore, this paper proposes a nontraditional over-growth electroforming process. The formation mechanism of [...] Read more.
High aspect ratio (HAR) ultrafine tapered holes (diameter ≤5 μm; AR ≥5) are the most important elements for some high-tech perforated metallic products, but they are very difficult to manufacture. Therefore, this paper proposes a nontraditional over-growth electroforming process. The formation mechanism of the HAR ultrafine tapered holes is investigated, and the factors controlling the geometric shape evolution are analyzed numerically. It was found that the geometric shape and dimensions of the holes are highly dependent on the diameter and thickness of the photoresist film patterns, but are hardly affected by the spacing between two neighboring patterns; the achievable diameter for a given hole depth becomes small with the increasing pattern diameter, but it becomes big with the increasing pattern thickness. These correlations can be well interpreted by the established two empirical equations that characterize the relationship between the minimum orifice of the tapered hole and the structural parameters of the photoresist film patterns previously formed on the substrate. Application of the fabricated 1500 tapered holes with 3-μm diameter and 17-AR as the nozzles of the medical precision nebulizer is also examined. The studies show that the over-growth electroforming process is highly applicable in fabricating the perforated metallic plate with HAR ultrafine tapered holes. Full article
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17 pages, 8146 KB  
Article
MEMS Gyroscope Bias Drift Self-Calibration Based on Noise-Suppressed Mode Reversal
by Haoyu Gu, Baolin Zhao, Hao Zhou, Xianxue Liu and Wei Su
Micromachines 2019, 10(12), 823; https://doi.org/10.3390/mi10120823 - 27 Nov 2019
Cited by 5 | Viewed by 4553
Abstract
This paper presents a bias drift self-calibration method for micro-electromechanical systems (MEMS) gyroscopes based on noise-suppressed mode reversal without the modeling of bias drift signal. At first, the bias drift cancellation is accomplished by periodic switching between operation mode of two collinear gyroscopes [...] Read more.
This paper presents a bias drift self-calibration method for micro-electromechanical systems (MEMS) gyroscopes based on noise-suppressed mode reversal without the modeling of bias drift signal. At first, the bias drift cancellation is accomplished by periodic switching between operation mode of two collinear gyroscopes and subtracting the bias error which is estimated by the rate outputs from a consecutive period interval; then a novel filtering algorithm based on improved complete ensemble empirical mode decomposition (improved complete ensemble empirical mode decomposition with adaptive noise—CEEMDAN) is applied to eliminate the noise in the calibrated signal. A set of intrinsic mode functions (IMFs) is obtained by the decomposition of the calibrated signal using improved CEEMDAN method, and the threshold denoising method is utilized; finally, the de-noised IMFs are reconstructed into the desired signal. To verify the proposed method, the hardware circuit with an embedded field-programmable gate array (FPGA) was implemented and applied in bias drift calibration for the two MEMS gyroscopes manufactured in our laboratory. The experimental results indicate that the proposed method is feasible, and it achieved a better performance than the typical mode reversal. The bias instability of the two gyroscopes decreased from 0.0066 ° / s and 0.0055 ° / s to 0.0011 ° / s ; and, benefiting from the threshold denoising based on improved CEEMDAN, the angle random walks decreased from 1.18 × 10 4 ° / s 1 / 2 and 2.04 × 10 4 ° / s 1 / 2 to 2.19 × 10 5 ° / s 1 / 2 , respectively. Full article
(This article belongs to the Section A:Physics)
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15 pages, 3832 KB  
Article
Effects of Bridge-Shaped Microchannel Geometry on the Performance of a Micro Laminar Flow Fuel Cell
by Muhammad Tanveer and Kwang-Yong Kim
Micromachines 2019, 10(12), 822; https://doi.org/10.3390/mi10120822 - 27 Nov 2019
Cited by 13 | Viewed by 3604
Abstract
A laminar flow micro fuel cell comprising of bridge-shaped microchannel is investigated to find out the effects of the cross-section shape of the microchannel on the performance. A parametric study is performed by varying the heights and widths of the channel and bridge [...] Read more.
