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Journal: Micromachines, 2012
Volume: 3
Page(s): 270-278

Article: Capacitive Tactile Sensor Based on Dielectric Oil Displacement out of a Parylene Dome into Surrounding Channels
Takahashi, T.; Suzuki, M.; Iwamoto, S.; Aoyagi, S.

http://www.mdpi.com/2072-666X/3/2/270

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