Tip-Based Nanofabrication for Scalable Manufacturing
AbstractTip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use a nanometer scale tip to fabricate nanostructures. In this review, we first introduce the history of the TBN and the technology development. We then briefly review various TBN techniques that use different physical or chemical mechanisms to fabricate features and discuss some of the state-of-the-art techniques. Subsequently, we focus on those TBN methods that have demonstrated potential to scale up the manufacturing throughput. Finally, we discuss several research directions that are essential for making TBN a scalable nano-manufacturing technology. View Full-Text
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Hu, H.; Kim, H.J.; Somnath, S. Tip-Based Nanofabrication for Scalable Manufacturing. Micromachines 2017, 8, 90.
Hu H, Kim HJ, Somnath S. Tip-Based Nanofabrication for Scalable Manufacturing. Micromachines. 2017; 8(3):90.Chicago/Turabian Style
Hu, Huan; Kim, Hoe J.; Somnath, Suhas. 2017. "Tip-Based Nanofabrication for Scalable Manufacturing." Micromachines 8, no. 3: 90.
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