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Mechanical Vibrations of Thermally Actuated Silicon Membranes
Electrical and Microelectronic Engineering Department, Rochester Institute of Technology, 82 Lomb Memorial Dr., Rochester, NY 14623, USA
Microsystems Engineering Department, Rochester Institute of Technology, 82 Lomb Memorial Dr., Rochester, NY 14623, USA
* Author to whom correspondence should be addressed.
Received: 14 February 2012; in revised form: 14 March 2012 / Accepted: 26 March 2012 / Published: 28 March 2012
Abstract: A thermally-actuated micro-electro-mechanical (MEMS) device based on a vibrating silicon membrane has been proposed as a viscosity sensor by the authors. In this paper we analyze the vibration mode of the sensor as it vibrates freely at its natural frequency. Analytical examination is compared to finite element analysis, electrical measurements and the results obtained through real-time dynamic optical surface profilometry. The vertical movement of the membrane due to the applied heat is characterized statically and dynamically. The natural vibration mode is determined to be the (1,1) mode and good correlation is found between the analytical predictions, the simulation analysis, the observed mechanical displacement and the electrical measurements.
Keywords: MEMS; thermal actuation; thermal vibration; vibration mode
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Puchades, I.; Koz, M.; Fuller, L. Mechanical Vibrations of Thermally Actuated Silicon Membranes. Micromachines 2012, 3, 255-269.
Puchades I, Koz M, Fuller L. Mechanical Vibrations of Thermally Actuated Silicon Membranes. Micromachines. 2012; 3(2):255-269.
Puchades, Ivan; Koz, Mustafa; Fuller, Lynn. 2012. "Mechanical Vibrations of Thermally Actuated Silicon Membranes." Micromachines 3, no. 2: 255-269.