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Micromachines 2018, 9(2), 53; doi:10.3390/mi9020053

Statistical Investigation of the Mechanical and Geometrical Properties of Polysilicon Films through On-Chip Tests

Dipartimento di Ingegneria Civile e Ambientale, Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milano, Italy
These authors contributed equally to this work.
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Received: 13 November 2017 / Revised: 23 January 2018 / Accepted: 28 January 2018 / Published: 30 January 2018
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Abstract

In this work, we provide a numerical/experimental investigation of the micromechanics-induced scattered response of a polysilicon on-chip MEMS testing device, whose moving structure is constituted by a slender cantilever supporting a massive perforated plate. The geometry of the cantilever was specifically designed to emphasize the micromechanical effects, in compliance with the process constraints. To assess the effects of the variability of polysilicon morphology and of geometrical imperfections on the experimentally observed nonlinear sensor response, we adopt statistical Monte Carlo analyses resting on a coupled electromechanical finite element model of the device. For each analysis, the polysilicon morphology was digitally built through a Voronoi tessellation of the moving structure, whose geometry was in turn varied by sampling out of a uniform probability density function the value of the over-etch, considered as the main source of geometrical imperfections. The comparison between the statistics of numerical and experimental results is adopted to assess the relative significance of the uncertainties linked to variations in the micro-fabrication process, and the mechanical film properties due to the polysilicon morphology. View Full-Text
Keywords: polysilicon morphology; over-etch; sensitivity to imperfections polysilicon morphology; over-etch; sensitivity to imperfections
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Mirzazadeh, R.; Ghisi, A.; Mariani, S. Statistical Investigation of the Mechanical and Geometrical Properties of Polysilicon Films through On-Chip Tests. Micromachines 2018, 9, 53.

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