A laminar flow micro fuel cell comprising of bridge-shaped microchannel is investigated to find out the effects of the cross-section shape of the microchannel on the performance. A parametric study is performed by varying the heights and widths of the channel and bridge shape. Nine different microchannel cross-section shapes are evaluated to find effective microchannel cross-sections by combining three bridge shapes with three channel shapes. A three-dimensional fully coupled numerical model is used to calculate the fuel cell’s performance. Navier-Stokes, convection and diffusion, and Butler-Volmer equations are implemented using the numerical model. A narrow channel with a wide bridge shape shows the best performance among the tested nine cross-sectional shapes, which is increased by about 78% compared to the square channel with the square bridge shape. Full article
(This article belongs to the Special Issue Optimization of Microfluidic Devices)
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19 pages, 2376 KB  
Review
Surface/Interface Engineering for Constructing Advanced Nanostructured Light-Emitting Diodes with Improved Performance: A Brief Review
by Lianzhen Cao, Xia Liu, Zhen Guo and Lianqun Zhou
Micromachines 2019, 10(12), 821; https://doi.org/10.3390/mi10120821 - 27 Nov 2019
Cited by 8 | Viewed by 3892
Abstract
With the rise of nanoscience and nanotechnologies, especially the continuous deepening of research on low-dimensional materials and structures, various kinds of light-emitting devices based on nanometer-structured materials are gradually becoming the natural candidates for the next generation of advanced optoelectronic devices with improved [...] Read more.
With the rise of nanoscience and nanotechnologies, especially the continuous deepening of research on low-dimensional materials and structures, various kinds of light-emitting devices based on nanometer-structured materials are gradually becoming the natural candidates for the next generation of advanced optoelectronic devices with improved performance through engineering their interface/surface properties. As dimensions of light-emitting devices are scaled down to the nanoscale, the plentitude of their surface/interface properties is one of the key factors for their dominating device performance. In this paper, firstly, the generation, classification, and influence of surface/interface states on nanometer optical devices will be given theoretically. Secondly, the relationship between the surface/interface properties and light-emitting diode device performance will be investigated, and the related physical mechanisms will be revealed by introducing classic examples. Especially, how to improve the performance of light-emitting diodes by using factors such as the surface/interface purification, quantum dots (QDs)-emitting layer, surface ligands, optimization of device architecture, and so on will be summarized. Finally, we explore the main influencing actors of research breakthroughs related to the surface/interface properties on the current and future applications for nanostructured light-emitting devices. Full article
(This article belongs to the Special Issue Nanostructured Light-Emitters)
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17 pages, 4568 KB  
Article
Characterization of a Fiber Bundle-Based Real-Time Ultrasound/Photoacoustic Imaging System and Its In Vivo Functional Imaging Applications
by He Leng, Yuhling Wang, De-Fu Jhang, Tsung-Sheng Chu, Chia-Hui Tsao, Chia-Hua Tsai, Steven Giamundo, You-Yin Chen, Kuang-Wen Liao, Chiung-Cheng Chuang, Tzong-Rong Ger, Li-Tzong Chen and Lun-De Liao
Micromachines 2019, 10(12), 820; https://doi.org/10.3390/mi10120820 - 27 Nov 2019
Cited by 16 | Viewed by 4288
Abstract
Photoacoustic (PA) imaging is an attractive technology for imaging biological tissues because it can capture both functional and structural information with satisfactory spatial resolution. Current commercially available PA imaging systems are limited by their bulky size or inflexible user interface. We present a [...] Read more.
