3D Finite Element Simulation of Graphene Nano-Electro-Mechanical Switches
AbstractIn this paper, we report the finite element method (FEM) simulation of double-clamped graphene nanoelectromechanical (NEM) switches. Pull-in and pull-out characteristics are analyzed for graphene NEM switches with different dimensions and these are consistent with the experimental results. This numerical model is used to study the scaling nature of the graphene NEM switches. We show the possibility of achieving a pull-in voltage as low as 2 V for a 1.5-μm-long and 3-nm-thick nanocrystalline graphene beam NEM switch. In order to study the mechanical reliability of the graphene NEM switches, von Mises stress analysis is carried out. This analysis shows that a thinner graphene beam results in a lower von Mises stress. Moreover, a strong electrostatic force at the beam edges leads to a mechanical deflection at the edges larger than that around the center of the beam, which is consistent with the von Mises stress analysis. View Full-Text
Scifeed alert for new publicationsNever miss any articles matching your research from any publisher
- Get alerts for new papers matching your research
- Find out the new papers from selected authors
- Updated daily for 49'000+ journals and 6000+ publishers
- Define your Scifeed now
Kulothungan, J.; Muruganathan, M.; Mizuta, H. 3D Finite Element Simulation of Graphene Nano-Electro-Mechanical Switches. Micromachines 2016, 7, 143.
Kulothungan J, Muruganathan M, Mizuta H. 3D Finite Element Simulation of Graphene Nano-Electro-Mechanical Switches. Micromachines. 2016; 7(8):143.Chicago/Turabian Style
Kulothungan, Jothiramalingam; Muruganathan, Manoharan; Mizuta, Hiroshi. 2016. "3D Finite Element Simulation of Graphene Nano-Electro-Mechanical Switches." Micromachines 7, no. 8: 143.
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.