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Journal: Micromachines, 2012
Volume: 3
Page(s): 604-614
604-614
Article: Micromanufacturing in Fused Silica via Femtosecond Laser Irradiation Followed by Gas-Phase Chemical Etching
Venturini, F.; Sansotera, M.; Vazquez, R.M.; Osellame, R.; Cerullo, G.; Navarrini, W.

http://www.mdpi.com/2072-666X/3/4/604

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