Photoacoustic (PA) imaging is an attractive technology for imaging biological tissues because it can capture both functional and structural information with satisfactory spatial resolution. Current commercially available PA imaging systems are limited by their bulky size or inflexible user interface. We present a new handheld real-time ultrasound/photoacoustic imaging system (HARP) consisting of a detachable, high-numerical-aperture (NA) fiber bundle-based illumination system integrated with an array-based ultrasound (US) transducer and a data acquisition platform. In this system, different PA probes can be used for different imaging applications by switching the transducers and the corresponding jackets to combine the fiber pads and transducer into a single probe. The intuitive user interface is a completely programmable MATLAB-based platform. In vitro phantom experiments were conducted to test the imaging performance of the developed PA system. Furthermore, we demonstrated (1) in vivo brain vasculature imaging, (2) in vivo imaging of real-time stimulus-evoked cortical hemodynamic changes during forepaw electrical stimulation, and (3) in vivo imaging of real-time cerebral pharmacokinetics in rats using the developed PA system. The overall purpose of this design concept for a customizable US/PA imaging system is to help overcome the diverse challenges faced by medical researchers performing both preclinical and clinical PA studies. Full article
(This article belongs to the Special Issue Nanostructures for Bioimaging)
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11 pages, 3589 KB  
Article
Effect of ZnO Nanoparticles Coating Layers on Top of ZnO Nanowires for Morphological, Optical, and Photovoltaic Properties of Dye-Sensitized Solar Cells
by Muhammad Saleem, W. A. Farooq, M. I. Khan, Majid. Niaz. Akhtar, Saif Ur Rehman, Naseeb Ahmad, Muhammad Khalid, M. Atif, Mona A. AlMutairi and Muhammad Irfan
Micromachines 2019, 10(12), 819; https://doi.org/10.3390/mi10120819 - 26 Nov 2019
Cited by 12 | Viewed by 3015
Abstract
This paper reports on the synthesis of ZnO nanowires (NWs), as well asthe compound nanostructures of nanoparticles (NPs) and nanowires (NWs+NPs) with different coating layers of NPs on the top of NWs and their integration in dye-sensitized solar cells (DSSCs). In compound nanostructures, [...] Read more.
This paper reports on the synthesis of ZnO nanowires (NWs), as well asthe compound nanostructures of nanoparticles (NPs) and nanowires (NWs+NPs) with different coating layers of NPs on the top of NWs and their integration in dye-sensitized solar cells (DSSCs). In compound nanostructures, NWs offer direct electrical pathways for fast electron transfer, and the NPs of ZnOdispread and fill the interstices between the NWs of ZnO, offering a huge surface area for enough dye anchoring and promoting light harvesting. A significant photocurrent density of 2.64 mA/cm2 and energy conversion efficiency of 1.43% was obtained with NWs-based DSSCs. The total solar-to-electric energy conversion efficiency of the NWs+a single layer of NPs was found to be 2.28%, with a short-circuit photocurrent density (JSC) of 3.02 mA/cm2, open-circuit voltage (VOC) of 0.74 V, and a fill factor (FF) of 0.76, which is 60% higher than that of NWs cells and over 165% higher than NWs+a triple layer of NPs-based DSSCs. The improved performance was obtained due to the increased specific surface area for higher dye anchoring and light harvesting of compound nanostructures with NWs+a single layer of NPs. Full article
(This article belongs to the Special Issue Nanostructured Photovoltaic Devices)
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42 pages, 17294 KB  
Review
Recent Advances in MEMS-Based Microthrusters
by Bendong Liu, Xinrui Li, Jiahui Yang and Guohua Gao
Micromachines 2019, 10(12), 818; https://doi.org/10.3390/mi10120818 - 26 Nov 2019
Cited by 21 | Viewed by 8334
Abstract
With the development of micro/nano satellites and formation flying, more advanced spatial propulsion technology is required. In this paper, a review of microthrusters developments that based on micro electromechanical systems (MEMS) technology adopted in microthrusters is summarized. The microthrusters in previous research are [...] Read more.
