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Micromachines 2018, 9(1), 25; https://doi.org/10.3390/mi9010025

Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator

1
College of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha 410073, China
2
Nanoscience Centre, University of Cambridge, Cambridge CB3 0FF, UK
3
State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China
4
East China Institute of Photo-Electronic IC, Bengbu 233042, China
*
Author to whom correspondence should be addressed.
Received: 29 November 2017 / Revised: 4 January 2018 / Accepted: 8 January 2018 / Published: 22 January 2018
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Abstract

Quality factor is one of the most important parameters for a MEMS resonator. Most MEMS resonators are dominated by thermoelastic dissipation (TED). This paper demonstrates that the TED in a disk resonator that is made of (111) single-crystal silicon is surpassed by clamping loss. The stiffness-mass decoupling design method, combined with reducing the beam width, was used to engineer high QTED. Experiments show that Q of the (111) disk resonator have an upper boundary that is determined by the clamping loss caused by the unbalanced out-of-plane displacement. The origin of the out-of-plane displacement is explained by theory and simulation. View Full-Text
Keywords: Microelectromechanical systems; quality factor; thermoelastic dissipation; clamping loss; disk resonator; gyroscope Microelectromechanical systems; quality factor; thermoelastic dissipation; clamping loss; disk resonator; gyroscope
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
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Zhou, X.; Xiao, D.; Li, Q.; Hu, Q.; Hou, Z.; He, K.; Chen, Z.; Zhao, C.; Wu, Y.; Wu, X.; Seshia, A. Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator. Micromachines 2018, 9, 25.

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