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Micromachines 2016, 7(8), 143; doi:10.3390/mi7080143

3D Finite Element Simulation of Graphene Nano-Electro-Mechanical Switches

1
School of Materials Science, Japan Advanced Institute of Science and Technology, Nomi, Ishikawa 923-1292, Japan
2
Nanoelectronics and Nanotechnologies Research Group, Faculty of Physical Sciences and Engineering, University of Southampton, Highfield, Southampton SO17 1BJ, UK
*
Author to whom correspondence should be addressed.
Academic Editor: Ha Duong Ngo
Received: 14 June 2016 / Revised: 4 August 2016 / Accepted: 10 August 2016 / Published: 15 August 2016
(This article belongs to the Special Issue Graphene Nano-Electro-Mechanical (NEM) Devices and Applications)
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Abstract

In this paper, we report the finite element method (FEM) simulation of double-clamped graphene nanoelectromechanical (NEM) switches. Pull-in and pull-out characteristics are analyzed for graphene NEM switches with different dimensions and these are consistent with the experimental results. This numerical model is used to study the scaling nature of the graphene NEM switches. We show the possibility of achieving a pull-in voltage as low as 2 V for a 1.5-μm-long and 3-nm-thick nanocrystalline graphene beam NEM switch. In order to study the mechanical reliability of the graphene NEM switches, von Mises stress analysis is carried out. This analysis shows that a thinner graphene beam results in a lower von Mises stress. Moreover, a strong electrostatic force at the beam edges leads to a mechanical deflection at the edges larger than that around the center of the beam, which is consistent with the von Mises stress analysis. View Full-Text
Keywords: graphene; nanoelectromechanical (NEM) switches; pull-in and pull-out characteristics; von Mises stress graphene; nanoelectromechanical (NEM) switches; pull-in and pull-out characteristics; von Mises stress
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Kulothungan, J.; Muruganathan, M.; Mizuta, H. 3D Finite Element Simulation of Graphene Nano-Electro-Mechanical Switches. Micromachines 2016, 7, 143.

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