With the development of micro/nano satellites and formation flying, more advanced spatial propulsion technology is required. In this paper, a review of microthrusters developments that based on micro electromechanical systems (MEMS) technology adopted in microthrusters is summarized. The microthrusters in previous research are classified and summarized according to the types of propellants and the working principles they utilized. The structure and the performance including the thrust, the impulse and the specific impulse of various microthrusters are compared. In addition, the advantages and the disadvantages of these microthrusters presented in the paper are discussed. Full article
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14 pages, 2774 KB  
Article
Sheathless Shape-Based Separation of Candida Albicans Using a Viscoelastic Non-Newtonian Fluid
by Jeonghun Nam, Hyunseul Jee, Woong Sik Jang, Jung Yoon, Borae G. Park, Seong Jae Lee and Chae Seung Lim
Micromachines 2019, 10(12), 817; https://doi.org/10.3390/mi10120817 - 26 Nov 2019
Cited by 22 | Viewed by 3744
Abstract
Rapid and accurate identification of Candida albicans from among other candida species is critical for cost-effective treatment and antifungal drug assays. Shape is a critical biomarker indicating cell type, cell cycle, and environmental conditions; however, most microfluidic techniques have been focused only on [...] Read more.
Rapid and accurate identification of Candida albicans from among other candida species is critical for cost-effective treatment and antifungal drug assays. Shape is a critical biomarker indicating cell type, cell cycle, and environmental conditions; however, most microfluidic techniques have been focused only on size-based particle/cell manipulation. This study demonstrates a sheathless shape-based separation of particles/cells using a viscoelastic non-Newtonian fluid. The size of C. albicans was measured at 37 °C depending on the incubation time (0 h, 1 h, and 2 h). The effects of flow rates on the flow patterns of candida cells with different shapes were examined. Finally, 2-h-incubated candida cells with germ tube formations (≥26 μm) were separated from spherical candida cells and shorter candida cells with a separation efficiency of 80.9% and a purity of 91.2% at 50 μL/min. Full article
(This article belongs to the Special Issue Microfluidics for Soft Matter and Mechanobiology, Volume I)
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10 pages, 4744 KB  
Article
Biomimetic Anti-Adhesive Surface Microstructures on Electrosurgical Blade Fabricated by Long-Pulse Laser Inspired by Pangolin Scales
by Chen Li, Yong Yang, Lijun Yang and Zhen Shi
Micromachines 2019, 10(12), 816; https://doi.org/10.3390/mi10120816 - 26 Nov 2019
Cited by 36 | Viewed by 4697
Abstract
The electrosurgical blade is the most common invasive surgical instrument in a cutting and hemostasis process; however, the blade easily leads to the adhesion of overheated soft tissues on the blades and induces a potential danger for the patients. To minimize the adhesive [...] Read more.
The electrosurgical blade is the most common invasive surgical instrument in a cutting and hemostasis process; however, the blade easily leads to the adhesion of overheated soft tissues on the blades and induces a potential danger for the patients. To minimize the adhesive tissues, we proposed the one-step surface texturing method to fabricate anti-adhesive biomimetic scales on stainless steel 316L rapidly based on the self-organized surface microstructures induced by the long-pulse fiber laser, which was inspired by the excellent performances of anti-adhesion and anti-friction in the pangolin scales. The optimal formation parameters, chemical components, and crystal structures of the laser-induced self-organized surface microstructures were investigated in the experiments. Moreover, the underlying formation mechanism was revealed. The electrosurgical blades with biomimetic scales have hydrophobicity and a smaller frictional coefficient, which effectively reduced the adhesion of soft tissue. Full article
(This article belongs to the Special Issue Laser Micromachining and Microfabrication)
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9 pages, 2876 KB  
Article
Simulation Study of 4H-SiC Trench Insulated Gate Bipolar Transistor with Low Turn-Off Loss
by Hong-kai Mao, Ying Wang, Xue Wu and Fang-wen Su
Micromachines 2019, 10(12), 815; https://doi.org/10.3390/mi10120815 - 26 Nov 2019
Cited by 7 | Viewed by 4380
Abstract
In this work, an insulated gate bipolar transistor (IGBT) is proposed that introduces a portion of the p-polySi/p-SiC heterojunction on the collector side to reduce the tail current during device turn-offs. By adjusting the doping concentration on both sides of the heterojunction, the [...] Read more.
