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Micromachines 2017, 8(4), 131; doi:10.3390/mi8040131

Stencil Lithography for Scalable Micro- and Nanomanufacturing

1
Department of Mechanical Engineering, Stevens Institute of Technology, Hoboken, NJ 07030, USA
2
Department of Chemistry, University of California, Berkeley, CA 94720, USA
3
Northrop Grumman Mission Systems, Advanced Technology Labs, Linthicum, MD 21090, USA
*
Author to whom correspondence should be addressed.
Academic Editor: Franck Chollet
Received: 14 March 2017 / Revised: 7 April 2017 / Accepted: 13 April 2017 / Published: 19 April 2017
(This article belongs to the Special Issue Scalable Micro/Nano Patterning)
View Full-Text   |   Download PDF [6213 KB, uploaded 19 April 2017]   |  

Abstract

In this paper, we review the current development of stencil lithography for scalable micro- and nanomanufacturing as a resistless and reusable patterning technique. We first introduce the motivation and advantages of stencil lithography for large-area micro- and nanopatterning. Then we review the progress of using rigid membranes such as SiNx and Si as stencil masks as well as stacking layers. We also review the current use of flexible membranes including a compliant SiNx membrane with springs, polyimide film, polydimethylsiloxane (PDMS) layer, and photoresist-based membranes as stencil lithography masks to address problems such as blurring and non-planar surface patterning. Moreover, we discuss the dynamic stencil lithography technique, which significantly improves the patterning throughput and speed by moving the stencil over the target substrate during deposition. Lastly, we discuss the future advancement of stencil lithography for a resistless, reusable, scalable, and programmable nanolithography method. View Full-Text
Keywords: stencil lithography; scalable; micropatterning; nanopatterning stencil lithography; scalable; micropatterning; nanopatterning
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Du, K.; Ding, J.; Liu, Y.; Wathuthanthri, I.; Choi, C.-H. Stencil Lithography for Scalable Micro- and Nanomanufacturing. Micromachines 2017, 8, 131.

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