Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator
AbstractQuality factor is one of the most important parameters for a MEMS resonator. Most MEMS resonators are dominated by thermoelastic dissipation (TED). This paper demonstrates that the TED in a disk resonator that is made of (111) single-crystal silicon is surpassed by clamping loss. The stiffness-mass decoupling design method, combined with reducing the beam width, was used to engineer high QTED. Experiments show that Q of the (111) disk resonator have an upper boundary that is determined by the clamping loss caused by the unbalanced out-of-plane displacement. The origin of the out-of-plane displacement is explained by theory and simulation. View Full-Text
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Zhou, X.; Xiao, D.; Li, Q.; Hu, Q.; Hou, Z.; He, K.; Chen, Z.; Zhao, C.; Wu, Y.; Wu, X.; Seshia, A. Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator. Micromachines 2018, 9, 25.
Zhou X, Xiao D, Li Q, Hu Q, Hou Z, He K, Chen Z, Zhao C, Wu Y, Wu X, Seshia A. Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator. Micromachines. 2018; 9(1):25.Chicago/Turabian Style
Zhou, Xin; Xiao, Dingbang; Li, Qingsong; Hu, Qian; Hou, Zhanqiang; He, Kaixuan; Chen, Zhihua; Zhao, Chun; Wu, Yulie; Wu, Xuezhong; Seshia, Ashwin. 2018. "Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator." Micromachines 9, no. 1: 25.
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