In this work, an insulated gate bipolar transistor (IGBT) is proposed that introduces a portion of the p-polySi/p-SiC heterojunction on the collector side to reduce the tail current during device turn-offs. By adjusting the doping concentration on both sides of the heterojunction, the turn-off loss is further reduced without sacrificing other characteristics of the device. The electrical characteristics of the device were simulated through the Silvaco ATLAS 2D simulation tool and compared with the traditional structure to verify the design idea. The simulation results show that, compared with the traditional structure, the turn-off loss of the proposed structure was reduced by 58.4%, the breakdown voltage increased by 13.3%, and the forward characteristics sacrificed 8.3%. Full article
(This article belongs to the Special Issue Wide Bandgap Based Devices: Design, Fabrication and Applications)
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25 pages, 4507 KB  
Review
Advanced Polymers for Three-Dimensional (3D) Organ Bioprinting
by Xiaohong Wang
Micromachines 2019, 10(12), 814; https://doi.org/10.3390/mi10120814 - 25 Nov 2019
Cited by 66 | Viewed by 9168
Abstract
Three-dimensional (3D) organ bioprinting is an attractive scientific area with huge commercial profit, which could solve all the serious bottleneck problems for allograft transplantation, high-throughput drug screening, and pathological analysis. Integrating multiple heterogeneous adult cell types and/or stem cells along with other biomaterials [...] Read more.
Three-dimensional (3D) organ bioprinting is an attractive scientific area with huge commercial profit, which could solve all the serious bottleneck problems for allograft transplantation, high-throughput drug screening, and pathological analysis. Integrating multiple heterogeneous adult cell types and/or stem cells along with other biomaterials (e.g., polymers, bioactive agents, or biomolecules) to make 3D constructs functional is one of the core issues for 3D bioprinting of bioartificial organs. Both natural and synthetic polymers play essential and ubiquitous roles for hierarchical vascular and neural network formation in 3D printed constructs based on their specific physical, chemical, biological, and physiological properties. In this article, several advanced polymers with excellent biocompatibility, biodegradability, 3D printability, and structural stability are reviewed. The challenges and perspectives of polymers for rapid manufacturing of complex organs, such as the liver, heart, kidney, lung, breast, and brain, are outlined. Full article
(This article belongs to the Special Issue 3D Printing for Tissue Engineering and Regenerative Medicine)
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17 pages, 8568 KB  
Article
A Tuning Fork Gyroscope with a Polygon-Shaped Vibration Beam
by Qiang Xu, Zhanqiang Hou, Yunbin Kuang, Tongqiao Miao, Fenlan Ou, Ming Zhuo, Dingbang Xiao and Xuezhong Wu
Micromachines 2019, 10(12), 813; https://doi.org/10.3390/mi10120813 - 25 Nov 2019
Cited by 16 | Viewed by 5066
Abstract
In this paper, a tuning fork gyroscope with a polygon-shaped vibration beam is proposed. The vibration structure of the gyroscope consists of a polygon-shaped vibration beam, two supporting beams, and four vibration masts. The spindle azimuth of the vibration beam is critical for [...] Read more.
In this paper, a tuning fork gyroscope with a polygon-shaped vibration beam is proposed. The vibration structure of the gyroscope consists of a polygon-shaped vibration beam, two supporting beams, and four vibration masts. The spindle azimuth of the vibration beam is critical for performance improvement. As the spindle azimuth increases, the proposed vibration structure generates more driving amplitude and reduces the initial capacitance gap, so as to improve the signal-to-noise ratio (SNR) of the gyroscope. However, after taking the driving amplitude and the driving voltage into consideration comprehensively, the optimized spindle azimuth of the vibration beam is designed in an appropriate range. Then, both wet etching and dry etching processes are applied to its manufacture. After that, the fabricated gyroscope is packaged in a vacuum ceramic tube after bonding. Combining automatic gain control and weak capacitance detection technology, the closed-loop control circuit of the drive mode is implemented, and high precision output circuit is achieved for the gyroscope. Finally, the proposed Micro Electro Mechanical Systems (MEMS) gyroscope system demonstrates a bias instability of 0.589°/h, an angular random walk (ARW) of 0.038°/√h, and a bandwidth of greater than 100 Hz in a full scale range of ± 200°/s at room temperature. Full article
(This article belongs to the Special Issue MEMS/NEMS Sensors: Fabrication and Application, Volume II)
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