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Micromachines 2012, 3(2), 255-269; doi:10.3390/mi3020255

Mechanical Vibrations of Thermally Actuated Silicon Membranes

1,* , 2
Received: 14 February 2012 / Revised: 14 March 2012 / Accepted: 26 March 2012 / Published: 28 March 2012
(This article belongs to the Special Issue Thermal Switches and Control of Heat Transfer in MEMS)
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A thermally-actuated micro-electro-mechanical (MEMS) device based on a vibrating silicon membrane has been proposed as a viscosity sensor by the authors. In this paper we analyze the vibration mode of the sensor as it vibrates freely at its natural frequency. Analytical examination is compared to finite element analysis, electrical measurements and the results obtained through real-time dynamic optical surface profilometry. The vertical movement of the membrane due to the applied heat is characterized statically and dynamically. The natural vibration mode is determined to be the (1,1) mode and good correlation is found between the analytical predictions, the simulation analysis, the observed mechanical displacement and the electrical measurements.
Keywords: MEMS; thermal actuation; thermal vibration; vibration mode MEMS; thermal actuation; thermal vibration; vibration mode
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Puchades, I.; Koz, M.; Fuller, L. Mechanical Vibrations of Thermally Actuated Silicon Membranes. Micromachines 2012, 3, 255-269.

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