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Electrostatic Sensors and Actuators
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Electrostatic Sensors and Actuators

A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".

Deadline for manuscript submissions: closed (30 June 2021) | Viewed by 16979

Special Issue Editors

Dr. Rasim Guldiken

E-Mail Website
Guest Editor
Mechanical Engineering Department, University of South Florida, 4202 E Fowler Ave. ENG030, Tampa, FL 33629, USA
Interests: sensors and actuators; microfluidics; ultrasonics; engineering education
Special Issues, Collections and Topics in MDPI journals
Dr. John Cotter

E-Mail
Guest Editor
4202 E Fowler Ave. ENG030, 33629 Tampa, FL, USA
Interests: electrostatic formation; microfluidics; emulsions

Special Issue Information

Dear Colleagues,

Electrostatic sensors and actuators are commonplace in MEMS devices due to their simplicity, fast response, low power/energy densities, and their integration capability with CMOS electronics. Even though electrostatics has been employed for a few decades, there have been recent advancements that deserve higher visibility at both the academic and end-user levels.

Therefore, we invite the academic community and relevant industrial partners to submit both review and original research articles to this Special Issue, with an emphasis on the following:

  • Self-powered electrostatic MEMS sensors and actuators
  • Repulsive force electrostatic actuators
  • Restricted (e.g., dimpled) electrostatic actuators
  • Electrostatic levitation-based sensors and actuators
  • Electrostatic microfluidic sensors and actuators
  • Electrostatic formation
  • Electrostatic MEMS modeling
  • Electrostatic fringe field resonators
  • Post-touchdown electrostatic modeling and behavior
  • Novel materials in electrostatic MEMS actuators and sensors
  • Material selection for electrostatic MEMS actuators and sensors
  • Electrostatic MEMS actuators utilizing novel electrode shapes and sizes for improved motion
  • Electrostatic MEMS flapping actuators
  • Piezoelectric and capacitive micromachined ultrasonic sensors and transducers
  • Electrostatic micropumping
  • Miscellaneous topics on electrostatic sensors and transducers
Prof. Dr. Rasim Guldiken
Dr. John Cotter
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Sensors is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • Electrostatic sensors and actuators
  • Electrostatic modeling
  • MEMS
  • Electrostatic microfluidics

Published Papers (3 papers)

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Research

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15 pages, 8004 KiB  
Article
Calibration Analysis of High-G MEMS Accelerometer Sensor Based on Wavelet and Wavelet Packet Denoising
by Yunbo Shi, Juanjuan Zhang, Jingjing Jiao, Rui Zhao and Huiliang Cao
Sensors 2021, 21(4), 1231; https://doi.org/10.3390/s21041231 - 9 Feb 2021
Cited by 29 | Viewed by 3214
Abstract
High-G accelerometers are mainly used for motion measurement in some special fields, such as projectile penetration and aerospace equipment. This paper mainly explores the wavelet threshold denoising and wavelet packet threshold denoising in wavelet analysis, which is more suitable for high-G piezoresistive accelerometers. [...] Read more.
High-G accelerometers are mainly used for motion measurement in some special fields, such as projectile penetration and aerospace equipment. This paper mainly explores the wavelet threshold denoising and wavelet packet threshold denoising in wavelet analysis, which is more suitable for high-G piezoresistive accelerometers. In this paper, adaptive decomposition and Shannon entropy criterion are used to find the optimal decomposition layer and optimal tree. Both methods use the Stein unbiased likelihood estimation method for soft threshold denoising. Through numerical simulation and Machete hammer test, the wavelet threshold denoising is more suitable for the dynamic calibration of a high-G accelerometer. The wavelet packet threshold denoising is more suitable for the parameter extraction of the oscillation phase. Full article
(This article belongs to the Special Issue Electrostatic Sensors and Actuators)
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29 pages, 12151 KiB  
Article
Design of a Tri-Axial Surface Micromachined MEMS Vibrating Gyroscope
by Rocco Crescenzi, Giuseppe Vincenzo Castellito, Simone Quaranta and Marco Balucani
Sensors 2020, 20(10), 2822; https://doi.org/10.3390/s20102822 - 15 May 2020
Cited by 4 | Viewed by 2646
Abstract
Gyroscopes are one of the next killer applications for the MEMS (Micro-Electro-Mechanical-Systems) sensors industry. Many mature applications have already been developed and produced in limited volumes for the automotive, consumer, industrial, medical, and military markets. Plenty of high-volume applications, over 100 million per [...] Read more.
Gyroscopes are one of the next killer applications for the MEMS (Micro-Electro-Mechanical-Systems) sensors industry. Many mature applications have already been developed and produced in limited volumes for the automotive, consumer, industrial, medical, and military markets. Plenty of high-volume applications, over 100 million per year, have been calling for low-cost gyroscopes. Bulk silicon is a promising candidate for low-cost gyroscopes due to its large scale availability and maturity of its manufacturing industry. Nevertheless, it is not suitable for a real monolithic IC integration and requires a dedicated packaging. New designs are supposed to eliminate the need for magnets and metal case package, and allow for a real monolithic MEMS-IC (Integrated Circuit) electronic system. In addition, a drastic cost reduction could be achieved by utilizing off-the-shelf plastic packaging with lead frames for the final assembly. The present paper puts forward the design of a novel tri-axial gyroscope based on rotating comb-drives acting as both capacitive sensors and actuators. The comb-drives are comprised of a single monolithic moving component (rotor) and fixed parts (stators). The former is made out of different concentrated masses connected by curved silicon beams in order to decouple the motion signals. The sensor was devised to be fabricated through the PolyMUMPs® process and it is intended for working in air in order to semplify the MEMS-IC monolithic integration. Full article
(This article belongs to the Special Issue Electrostatic Sensors and Actuators)
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Review

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26 pages, 3005 KiB  
Review
Recent Progress in Flexible Wearable Sensors for Vital Sign Monitoring
by Jihong Liu, Meilin Liu, Yu Bai, Jiahao Zhang, Hongwei Liu and Wenbin Zhu
Sensors 2020, 20(14), 4009; https://doi.org/10.3390/s20144009 - 19 Jul 2020
Cited by 68 | Viewed by 9800
Abstract
With the development of flexible electronic materials, as well as the wide development and application of smartphones, the cloud, and wireless systems, flexible wearable sensor technology has a significant and far-reaching impact on the realization of personalized medical care and the reform of [...] Read more.
With the development of flexible electronic materials, as well as the wide development and application of smartphones, the cloud, and wireless systems, flexible wearable sensor technology has a significant and far-reaching impact on the realization of personalized medical care and the reform of the consumer market in the future. However, due to the high requirements for accuracy, reliability, low power consumption, and less data error, the development of these potential areas is full of challenges. In order to solve these problems, this review mainly searches the literature from 2008 to May 2020, based on the PRISMA process. Based on them, this paper reviews the latest research progress of new flexible materials and different types of sensors for monitoring vital signs (including electrophysiological signals, body temperature, and respiratory frequency) in recent years. These materials and sensors can help realize accurate signal detection based on comfortable and sustainable observation, and may likely be applied to future daily clothing. Full article
(This article belongs to the Special Issue Electrostatic Sensors and Actuators)
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