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Micromachines 2017, 8(6), 168; doi:10.3390/mi8060168

Large-Scale Fabrication of Porous Gold Nanowires via Laser Interference Lithography and Dealloying of Gold–Silver Nano-Alloys

1
Institut des Matériaux Jean Rouxel, IMN, Université de Nantes, CNRS, 2 rue de la Houssinière B.P. 32229, 44322 Nantes cedex 3, France
2
Department of Mechanical Engineering, Stevens Institute of Technology, Castle Point on Hudson, Hoboken, NJ 07030, USA
3
Department of Chemistry, University of California, Berkeley, CA 94720, USA
4
Northrop Grumman Mission Systems, Advanced Technology Laboratories, Linthicum, MD 21090, USA
*
Author to whom correspondence should be addressed.
Academic Editor: Maria Farsar
Received: 1 April 2017 / Revised: 11 May 2017 / Accepted: 19 May 2017 / Published: 24 May 2017
(This article belongs to the Special Issue Scalable Micro/Nano Patterning)
View Full-Text   |   Download PDF [6043 KB, uploaded 24 May 2017]   |  

Abstract

In this work, we report on an efficient approach to fabricating large-area and uniform planar arrays of highly ordered nanoporous gold nanowires. The approach consists in dealloying Au–Ag alloy nanowires in concentrated nitric acid. The Au–Ag alloy nanowires were obtained by thermal annealing at 800 °C for 2 h of Au/Ag stacked nanoribbons prepared by subsequent evaporation of silver and gold through a nanograted photoresist layer serving as a mask for a lift-off process. Laser interference lithography was employed for the nanopatterning of the photoresist layer to create the large-area nanostructured mask. The result shows that for a low Au-to-Ag ratio of 1, the nanowires tend to cracks during the dealloying due to the internal residual stress generated during the dealloying process, whereas the increase of the Au-to-Ag ratio to 3 can overcome the drawback and successfully leads to the obtainment of an array of highly ordered nanoporous gold nanowires. Nanoporous gold nanowires with such well-regulated organization on a wafer-scale planar substrate are of great significance in many applications including sensors and actuators. View Full-Text
Keywords: nanopatterning; nanoporous gold; laser interference lithography; dealloying nanopatterning; nanoporous gold; laser interference lithography; dealloying
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Chauvin, A.; Stephant, N.; Du, K.; Ding, J.; Wathuthanthri, I.; Choi, C.-H.; Tessier, P.-Y.; El Mel, A.-A. Large-Scale Fabrication of Porous Gold Nanowires via Laser Interference Lithography and Dealloying of Gold–Silver Nano-Alloys. Micromachines 2017, 8, 168.

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